Ivan Pollentier

Person

Langdorp, BE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming an extreme ultraviolet lithography pellicle
- Patent number 11,599,019
- Issue date Mar 7, 2023
- Imec VZW
- Marina Timmermans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography scanner
- Patent number 11,181,818
- Issue date Nov 23, 2021
- Imec VZW
- Emily Gallagher
- D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information Patent Grant
Induced stress for EUV pellicle tensioning
- Patent number 11,163,229
- Issue date Nov 2, 2021
- Imec VZW
- Marina Mariano Juste
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming a pellicle
- Patent number 11,092,886
- Issue date Aug 17, 2021
- Imec VZW
- Marina Timmermans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming a carbon nanotube pellicle membrane
- Patent number 10,712,659
- Issue date Jul 14, 2020
- Imec VZW
- Emily Gallagher
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Detection of contamination in EUV systems
- Patent number 9,086,638
- Issue date Jul 21, 2015
- IMEC
- Rik Jonckheere
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods and systems for characterising and optimising immersion lit...
- Patent number 7,528,387
- Issue date May 5, 2009
- Interuniversitair Microelektronica Centrum (IMEC)
- Ivan Pollentier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method for Forming an Extreme Ultraviolet Lithography Pellicle
- Publication number 20210191255
- Publication date Jun 24, 2021
- IMEC vzw
- Marina Timmermans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography Scanner
- Publication number 20200209737
- Publication date Jul 2, 2020
- IMEC vzw
- Emily Gallagher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Induced Stress for EUV Pellicle Tensioning
- Publication number 20200201169
- Publication date Jun 25, 2020
- IMEC vzw
- Marina Mariano Juste
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for Forming a Carbon Nanotube Pellicle Membrane
- Publication number 20180329289
- Publication date Nov 15, 2018
- IMEC vzw
- Emily Gallagher
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method for Forming a Pellicle
- Publication number 20180329291
- Publication date Nov 15, 2018
- IMEC vzw
- Marina Timmermans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION OF CONTAMINATION IN EUV SYSTEMS
- Publication number 20120099092
- Publication date Apr 26, 2012
- IMEC
- Rik Jonckheere
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION OF CONTAMINATION IN EUV SYSTEMS
- Publication number 20090103069
- Publication date Apr 23, 2009
- Interuniversitair Microelektronica Centrum vzw (IMEC)
- Rik Jonckheere
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and systems for characterising and optimising immersion lit...
- Publication number 20070152170
- Publication date Jul 5, 2007
- Interuniversitair Microelektronica Centrum (IMEC)
- Ivan Pollentier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Ivan Pollentier

Person

Patents Grantslast 30 patents

Method for forming an extreme ultraviolet lithography pellicle

Lithography scanner

Induced stress for EUV pellicle tensioning

Method for forming a pellicle

Method for forming a carbon nanotube pellicle membrane

Detection of contamination in EUV systems

Methods and systems for characterising and optimising immersion lit...

Patents Applicationslast 30 patents

Method for Forming an Extreme Ultraviolet Lithography Pellicle

Lithography Scanner

Induced Stress for EUV Pellicle Tensioning

Method for Forming a Carbon Nanotube Pellicle Membrane

Method for Forming a Pellicle

DETECTION OF CONTAMINATION IN EUV SYSTEMS

DETECTION OF CONTAMINATION IN EUV SYSTEMS

Methods and systems for characterising and optimising immersion lit...