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James A. Seirmarco
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Buchanan, NY, US
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last 30 patents
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Patent Grant
Apparatus and method for uniform, low-damage anisotropic plasma pro...
Patent number
6,083,363
Issue date
Jul 4, 2000
Tokyo Electron Limited
Kaihan Abidi Ashtiani
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Inductively coupled plasma sputter chamber with conductive material...
Patent number
5,569,363
Issue date
Oct 29, 1996
Sony Corporation
Robert Bayer
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electrostatic chuck with diamond coating
Patent number
5,166,856
Issue date
Nov 24, 1992
International Business Machines Corporation
James W. Liporace
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Ion implantation apparatus for controlling the surface potential of...
Patent number
4,135,097
Issue date
Jan 16, 1979
International Business Machines Corporation
John L. Forneris
H01 - BASIC ELECTRIC ELEMENTS