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Izumi Kasahara
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Numazu, JP
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last 30 patents
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Patent Grant
Method of checking pattern and apparatus therefor
Patent number
4,958,374
Issue date
Sep 18, 1990
Toshiba Machine Company, Ltd.
Masakazu Tokita
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Electron beam lithography system for delineating a desired pattern...
Patent number
4,868,395
Issue date
Sep 19, 1989
Toshiba Machine Co., Ltd.
Izumi Kasahara
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of drawing a desired pattern on a target through exposure th...
Patent number
4,743,766
Issue date
May 10, 1988
Kabushiki Kaisha Toshiba
Mamoru Nakasuji
B82 - NANO-TECHNOLOGY