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Jan Verhoeven
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BN Kockengen, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for forming a patterned layer of carbon, metho...
Patent number
11,807,937
Issue date
Nov 7, 2023
ASML Netherlands B.V.
Sonia Castellanos Ortega
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate holder and a method of manufacturing a substrate holder
Patent number
10,719,019
Issue date
Jul 21, 2020
ASML Holding N.V.
Thomas Poiesz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multilayer system with protecting layer system and production method
Patent number
7,261,957
Issue date
Aug 28, 2007
Carl Zeiss SMT AG
Frederik Bijkerk
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
EUV illumination system
Patent number
6,410,928
Issue date
Jun 25, 2002
Koninklijke Philips Electronics N.V.
Jan Verhoeven
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of imaging a mask pattern on a substrate by means of EUV rad...
Patent number
6,280,906
Issue date
Aug 28, 2001
U.S. Philips Corporation
Josephus J. M. Braat
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multilayer mirror with a variable refractive index
Patent number
5,551,587
Issue date
Sep 3, 1996
U.S. Philips Corporation
Anton Keppel
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHO...
Publication number
20240011150
Publication date
Jan 11, 2024
ASML NETHERLANDS B.V.
Sonia CASTELLANOS ORTEGA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and Apparatus for Forming a Patterned Layer of Carbon, Metho...
Publication number
20210032743
Publication date
Feb 4, 2021
ASML NETHERLANDS B.V.
Sonia CASTELLANOS ORTEGA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
Publication number
20190332015
Publication date
Oct 31, 2019
ASML NETHERLANDS B.V.
Thomas POIESZ
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI-LAYER MIRROR FOR RADIATION IN THE SOFT X-RAY AND XUV WAVELENG...
Publication number
20090141342
Publication date
Jun 4, 2009
STICHTING VOOR FUNDAMENTEEL ONDEROZOEK DERMATERIE
Marcus Jozef Henricus Kessels
B82 - NANO-TECHNOLOGY
Information
Patent Application
Multilayer system with protecting layer system and production method
Publication number
20070281109
Publication date
Dec 6, 2007
Carl Zeiss SMT AG
Frederik Bijkerk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multi-layer mirror for radiation in the xuv wavelenght range and me...
Publication number
20040233519
Publication date
Nov 25, 2004
Frederik Bijkerk
B82 - NANO-TECHNOLOGY