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DC bias in plasma process
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Patent number 12,217,936
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Issue date Feb 4, 2025
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Taiwan Semiconductor Manufacturing Co., Ltd
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Sheng-Liang Pan
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H01 - BASIC ELECTRIC ELEMENTS
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DC bias in plasma process
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Patent number 11,854,766
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Issue date Dec 26, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd
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Sheng-Liang Pan
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H01 - BASIC ELECTRIC ELEMENTS
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DC bias in plasma process
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Patent number 11,404,245
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Issue date Aug 2, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd
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Sheng-Liang Pan
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H01 - BASIC ELECTRIC ELEMENTS
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Layer for side wall passivation
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Patent number 11,121,025
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Issue date Sep 14, 2021
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Taiwan Semiconductor Manufacturing Company, Ltd
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Yun-Chang Hsu
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H01 - BASIC ELECTRIC ELEMENTS
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