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Chu-Bei City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
System for improving critical dimension uniformity
Patent number
8,027,529
Issue date
Sep 27, 2011
Taiwan Semiconductor Manufacturing Company, Ltd.
Shinn-Sheng Yu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extracting ordinary and extraordinary optical characteristics for c...
Patent number
7,787,685
Issue date
Aug 31, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Jacky Huang
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for optimizing sub-nanometer critical dimension u...
Patent number
7,777,884
Issue date
Aug 17, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Ming Ke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for improving critical dimension uniformity
Patent number
7,732,109
Issue date
Jun 8, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Shinn-Sheng Yu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for improving accuracy of critical dimension metr...
Patent number
7,580,129
Issue date
Aug 25, 2009
Taiwan Semiconductor Manufacturing Company
Shinn-Sheng Yu
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods for optical measurement
Patent number
7,349,086
Issue date
Mar 25, 2008
Taiwan Semiconductor Manufacturing Co., Ltd.
Joung-Wei Liou
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
System For Improving Critical Dimension Uniformity
Publication number
20100201961
Publication date
Aug 12, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Shinn-Sheng Yu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM FOR IMPROVING CRITICAL DIMENSION UNIFORMITY
Publication number
20080248403
Publication date
Oct 9, 2008
Taiwan Semiconductor Manufacturing Company, Ltd.
Shinn-Sheng Yu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and System for Optimizing Lithography Focus and/or Energy Us...
Publication number
20080233487
Publication date
Sep 25, 2008
Taiwan Semiconductor Manufacturing Company, Ltd.
Jacky Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and System for Improving Accuracy of Critical Dimension Metr...
Publication number
20080204730
Publication date
Aug 28, 2008
Taiwan Semiconductor Manufacturing Company, Ltd.
Shinn-Sheng Yu
G01 - MEASURING TESTING
Information
Patent Application
Method and System For Optimizing Sub-Nanometer Critical Dimension U...
Publication number
20080174778
Publication date
Jul 24, 2008
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Ming Ke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTRACTING ORDINARY AND EXTRAORDINARY OPTICAL CHARACTERISTICS FOR C...
Publication number
20070242263
Publication date
Oct 18, 2007
Taiwan Semiconductor Manufacturing Company, Ltd.
Jacky Huang
G01 - MEASURING TESTING
Information
Patent Application
Systems and methods for optical measurement
Publication number
20070153272
Publication date
Jul 5, 2007
Taiwan Semiconductor Manufacturing Co., Ltd.
Joung-Wei Liou
G01 - MEASURING TESTING
Information
Patent Application
Integrated optical metrology and lithographic process track for dyn...
Publication number
20060222975
Publication date
Oct 5, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Ming Ke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY