Jakub Rybczynski

Person

Arlington, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck having a gas flow feature, and related methods
- Patent number 11,837,492
- Issue date Dec 5, 2023
- Entegris, Inc.
- Yan Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with charge dissipation coating
- Patent number 11,742,781
- Issue date Aug 29, 2023
- Entegris, Inc.
- Yan Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck with embossments that comprise diamond-like car...
- Patent number 11,612,972
- Issue date Mar 28, 2023
- Entegris, Inc.
- Yan Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Spiraling polyphase electrodes for electrostatic chuck
- Patent number 11,417,557
- Issue date Aug 16, 2022
- Entegris, Inc.
- Chun Wang Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grounding mechanism for multi-layer for electrostatic chuck, and re...
- Patent number 11,309,207
- Issue date Apr 19, 2022
- Entegris, Inc.
- Steven Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and method of making same
- Patent number 10,497,598
- Issue date Dec 3, 2019
- Entegris, Inc.
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with photo-patternable soft protrusion contact...
- Patent number 9,721,821
- Issue date Aug 1, 2017
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck with photo-patternable soft protrusion contact...
- Patent number 8,861,170
- Issue date Oct 14, 2014
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK THAT INCLUDES UPPER CERAMIC LAYER THAT INCLUDES...
- Publication number 20230136703
- Publication date May 4, 2023
- Entegris, Inc.
- Yan Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK AND RELATED METHODS AND STRUCTURES
- Publication number 20230084930
- Publication date Mar 16, 2023
- Entegris, Inc.
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK PREPARED BY ADDITIVE MANUFACTURING, AND RELATED...
- Publication number 20220208592
- Publication date Jun 30, 2022
- Entegris, Inc.
- Chandra VENKATRAMAN
- B22 - CASTING POWDER METALLURGY
Information Patent Application
SPIRALING POLYPHASE ELECTRODES FOR ELECTROSTATIC CHUCK
- Publication number 20220189811
- Publication date Jun 16, 2022
- Entegris, Inc.
- Chun Wang CHAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH EMBOSSMENTS THAT COMPRISE DIAMOND-LIKE CAR...
- Publication number 20220063035
- Publication date Mar 3, 2022
- Entegris, Inc.
- Yan LIU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROSTATIC CHUCK HAVING A GAS FLOW FEATURE, AND RELATED METHODS
- Publication number 20210351061
- Publication date Nov 11, 2021
- Entegris, Inc.
- Yan LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUNDING MECHANISM FOR MULTI-LAYER FOR ELECTROSTATIC CHUCK, AND RE...
- Publication number 20210028046
- Publication date Jan 28, 2021
- Entegris, Inc.
- Steven DONNELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH CHARGE DISSIPATION COATING
- Publication number 20200161158
- Publication date May 21, 2020
- Entegris, Inc.
- Yan LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck and Method of Making Same
- Publication number 20160336210
- Publication date Nov 17, 2016
- Entegris, Inc.
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck With Photo-Patternable Soft Protrusion Contact...
- Publication number 20150294891
- Publication date Oct 15, 2015
- Entegris, Inc.
- I-Kuan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck with Photo-Patternable Soft Protrusion Contact...
- Publication number 20130120897
- Publication date May 16, 2013
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Jakub Rybczynski

Person

Patents Grantslast 30 patents

Electrostatic chuck having a gas flow feature, and related methods

Electrostatic chuck with charge dissipation coating

Electrostatic chuck with embossments that comprise diamond-like car...

Spiraling polyphase electrodes for electrostatic chuck

Grounding mechanism for multi-layer for electrostatic chuck, and re...

Electrostatic chuck and method of making same

Electrostatic chuck with photo-patternable soft protrusion contact...

Electrostatic chuck with photo-patternable soft protrusion contact...

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCK THAT INCLUDES UPPER CERAMIC LAYER THAT INCLUDES...

ELECTROSTATIC CHUCK AND RELATED METHODS AND STRUCTURES

ELECTROSTATIC CHUCK PREPARED BY ADDITIVE MANUFACTURING, AND RELATED...

SPIRALING POLYPHASE ELECTRODES FOR ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK WITH EMBOSSMENTS THAT COMPRISE DIAMOND-LIKE CAR...

ELECTROSTATIC CHUCK HAVING A GAS FLOW FEATURE, AND RELATED METHODS

GROUNDING MECHANISM FOR MULTI-LAYER FOR ELECTROSTATIC CHUCK, AND RE...

ELECTROSTATIC CHUCK WITH CHARGE DISSIPATION COATING

Electrostatic Chuck and Method of Making Same

Electrostatic Chuck With Photo-Patternable Soft Protrusion Contact...

Electrostatic Chuck with Photo-Patternable Soft Protrusion Contact...