Jake Chang

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Keelung City, TW

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Patents Applicationslast 30 patents

Information Patent Application
Apparatus for the prevention of arcing in a CVD-TiN chamber
- Publication number 20050133165
- Publication date Jun 23, 2005
- Taiwan Semiconductor Manufacturing Co.
- Kuang-Hsing Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...