Itsuki Kobata

Person

Fujisawa-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for polishing, processing system, and method of polishing
- Patent number 12,179,312
- Issue date Dec 31, 2024
- Ebara Corporation
- Takuya Moriura
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,154,797
- Issue date Nov 26, 2024
- Ebara Corporation
- Itsuki Kobata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 12,062,563
- Issue date Aug 13, 2024
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning module, substrate processing apparatus including cleaning...
- Patent number 12,033,847
- Issue date Jul 9, 2024
- Ebara Corporation
- Toshio Mizuno
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head system and polishing apparatus
- Patent number 12,017,323
- Issue date Jun 25, 2024
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing device, polishing method, and recording medium for record...
- Patent number 11,980,998
- Issue date May 14, 2024
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for polishing and method of polishing
- Patent number 11,926,018
- Issue date Mar 12, 2024
- Ebara Corporation
- Masayoshi Ito
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 11,839,948
- Issue date Dec 12, 2023
- Ebara Corporation
- Takashi Yamazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,731,240
- Issue date Aug 22, 2023
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head system and polishing apparatus
- Patent number 11,673,222
- Issue date Jun 13, 2023
- Ebara Corporation
- Katsuhide Watanabe
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing machine and a polishing method for a substrate
- Patent number 11,465,254
- Issue date Oct 11, 2022
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 11,450,544
- Issue date Sep 20, 2022
- Ebara Corporation
- Itsuki Kobata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 11,192,216
- Issue date Dec 7, 2021
- Ebara Corporation
- Hiromitsu Watanabe
- B24 - GRINDING POLISHING
Information Patent Grant
Method for processing substrate and substrate processing apparatus
- Patent number 11,069,563
- Issue date Jul 20, 2021
- EBARA CORPORATION
- Atsuo Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing-amount simulation method for buffing, and buffing apparatus
- Patent number 10,792,782
- Issue date Oct 6, 2020
- Ebara Corporation
- Kuniaki Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 10,665,487
- Issue date May 26, 2020
- Ebara Corporation
- Itsuki Kobata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Head height adjustment device and substrate processing apparatus pr...
- Patent number 10,556,314
- Issue date Feb 11, 2020
- Ebara Corporation
- Suguru Sakugawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 10,343,255
- Issue date Jul 9, 2019
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,201,888
- Issue date Feb 12, 2019
- Ebara Corporation
- Kuniaki Yamaguchi
- B08 - CLEANING
Information Patent Grant
Buffing apparatus, and substrate processing apparatus
- Patent number 10,183,374
- Issue date Jan 22, 2019
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Buffing apparatus and substrate processing apparatus
- Patent number 10,131,030
- Issue date Nov 20, 2018
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 9,969,048
- Issue date May 15, 2018
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,700,988
- Issue date Jul 11, 2017
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,401,293
- Issue date Jul 26, 2016
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Method for regenerating ion exchanger
- Patent number 8,133,380
- Issue date Mar 13, 2012
- Ebara Corporation
- Takayuki Saito
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Polishing method
- Patent number 7,960,188
- Issue date Jun 14, 2011
- Ebara Corporation
- Shinrou Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrolytic processing apparatus and method
- Patent number 7,655,118
- Issue date Feb 2, 2010
- Ebara Corporation
- Mitsuhiko Shirakashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrolytic processing apparatus and electrolytic processing method
- Patent number 7,638,030
- Issue date Dec 29, 2009
- Ebara Corporation
- Osamu Nabeya
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electrolytic processing method
- Patent number 7,578,920
- Issue date Aug 25, 2009
- Ebara Corporation
- Ikutaro Noji
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electrolytic processing apparatus and substrate processing apparatu...
- Patent number 7,569,135
- Issue date Aug 4, 2009
- Ebara Corporation
- Mitsuhiko Shirakashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
POLISHING HEAD AND POLISHING SYSTEM
- Publication number 20240399526
- Publication date Dec 5, 2024
- EBARA CORPORATION
- Yuichi KATO
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
- Publication number 20240087963
- Publication date Mar 14, 2024
- EBARA CORPORATION
- Akira FUKUNAGA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20240033876
- Publication date Feb 1, 2024
- EBARA CORPORATION
- Shumpei MIURA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230405762
- Publication date Dec 21, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20230352326
- Publication date Nov 2, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230038445
- Publication date Feb 9, 2023
- EBARA CORPORATION
- Itsuki KOBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20230008720
- Publication date Jan 12, 2023
- EBARA CORPORATION
- Masayoshi ITO
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20220375775
- Publication date Nov 24, 2022
- EBARA CORPORATION
- Itsuki KOBATA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20220168866
- Publication date Jun 2, 2022
- EBARA CORPORATION
- Erina Baba
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING MODULE, SUBSTRATE PROCESSING APPARATUS INCLUDING CLEANING...
- Publication number 20220013352
- Publication date Jan 13, 2022
- Toshio Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR POLISHING AND METHOD OF POLISHING
- Publication number 20210347010
- Publication date Nov 11, 2021
- EBARA CORPORATION
- Masayoshi ITO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD SYSTEM AND POLISHING APPARATUS
- Publication number 20210308823
- Publication date Oct 7, 2021
- EBARA CORPORATION
- Katsuhide Watanabe
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR POLISHING, PROCESSING SYSTEM, AND METHOD OF POLISHING
- Publication number 20210283746
- Publication date Sep 16, 2021
- EBARA CORPORATION
- Takuya MORIURA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FABRICATING CATALYST...
- Publication number 20210265176
- Publication date Aug 26, 2021
- EBARA CORPORATION
- Atsuo Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING HEAD SYSTEM AND POLISHING APPARATUS
- Publication number 20210237224
- Publication date Aug 5, 2021
- EBARA CORPORATION
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SU...
- Publication number 20210187685
- Publication date Jun 24, 2021
- EBARA CORPORATION
- Atsuo Katagiri
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
- Publication number 20210166967
- Publication date Jun 3, 2021
- EBARA CORPORATION
- Akira FUKUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING-AMOUNT SIMULATION METHOD FOR BUFFING, AND BUFFING APPARATUS
- Publication number 20210023672
- Publication date Jan 28, 2021
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20210013071
- Publication date Jan 14, 2021
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200294847
- Publication date Sep 17, 2020
- EBARA CORPORATION
- Atsuo Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING DEVICE, POLISHING METHOD, AND RECORDING MEDIUM FOR RECORD...
- Publication number 20200269385
- Publication date Aug 27, 2020
- EBARA CORPORATION
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING DEVICE AND SUBSTRATE POLISHING METHOD
- Publication number 20200269383
- Publication date Aug 27, 2020
- EBARA CORPORATION
- Hozumi YASUDA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20200243364
- Publication date Jul 30, 2020
- EBARA CORPORATION
- Itsuki KOBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR SPECIFYING AREA TO B...
- Publication number 20200223027
- Publication date Jul 16, 2020
- EBARA CORPORATION
- Katsuhide WATANABE
- B24 - GRINDING POLISHING
Information Patent Application
CATALYST USED FOR CATALYST-REFERRED ETCHING, PROCESSING PAD PROVIDE...
- Publication number 20200194285
- Publication date Jun 18, 2020
- EBARA CORPORATION
- Atsuo Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20200171621
- Publication date Jun 4, 2020
- EBARA CORPORATION
- Takashi Yamazaki
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING MACHINE AND A POLISHING METHOD FOR A SUBSTRATE
- Publication number 20200171618
- Publication date Jun 4, 2020
- EBARA CORPORATION
- Itsuki KOBATA
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHOD FOR PLANARIZING SUBSTRATE
- Publication number 20190143477
- Publication date May 16, 2019
- EBARA CORPORATION
- Erina BABA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190118338
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM INCL...
- Publication number 20180286717
- Publication date Oct 4, 2018
- EBARA CORPORATION
- Katsuhide WATANABE
- H01 - BASIC ELECTRIC ELEMENTS

Itsuki Kobata

Person

Patents Grantslast 30 patents

Apparatus for polishing, processing system, and method of polishing

Substrate processing method and substrate processing apparatus

Substrate processing apparatus, substrate processing system, and su...

Cleaning module, substrate processing apparatus including cleaning...

Polishing head system and polishing apparatus

Polishing device, polishing method, and recording medium for record...

Apparatus for polishing and method of polishing

Polishing apparatus

Substrate processing apparatus

Polishing head system and polishing apparatus

Polishing machine and a polishing method for a substrate

Substrate processing apparatus, substrate processing system, and su...

Polishing method and polishing apparatus

Method for processing substrate and substrate processing apparatus

Polishing-amount simulation method for buffing, and buffing apparatus

Substrate processing apparatus, substrate processing system, and su...

Head height adjustment device and substrate processing apparatus pr...

Polishing apparatus

Substrate processing apparatus

Buffing apparatus, and substrate processing apparatus

Buffing apparatus and substrate processing apparatus

Polishing apparatus

Substrate processing apparatus

Polishing apparatus and polishing method

Method for regenerating ion exchanger

Polishing method

Electrolytic processing apparatus and method

Electrolytic processing apparatus and electrolytic processing method

Electrolytic processing method

Electrolytic processing apparatus and substrate processing apparatu...

Patents Applicationslast 30 patents

POLISHING HEAD AND POLISHING SYSTEM

SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

POLISHING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

POLISHING APPARATUS AND POLISHING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

CLEANING MODULE, SUBSTRATE PROCESSING APPARATUS INCLUDING CLEANING...

APPARATUS FOR POLISHING AND METHOD OF POLISHING

POLISHING HEAD SYSTEM AND POLISHING APPARATUS

APPARATUS FOR POLISHING, PROCESSING SYSTEM, AND METHOD OF POLISHING

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FABRICATING CATALYST...

POLISHING HEAD SYSTEM AND POLISHING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SU...

SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

POLISHING-AMOUNT SIMULATION METHOD FOR BUFFING, AND BUFFING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD

METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

POLISHING DEVICE, POLISHING METHOD, AND RECORDING MEDIUM FOR RECORD...

SUBSTRATE POLISHING DEVICE AND SUBSTRATE POLISHING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR SPECIFYING AREA TO B...

CATALYST USED FOR CATALYST-REFERRED ETCHING, PROCESSING PAD PROVIDE...

POLISHING APPARATUS

POLISHING MACHINE AND A POLISHING METHOD FOR A SUBSTRATE

APPARATUS AND METHOD FOR PLANARIZING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM INCL...