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James Santosa
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Mountain View, CA, US
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last 30 patents
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Patent Grant
Multi-port pumping system for substrate processing chambers
Patent number
7,964,040
Issue date
Jun 21, 2011
Applied Materials, Inc.
Muhammad M. Rasheed
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
PLASMA SOURCE FOR CHAMBER CLEANING AND PROCESS
Publication number
20100098882
Publication date
Apr 22, 2010
Applied Materials, Inc.
Dmitry Lubomirsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
MULTI-PORT PUMPING SYSTEM FOR SUBSTRATE PROCESSING CHAMBERS
Publication number
20090120464
Publication date
May 14, 2009
Applied Materials, Inc.
Muhammad M. Rasheed
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...