James Forest Lee

Person

Damascus, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Remote-plasma clean (RPC) directional-flow device
- Patent number 12,013,682
- Issue date Jun 18, 2024
- Lam Research Corporation
- Michael John Janicki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 11,946,142
- Issue date Apr 2, 2024
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote-plasma clean (RPC) directional-flow device
- Patent number 11,619,925
- Issue date Apr 4, 2023
- Lam Research Corporation
- Michael J. Janicki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatuses for reducing porogen accumulation from a UV-...
- Patent number 11,177,131
- Issue date Nov 16, 2021
- Novellus Systems, Inc.
- Lisa Marie Gytri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clean resistant windows for ultraviolet thermal processing
- Patent number 10,240,236
- Issue date Mar 26, 2019
- Lam Research Corporation
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rapid chamber clean using concurrent in-situ and remote plasma sources
- Patent number 10,161,034
- Issue date Dec 25, 2018
- Lam Research Corporation
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Turbulent flow spiral multi-zone precursor vaporizer
- Patent number 10,147,597
- Issue date Dec 4, 2018
- Lam Research Corporation
- James Forest Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for reducing porogen accumulation from a UV-cure chamber
- Patent number 10,020,197
- Issue date Jul 10, 2018
- Novellus Systems, Inc.
- Lisa Gytri
- B08 - CLEANING
Information Patent Grant
Method and apparatuses for reducing porogen accumulation from a UV-...
- Patent number 9,073,100
- Issue date Jul 7, 2015
- Novellus Systems, Inc.
- Lisa Gytri
- B08 - CLEANING
Information Patent Grant
Exhaust flow spreading baffle-riser to optimize remote plasma windo...
- Patent number 9,028,765
- Issue date May 12, 2015
- Lam Research Corporation
- Lisa Marie Gytri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for using a purge ring with split baffles in photonic therma...
- Patent number 8,883,406
- Issue date Nov 11, 2014
- Novellus Systems, Inc.
- James Lee
- B08 - CLEANING
Information Patent Grant
Reduction of a process volume of a processing chamber using a neste...
- Patent number 8,801,950
- Issue date Aug 12, 2014
- Novellus Systems, Inc.
- James F. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Purge ring with split baffles for photonic thermal processing systems
- Patent number 8,608,035
- Issue date Dec 17, 2013
- Novellus Systems, Inc.
- James Lee
- B08 - CLEANING
Information Patent Grant
Method and apparatuses for reducing porogen accumulation from a UV-...
- Patent number 8,398,816
- Issue date Mar 19, 2013
- Novellus Systems, Inc.
- Lisa Gytri
- B08 - CLEANING
Information Patent Grant
Measuring in-situ UV intensity in UV cure tool
- Patent number 8,283,644
- Issue date Oct 9, 2012
- Novellus Systems, Inc.
- Eugene Smargiassi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20240167161
- Publication date May 23, 2024
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE-PLASMA CLEAN (RPC) DIRECTIONAL-FLOW DEVICE
- Publication number 20230221697
- Publication date Jul 13, 2023
- LAM RESEARCH CORPORATION
- Michael John JANICKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20220298632
- Publication date Sep 22, 2022
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE HEATING OF A SUBSTRATE IN A PROCESSING CHAMBER
- Publication number 20220199379
- Publication date Jun 23, 2022
- LAM RESEARCH CORPORATION
- James F. LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD WITH CONFIGURABLE GAS OUTLETS
- Publication number 20220136107
- Publication date May 5, 2022
- LAM RESEARCH CORPORATION
- James F. LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE-PLASMA CLEAN (RPC) DIRECTIONAL-FLOW DEVICE
- Publication number 20220107619
- Publication date Apr 7, 2022
- LAM RESEARCH CORPORATION
- Michael J. Janicki
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...
- Publication number 20180315604
- Publication date Nov 1, 2018
- Novellus Systems, Inc.
- Lisa Marie Gytri
- B08 - CLEANING
Information Patent Application
RAPID CHAMBER CLEAN USING CONCURRENT IN-SITU AND REMOTE PLASMA SOURCES
- Publication number 20180305814
- Publication date Oct 25, 2018
- LAM RESEARCH CORPORATION
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEAN RESISTANT WINDOWS FOR ULTRAVIOLET THERMAL PROCESSING
- Publication number 20160258057
- Publication date Sep 8, 2016
- LAM RESEARCH CORPORATION
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...
- Publication number 20150255285
- Publication date Sep 10, 2015
- Novellus Systems, Inc.
- Lisa Gytri
- B08 - CLEANING
Information Patent Application
EXHAUST FLOW SPREADING BAFFLE-RISER TO OPTIMIZE REMOTE PLASMA WINDO...
- Publication number 20150056108
- Publication date Feb 26, 2015
- LAM RESEARCH CORPORATION
- Lisa Marie Gytri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR USING A PURGE RING WITH SPLIT BAFFLES IN PHOTONIC THERMA...
- Publication number 20140065557
- Publication date Mar 6, 2014
- LAM RESEARCH CORPORATION
- James Lee
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...
- Publication number 20130284087
- Publication date Oct 31, 2013
- Lisa Gytri
- B08 - CLEANING
Information Patent Application
REDUCTION OF A PROCESS VOLUME OF A PROCESSING CHAMBER USING A NESTE...
- Publication number 20120231628
- Publication date Sep 13, 2012
- NOVELLUS SYSTEMS INC.
- James F. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEASURING IN-SITU UV INTENSITY IN UV CURE TOOL
- Publication number 20120161021
- Publication date Jun 28, 2012
- Eugene Smargiassi
- G01 - MEASURING TESTING
Information Patent Application
PURGE RING WITH SPLIT BAFFLES FOR PHOTONIC THERMAL PROCESSING SYSTEMS
- Publication number 20110262870
- Publication date Oct 27, 2011
- James Lee
- B08 - CLEANING

