Jan Steven Christiaan WESTERLAKEN

Person

Heesch, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Prolonging optical element lifetime in an EUV lithography system
- Patent number 11,846,887
- Issue date Dec 19, 2023
- ASML Netherlands B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Prolonging optical element lifetime in an EUV lithography system
- Patent number 11,340,532
- Issue date May 24, 2022
- ASML Netherlands B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 10,788,763
- Issue date Sep 29, 2020
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support apparatus, lithographic apparatus and device manufacturing...
- Patent number 10,747,125
- Issue date Aug 18, 2020
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,620,553
- Issue date Apr 14, 2020
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,495,985
- Issue date Dec 3, 2019
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,216,102
- Issue date Feb 26, 2019
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, and device manufacturing method
- Patent number 10,191,393
- Issue date Jan 29, 2019
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermal conditioning unit, lithographic apparatus and device manufa...
- Patent number 10,191,395
- Issue date Jan 29, 2019
- ASML Neatherlands B.V.
- Johannes Henricus Wilhelmus Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,133,197
- Issue date Nov 20, 2018
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support apparatus, lithographic apparatus and device manufacturing...
- Patent number 10,120,292
- Issue date Nov 6, 2018
- ASML Netherlands, B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,114,295
- Issue date Oct 30, 2018
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Conditioning system and lithographic apparatus comprising a conditi...
- Patent number 10,114,298
- Issue date Oct 30, 2018
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method in a lithographic process
- Patent number 10,095,130
- Issue date Oct 9, 2018
- ASML Netherlands B.V.
- Johannes Pieter Kroes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas flow optimization in reticle stage environment
- Patent number 10,031,428
- Issue date Jul 24, 2018
- ASML Netherlands B.V.
- Koen Cuypers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor, lithographic apparatus and device manufacturing method
- Patent number 9,971,254
- Issue date May 15, 2018
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermal conditioning unit, lithographic apparatus and device manufa...
- Patent number 9,891,541
- Issue date Feb 13, 2018
- ASML Netherlands B.V.
- Johannes Henricus Wilhelmus Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,891,542
- Issue date Feb 13, 2018
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,885,964
- Issue date Feb 6, 2018
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage system and lithographic apparatus comprising such stage system
- Patent number 9,785,060
- Issue date Oct 10, 2017
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor, lithographic apparatus and device manufacturing method
- Patent number 9,753,382
- Issue date Sep 5, 2017
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,529,277
- Issue date Dec 27, 2016
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 9,513,568
- Issue date Dec 6, 2016
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support apparatus, lithographic apparatus and device manufacturing...
- Patent number 9,507,275
- Issue date Nov 29, 2016
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,988,650
- Issue date Mar 24, 2015
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
- Publication number 20240160109
- Publication date May 16, 2024
- ASML NETHERLANDS B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RADIATION CONDUIT
- Publication number 20220390852
- Publication date Dec 8, 2022
- ASML NETHERLANDS B.V.
- Remco Johannes Elisa HEIJMANS
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
- Publication number 20220291591
- Publication date Sep 15, 2022
- ASML NETHERLANDS B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTAMINATION TRAP
- Publication number 20220197158
- Publication date Jun 23, 2022
- ASML NETHERLANDS B.V.
- Sander Catharina Reinier DERKS
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
- Publication number 20210109452
- Publication date Apr 15, 2021
- ASML NETHERLANDS B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190235398
- Publication date Aug 1, 2019
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan WESTERLAKEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20190072863
- Publication date Mar 7, 2019
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190041761
- Publication date Feb 7, 2019
- ASML Netherlands B.V.
- Gunes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THERMAL CONDITIONING UNIT, LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
- Publication number 20180164704
- Publication date Jun 14, 2018
- ASML NETHERLANDS B.V.
- Johannes Henricus Wilhelmus JACOBS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180164705
- Publication date Jun 14, 2018
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan WESTERLAKEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD IN A LITHOGRAPHIC PROCESS
- Publication number 20180113389
- Publication date Apr 26, 2018
- ASML NETHERLANDS B.V.
- Johannes Pieter KROES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20180059555
- Publication date Mar 1, 2018
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan WESTERLAKEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170363964
- Publication date Dec 21, 2017
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170261864
- Publication date Sep 14, 2017
- ASML NETHERLANDS B.V.
- Gunes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170242349
- Publication date Aug 24, 2017
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONDITIONING SYSTEM AND LITHOGRAPHIC APPARATUS COMPRISING A CONDITI...
- Publication number 20170199470
- Publication date Jul 13, 2017
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan WESTERLAKEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170160653
- Publication date Jun 8, 2017
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20170090304
- Publication date Mar 30, 2017
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20170068175
- Publication date Mar 9, 2017
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Gas Flow Optimization in Reticle Stage Environment
- Publication number 20150355557
- Publication date Dec 10, 2015
- ASML NETHERLANDS B.V.
- Koen CUYPERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE SYSTEM AND LITHOGRAPHIC APPARATUS COMPRISING SUCH STAGE SYSTEM
- Publication number 20150227060
- Publication date Aug 13, 2015
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria Beerens
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150185624
- Publication date Jul 2, 2015
- Jan Steven Christiaan WESTERLAKEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20150168854
- Publication date Jun 18, 2015
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20150109599
- Publication date Apr 23, 2015
- ASML NETHERLANDS B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150077728
- Publication date Mar 19, 2015
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THERMAL CONDITIONING UNIT, LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
- Publication number 20150070666
- Publication date Mar 12, 2015
- ASML NETHERLANDS B.V.
- Johannes Henricus Wilhelmus Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20130107236
- Publication date May 2, 2013
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan WESTERLAKEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Substrate Handling Method
- Publication number 20130077078
- Publication date Mar 28, 2013
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis LAFARRE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Jan Steven Christiaan WESTERLAKEN

Person

Patents Grantslast 30 patents

Prolonging optical element lifetime in an EUV lithography system

Prolonging optical element lifetime in an EUV lithography system

Lithographic apparatus

Support apparatus, lithographic apparatus and device manufacturing...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus, and device manufacturing method

Thermal conditioning unit, lithographic apparatus and device manufa...

Lithographic apparatus and device manufacturing method

Support apparatus, lithographic apparatus and device manufacturing...

Lithographic apparatus and device manufacturing method

Conditioning system and lithographic apparatus comprising a conditi...

Lithographic apparatus and method in a lithographic process

Gas flow optimization in reticle stage environment

Sensor, lithographic apparatus and device manufacturing method

Thermal conditioning unit, lithographic apparatus and device manufa...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Stage system and lithographic apparatus comprising such stage system

Sensor, lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus

Support apparatus, lithographic apparatus and device manufacturing...

Lithographic apparatus and device manufacturing method

Patents Applicationslast 30 patents

PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

RADIATION CONDUIT

PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

CONTAMINATION TRAP

PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

THERMAL CONDITIONING UNIT, LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND METHOD IN A LITHOGRAPHIC PROCESS

LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD

SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

CONDITIONING SYSTEM AND LITHOGRAPHIC APPARATUS COMPRISING A CONDITI...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...

LITHOGRAPHIC APPARATUS

Gas Flow Optimization in Reticle Stage Environment

STAGE SYSTEM AND LITHOGRAPHIC APPARATUS COMPRISING SUCH STAGE SYSTEM

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS

SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...

SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

THERMAL CONDITIONING UNIT, LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic Apparatus and Substrate Handling Method