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J. Rex Runyon
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Detecting defects on a wafer using template image matching
Patent number
9,311,698
Issue date
Apr 12, 2016
KLA-Tencor Corp.
Xing Chu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Air bearing for substrate inspection device
Patent number
8,817,250
Issue date
Aug 26, 2014
KLA-Tencor Corporation
Paul Doyle
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Detecting Defects on a Wafer Using Template Image Matching
Publication number
20140193065
Publication date
Jul 10, 2014
KLA-Tencor Corporation
Xing Chu
G01 - MEASURING TESTING
Information
Patent Application
Referenced Inspection Device
Publication number
20120062877
Publication date
Mar 15, 2012
KLA-Tencor Corporation
Paul Doyle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Referenced Inspection Device
Publication number
20110069306
Publication date
Mar 24, 2011
KLA-Tencor Corporation
Paul Doyle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UV compatible programmable spatial filter
Publication number
20030184739
Publication date
Oct 2, 2003
KLA-Tencor Technologies Corporation
Dieter E. Wilk
G02 - OPTICS