Jan A. Lauber

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Laser anneal pattern suppression
- Patent number 12,100,132
- Issue date Sep 24, 2024
- KLA Corporation
- Jan Lauber
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect size measurement using deep learning methods
- Patent number 11,774,371
- Issue date Oct 3, 2023
- KLA Corporation
- Jan Lauber
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for correlating optical images with scanning elec...
- Patent number 11,244,442
- Issue date Feb 8, 2022
- KLA Corporation
- Hucheng Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Adaptive care areas for die-die inspection
- Patent number 10,997,710
- Issue date May 4, 2021
- KLA-Tencor Corporation
- Himanshu Vajaria
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for characterization of buried defects
- Patent number 10,854,486
- Issue date Dec 1, 2020
- KLA Corporation
- Jason Kirkwood
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-step image alignment method for large offset die-die inspection
- Patent number 10,522,376
- Issue date Dec 31, 2019
- KLA-Tencor Corporation
- Jan Lauber
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Self directed metrology and pattern classification
- Patent number 10,483,081
- Issue date Nov 19, 2019
- KLA-Tencor Corp.
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for correlating optical images with scanning elec...
- Patent number 10,410,338
- Issue date Sep 10, 2019
- KLA-Tencor Corporation
- Hucheng Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Detecting defects on a wafer using template image matching
- Patent number 9,311,698
- Issue date Apr 12, 2016
- KLA-Tencor Corp.
- Xing Chu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect discovery and inspection sensitivity optimization using auto...
- Patent number 9,293,298
- Issue date Mar 22, 2016
- KLA-Tencor Corp.
- Jan A. Lauber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated inspection using cell-cell subtraction perpendicular to s...
- Patent number 8,106,355
- Issue date Jan 31, 2012
- KLA-Tencor Corporation
- Jan Lauber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image quality monitoring for substrate inspection
- Patent number 7,831,083
- Issue date Nov 9, 2010
- KLA-Tencor Technologies Corporation
- Jan Lauber
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods of controlling surface charge and focus
- Patent number 6,828,571
- Issue date Dec 7, 2004
- KLA-Tencor Technologies Corporation
- Mark A. McCord
- G01 - MEASURING TESTING
Information Patent Grant
In-situ probe for optimizing electron beam inspection and metrology...
- Patent number 6,664,546
- Issue date Dec 16, 2003
- KLA Tencor
- Mark A. McCord
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Laser Anneal Pattern Suppression
- Publication number 20230122514
- Publication date Apr 20, 2023
- KLA Corporation
- Jan Lauber
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT SIZE MEASUREMENT USING DEEP LEARNING METHODS
- Publication number 20210364450
- Publication date Nov 25, 2021
- KLA Corporation
- Jan Lauber
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method for Characterization of Buried Defects
- Publication number 20200090969
- Publication date Mar 19, 2020
- KLA-Tencor Corporation
- Jason Kirkwood
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and System for Correlating Optical Images with Scanning Elec...
- Publication number 20190333206
- Publication date Oct 31, 2019
- KLA-Tencor Corporation
- Hucheng Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-STEP IMAGE ALIGNMENT METHOD FOR LARGE OFFSET DIE-DIE INSPECTION
- Publication number 20190122913
- Publication date Apr 25, 2019
- KLA-Tencor Corporation
- Jan Lauber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADAPTIVE CARE AREAS FOR DIE-DIE INSPECTION
- Publication number 20190114758
- Publication date Apr 18, 2019
- KLA-Tencor Corporation
- Himanshu Vajaria
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Self Directed Metrology and Pattern Classification
- Publication number 20160372303
- Publication date Dec 22, 2016
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Discovery and Inspection Sensitivity Optimization Using Auto...
- Publication number 20150179400
- Publication date Jun 25, 2015
- KLA-Tencor Corporation
- Jan A. Lauber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Correlating Optical Images with Scanning Elec...
- Publication number 20150125065
- Publication date May 7, 2015
- KLA-Tencor Corporation
- Hucheng Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Detecting Defects on a Wafer Using Template Image Matching
- Publication number 20140193065
- Publication date Jul 10, 2014
- KLA-Tencor Corporation
- Xing Chu
- G01 - MEASURING TESTING

Jan A. Lauber

Person

Patents Grantslast 30 patents

Laser anneal pattern suppression

Defect size measurement using deep learning methods

Method and system for correlating optical images with scanning elec...

Adaptive care areas for die-die inspection

System and method for characterization of buried defects

Multi-step image alignment method for large offset die-die inspection

Self directed metrology and pattern classification

Method and system for correlating optical images with scanning elec...

Detecting defects on a wafer using template image matching

Defect discovery and inspection sensitivity optimization using auto...

Automated inspection using cell-cell subtraction perpendicular to s...

Image quality monitoring for substrate inspection

Apparatus and methods of controlling surface charge and focus

In-situ probe for optimizing electron beam inspection and metrology...

Patents Applicationslast 30 patents

Laser Anneal Pattern Suppression

DEFECT SIZE MEASUREMENT USING DEEP LEARNING METHODS

System and Method for Characterization of Buried Defects

Method and System for Correlating Optical Images with Scanning Elec...

MULTI-STEP IMAGE ALIGNMENT METHOD FOR LARGE OFFSET DIE-DIE INSPECTION

ADAPTIVE CARE AREAS FOR DIE-DIE INSPECTION

Self Directed Metrology and Pattern Classification

Defect Discovery and Inspection Sensitivity Optimization Using Auto...

Method and System for Correlating Optical Images with Scanning Elec...

Detecting Defects on a Wafer Using Template Image Matching