E. J. Puik et al., "Ion bombardment of thin layers: The effect on the interface roughness and its x-ray reflectivity (invited)", Rev. Sci. Instrum. 63, Jan. 1992, American Institute of Physics, pp. 1415-1419. |
E. J. Puik et al., "Ion etching of thin W layers: enhanced reflectivity of W-C multilayer coatings", Applied surface Science 47, 1991, pp. 63-76. |
R. Schlatmann et al., "Limits to Ion Beam etching of Mo/Si multilayer coatings", Proceedings of "Physics of X-ray Multilayer Structures", Technical Digest Services, vol. 7. |