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Ivan L. Berry III
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Ion beam etching with sidewall cleaning
Patent number
12,029,133
Issue date
Jul 2, 2024
Lam Research Corporation
Thorsten Lill
G11 - INFORMATION STORAGE
Information
Patent Grant
Electron excitation atomic layer etch
Patent number
11,637,022
Issue date
Apr 25, 2023
Lam Research Corporation
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Predicting etch characteristics in thermal etching and atomic layer...
Patent number
11,520,953
Issue date
Dec 6, 2022
Lam Research Corporation
Thorsten Lill
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Ion beam etching utilizing cryogenic wafer temperatures
Patent number
11,289,306
Issue date
Mar 29, 2022
Lam Research Corporation
Thorsten Lill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for processing wafer-shaped articles
Patent number
11,195,730
Issue date
Dec 7, 2021
Lam Research AG
Rainer Obweger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion injector and lens system for ion beam milling
Patent number
11,062,920
Issue date
Jul 13, 2021
Lam Research Corporation
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam etch without need for wafer tilt or rotation
Patent number
10,998,167
Issue date
May 4, 2021
Lam Research Corporation
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam etch without need for wafer tilt or rotation
Patent number
10,825,652
Issue date
Nov 3, 2020
Lam Research Corporation
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Isotropic atomic layer etch for silicon oxides using no activation
Patent number
10,679,868
Issue date
Jun 9, 2020
Lam Research Corporation
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Differentially pumped reactive gas injector
Patent number
10,580,628
Issue date
Mar 3, 2020
Lam Research Corporation
Ivan L. Berry
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for processing wafer-shaped articles
Patent number
10,490,426
Issue date
Nov 26, 2019
Lam Research AG
Rainer Obweger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Use of ion beam etching to generate gate-all-around structure
Patent number
10,483,085
Issue date
Nov 19, 2019
Lam Research Corporation
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra-high vacuum transport and storage
Patent number
10,153,282
Issue date
Dec 11, 2018
Lam Research Corporation
Theodoros Panagopoulos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion injector and lens system for ion beam milling
Patent number
9,916,993
Issue date
Mar 13, 2018
Lam Research Corporation
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for achieving ultra-high selectivity while etching silicon n...
Patent number
9,911,620
Issue date
Mar 6, 2018
Lam Research Corporation
Helen H. Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Differentially pumped reactive gas injector
Patent number
9,837,254
Issue date
Dec 5, 2017
Lam Research Corporation
Ivan L. Berry
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Control of the incidence angle of an ion beam on a substrate
Patent number
9,812,349
Issue date
Nov 7, 2017
Lam Research Corporation
Ivelin Angelov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam etching utilizing cryogenic wafer temperatures
Patent number
9,779,955
Issue date
Oct 3, 2017
Lam Research Corporation
Thorsten Lill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma dry strip pretreatment to enhance ion implanted resist removal
Patent number
9,740,104
Issue date
Aug 22, 2017
Lam Research Corporation
Ivan L. Berry
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems and methods for forming ultra-shallow junctions
Patent number
9,543,150
Issue date
Jan 10, 2017
Lam Research Corporation
Yunsang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Use of ion beam etching to generate gate-all-around structure
Patent number
9,536,748
Issue date
Jan 3, 2017
Lam Research Corporation
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Peroxide-vapor treatment for enhancing photoresist-strip performanc...
Patent number
9,514,954
Issue date
Dec 6, 2016
Lam Research Corporation
Bayu Atmaja Thedjoisworo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Isotropic atomic layer etch for silicon and germanium oxides
Patent number
9,431,268
Issue date
Aug 30, 2016
Lam Research Corporation
Thorsten Lill
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Isotropic atomic layer etch for silicon oxides using no activation
Patent number
9,425,041
Issue date
Aug 23, 2016
Lam Research Corporation
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion injector and lens system for ion beam milling
Patent number
9,406,535
Issue date
Aug 2, 2016
Lam Research Corporation
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma mediated ashing processes that include formation of a protec...
Patent number
9,128,382
Issue date
Sep 8, 2015
Lam Research Corporation
Ivan Berry
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid distribution members and/or assemblies
Patent number
9,129,778
Issue date
Sep 8, 2015
Lam Research Corporation
Armin Huseinovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of doping semiconductors
Patent number
8,071,451
Issue date
Dec 6, 2011
Axcelis Technologies, Inc.
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structures and methods for measuring beam angle in an ion implanter
Patent number
7,728,293
Issue date
Jun 1, 2010
Axcelis Technologies, Inc.
Leonard M. Rubin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultraviolet assisted pore sealing of porous low k dielectric films
Patent number
7,704,872
Issue date
Apr 27, 2010
Axcelis Technologies, Inc.
