Number | Name | Date | Kind |
---|---|---|---|
4693760 | Sioshansi | Sep 1987 | |
4851255 | Lagendijk et al. | Jul 1989 | |
4892752 | Fukuda | Jan 1990 | |
5124272 | Saito et al. | Jun 1992 | |
5158897 | Sato et al. | Oct 1992 | |
5527733 | Nishizawa et al. | Jun 1996 | |
5763021 | Young et al. | Jun 1998 |
Entry |
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"Shallow Junction Formation By Polyatomic Cluster Ion Implantation", by D. Takeuchi, N. Toyoda, N. Shimada, J. Matsuo and I. Yamada; Technical Report of IEIC, SDX 95-19G, pp. 83-89, Dec. 1995. |