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Jae Hyun Bae
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Gumi-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer loading apparatus of wafer polishing equipment and method for...
Patent number
10,068,785
Issue date
Sep 4, 2018
SK SILTRON CO., LTD.
Jae Hyun Bae
B24 - GRINDING POLISHING
Information
Patent Grant
Slurry supply device and polishing apparatus including the same
Patent number
9,358,666
Issue date
Jun 7, 2016
LG SILTRON INCORPORATED
Jae Hyun Bae
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
WAFER LOADING APPARATUS OF WAFER POLISHING EQUIPMENT AND METHOD FOR...
Publication number
20170323814
Publication date
Nov 9, 2017
LG SILTRON INCORPORATED
Jae Hyun BAE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY SUPPLY DEVICE AND POLISHING APPARATUS INCLUDING THE SAME
Publication number
20160045999
Publication date
Feb 18, 2016
LG SILTRON INCORPORATED
Jae Hyun Bae
B24 - GRINDING POLISHING