James Forest Lee

Person

Patents Grantslast 30 patents

Remote-plasma clean (RPC) directional-flow device

Spatially tunable deposition to compensate within wafer differentia...

Remote-plasma clean (RPC) directional-flow device

Method and apparatuses for reducing porogen accumulation from a UV-...

Clean resistant windows for ultraviolet thermal processing

Rapid chamber clean using concurrent in-situ and remote plasma sources

Turbulent flow spiral multi-zone precursor vaporizer

Method for reducing porogen accumulation from a UV-cure chamber

Method and apparatuses for reducing porogen accumulation from a UV-...

Exhaust flow spreading baffle-riser to optimize remote plasma windo...

Method for using a purge ring with split baffles in photonic therma...

Reduction of a process volume of a processing chamber using a neste...

Purge ring with split baffles for photonic thermal processing systems

Method and apparatuses for reducing porogen accumulation from a UV-...

Measuring in-situ UV intensity in UV cure tool

Patents Applicationslast 30 patents

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...

REMOTE-PLASMA CLEAN (RPC) DIRECTIONAL-FLOW DEVICE

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...

HIGH TEMPERATURE HEATING OF A SUBSTRATE IN A PROCESSING CHAMBER

SHOWERHEAD WITH CONFIGURABLE GAS OUTLETS

REMOTE-PLASMA CLEAN (RPC) DIRECTIONAL-FLOW DEVICE

METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...

RAPID CHAMBER CLEAN USING CONCURRENT IN-SITU AND REMOTE PLASMA SOURCES

CLEAN RESISTANT WINDOWS FOR ULTRAVIOLET THERMAL PROCESSING

METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...

EXHAUST FLOW SPREADING BAFFLE-RISER TO OPTIMIZE REMOTE PLASMA WINDO...

METHOD FOR USING A PURGE RING WITH SPLIT BAFFLES IN PHOTONIC THERMA...

METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...

REDUCTION OF A PROCESS VOLUME OF A PROCESSING CHAMBER USING A NESTE...

MEASURING IN-SITU UV INTENSITY IN UV CURE TOOL

PURGE RING WITH SPLIT BAFFLES FOR PHOTONIC THERMAL PROCESSING SYSTEMS