Iwao Kumasaka

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Kanagawa-Ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Operating system for fabrication apparatus
- Patent number 6,122,556
- Issue date Sep 19, 2000
- Tokyo Electron Limited
- Satoshi Tochiori
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate treatment equipment and method with testing feature
- Patent number 6,092,980
- Issue date Jul 25, 2000
- Tokyo Electron Limited
- Iwao Kumasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus
- Patent number 5,942,012
- Issue date Aug 24, 1999
- Tokyo Electron Limited
- Iwao Kumasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Teaching method for loading arm for objects to be processed
- Patent number 5,822,498
- Issue date Oct 13, 1998
- Tokyo Electron Limited
- Iwao Kumasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operation control device and method for a plurality of electric pow...
- Patent number 5,770,895
- Issue date Jun 23, 1998
- Tokyo Electron Limited
- Iwao Kumasaka
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER