Number | Date | Country | Kind |
---|---|---|---|
7-132776 | May 1995 | JPX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/JP96/01136 | 4/25/1996 | 10/28/1997 | 10/28/1997 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO96/35232 | 11/7/1996 |
Number | Name | Date | Kind |
---|---|---|---|
4574263 | Liddiard | Mar 1986 | |
4678432 | Teraoka | Jul 1987 | |
4938655 | Asano | Jul 1990 | |
5273244 | Ono | Dec 1993 | |
5370709 | Kobayashi | Dec 1994 | |
5423503 | Tanaka et al. | Jun 1995 | |
5429498 | Okase et al. | Jul 1995 |
Number | Date | Country |
---|---|---|
0381338 A2 | Aug 1990 | EPX |
63-167726 | Nov 1988 | JPX |
6-97263 | Sep 1992 | JPX |
7-45547 | Feb 1995 | JPX |
Entry |
---|
Abstract, 6-97263 (A), Apr. 8, 1994, Appl. No. 4-265632, Sep. 9, 1992, Wafer Transfer Control System, Kokusai Electric Co., Ltd., Inventor: Ryoji Saito. |