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Multi-gas straight channel showerhead
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Patent number 9,644,267
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Issue date May 9, 2017
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Applied Materials, Inc.
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Brian H. Burrows
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Multi-gas straight channel showerhead
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Patent number 8,481,118
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Issue date Jul 9, 2013
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Applied Materials, Inc.
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Brian H. Burrows
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Multi-gas straight channel showerhead
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Patent number 7,976,631
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Issue date Jul 12, 2011
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Applied Materials, Inc.
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Brian H. Burrows
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...