Carlo Waldfried
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ION BEAM ETCHING WITH SIDEWALL CLEANING
Publication number
20240315141
Publication date
Sep 19, 2024
LAM RESEARCH CORPORATION
Thorsten LILL
G11 - INFORMATION STORAGE
Information
Patent Application
ELECTRON EXCITATION ATOMIC LAYER ETCH
Publication number
20230298904
Publication date
Sep 21, 2023
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCH TOOL FOR HIGH ASPECT RATIO ETCHING
Publication number
20220165546
Publication date
May 26, 2022
LAM RESEARCH CORPORATION
Thorsten Lill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM ETCHING WITH SIDEWALL CLEANING
Publication number
20220131071
Publication date
Apr 28, 2022
LAM RESEARCH CORPORATION
Thorsten Lill
G11 - INFORMATION STORAGE
Information
Patent Application
ELECTRON EXCITATION ATOMIC LAYER ETCH
Publication number
20210280433
Publication date
Sep 9, 2021
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
Publication number
20200090956
Publication date
Mar 19, 2020
LAM RESEARCH AG
Rainer Obweger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PREDICTING ETCH CHARACTERISTICS IN THERMAL ETCHING AND ATOMIC LAYER...
Publication number
20190340316
Publication date
Nov 7, 2019
LAM RESEARCH CORPORATION
Thorsten Lill
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ION BEAM ETCH WITHOUT NEED FOR WAFER TILT OR ROTATION
Publication number
20190237298
Publication date
Aug 1, 2019
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR PATTERNING OF HIGH DENSITY STANDALONE MRAM...
Publication number
20180233662
Publication date
Aug 16, 2018
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION INJECTOR AND LENS SYSTEM FOR ION BEAM MILLING
Publication number
20180166304
Publication date
Jun 14, 2018
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR ACHIEVING ULTRA-HIGH SELECTIVITY WHILE ETCHING SILICO...
Publication number
20180158692
Publication date
Jun 7, 2018
LAM RESEARCH CORPORATION
Helen H. Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIFFERENTIALLY PUMPED REACTIVE GAS INJECTOR
Publication number
20180047548
Publication date
Feb 15, 2018
LAM RESEARCH CORPORATION
Ivan L. Berry
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ION BEAM ETCHING UTILIZING CRYOGENIC WAFER TEMPERATURES
Publication number
20170372911
Publication date
Dec 28, 2017
LAM RESEARCH CORPORATION
Thorsten Lill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Control Of The Incidence Angle Of An Ion Beam On A Substrate
Publication number
20170330788
Publication date
Nov 16, 2017
LAM RESEARCH CORPORATION
Ivelin Angelov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM ETCHING UTILIZING CRYOGENIC WAFER TEMPERATURES
Publication number
20170250087
Publication date
Aug 31, 2017
LAM RESEARCH CORPORATION
Thorsten Lill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONFORMAL DOPING USING DOPANT GAS ON HYDROGEN PLASMA TREATED SURFACE
Publication number
20170170018
Publication date
Jun 15, 2017
LAM RESEARCH CORPORATION
Yunsang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL OF THE INCIDENCE ANGLE OF AN ION BEAM ON A SUBSTRATE
Publication number
20170154804
Publication date
Jun 1, 2017
LAM RESEARCH CORPORATION
Ivelin Angelov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPUTER ADDRESSABLE PLASMA DENSITY MODIFICATION FOR ETCH AND DEPOS...
Publication number
20170133202
Publication date
May 11, 2017
LAM RESEARCH CORPORATION
Ivan L. Berry
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
USE OF ION BEAM ETCHING TO GENERATE GATE-ALL-AROUND STRUCTURE
Publication number
20170062181
Publication date
Mar 2, 2017
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR FORMING ULTRA-SHALLOW JUNCTIONS
Publication number
20160365251
Publication date
Dec 15, 2016
LAM RESEARCH CORPORATION
Yunsang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ISOTROPIC ATOMIC LAYER ETCH FOR SILICON OXIDES USING NO ACTIVATION
Publication number
20160329221
Publication date
Nov 10, 2016
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION INJECTOR AND LENS SYSTEM FOR ION BEAM MILLING
Publication number
20160307781
Publication date
Oct 20, 2016
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ACHIEVING ULTRA-HIGH SELECTIVITY WHILE ETCHING SILICON N...
Publication number
20160247688
Publication date
Aug 25, 2016
LAM RESEARCH CORPORATION
Helen H. Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ISOTROPIC ATOMIC LAYER ETCH FOR SILICON OXIDES USING NO ACTIVATION
Publication number
20160196969
Publication date
Jul 7, 2016
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ISOTROPIC ATOMIC LAYER ETCH FOR SILICON AND GERMANIUM OXIDES
Publication number
20160196984
Publication date
Jul 7, 2016
LAM RESEARCH CORPORATION
Thorsten Lill
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELECTIVE NITRIDE ETCH
Publication number
20160181116
Publication date
Jun 23, 2016
LAM RESEARCH CORPORATION
Ivan L. Berry
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
USE OF ION BEAM ETCHING TO GENERATE GATE-ALL-AROUND STRUCTURE
Publication number
20160111294
Publication date
Apr 21, 2016
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM ETCH WITHOUT NEED FOR WAFER TILT OR ROTATION
Publication number
20160064232
Publication date
Mar 3, 2016
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
Publication number
20160064242
Publication date
Mar 3, 2016
LAM RESEARCH AG
Rainer OBWEGER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION INJECTOR AND LENS SYSTEM FOR ION BEAM MILLING
Publication number
20160064260
Publication date
Mar 3, 2016
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS