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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for identifying lens aberration sensitive pattern...
Patent number
7,643,976
Issue date
Jan 5, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Jaw-Jung Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for enhancing image resolution using a modificati...
Patent number
7,474,788
Issue date
Jan 6, 2009
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Ming Chang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for improving the critical dimension uniformity of patterned...
Patent number
7,234,128
Issue date
Jun 19, 2007
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsai-Sheng Gau
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Phase shift assignments for alternate PSM
Patent number
7,175,941
Issue date
Feb 13, 2007
Taiwan Semiconductor Manufacturing Co., Ltd
Jaw-Jung Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Full sized scattering bar alt-PSM technique for IC manufacturing in...
Patent number
7,131,102
Issue date
Oct 31, 2006
Taiwan Semiconductor Manufacturing Co., Ltd
Chang-Ming Dai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Full sized scattering bar alt-PSM technique for IC manufacturing in...
Patent number
7,036,108
Issue date
Apr 25, 2006
Taiwan Semiconductor Manufacturing Co., Ltd
Chang-Ming Dai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Full sized scattering bar alt-PSM technique for IC manufacturing in...
Patent number
7,013,453
Issue date
Mar 14, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Chang-Ming Dai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of defining forbidden pitches for a lithography exposure tool
Patent number
6,973,636
Issue date
Dec 6, 2005
Taiwan Semiconductor Manufacturing Company, Ltd.
Jaw-Jung Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Full sized scattering bar alt-PSM technique for IC manufacturing in...
Patent number
6,711,732
Issue date
Mar 23, 2004
Taiwan Semiconductor Manufacturing Company
Chang-Ming Dai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method and System for Identifying Lens Aberration Sensitive Pattern...
Publication number
20070203680
Publication date
Aug 30, 2007
Taiwan Semiconductor Manufacturing Company, Ltd.
Jaw-Jung Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithography process to reduce interference
Publication number
20070087291
Publication date
Apr 19, 2007
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsai-Sheng Gau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and system for enhancing image resolution
Publication number
20060050965
Publication date
Mar 9, 2006
Shih-Ming Chang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method of defining forbidden pitches for a lithography exposure tool
Publication number
20050086629
Publication date
Apr 21, 2005
Jaw-Jung Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for improving the critical dimension uniformity of patterned...
Publication number
20050076323
Publication date
Apr 7, 2005
Taiwan Semiconductor Manufacturing Co., LTD
Tsai-Sheng Gau
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Phase shift assignments for alternate PSM
Publication number
20050053846
Publication date
Mar 10, 2005
Taiwan Semicondutor Manufacturing Co.
Jaw-Jung Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Full sized scattering bar alt-PSM technique for IC manufacturing in...
Publication number
20040168147
Publication date
Aug 26, 2004
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Chang-Ming Dai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Full sized scattering bar alt-PSM technique for IC manufacturing in...
Publication number
20040168146
Publication date
Aug 26, 2004
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Chang-Ming Dai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Full sized scattering bar alt-PSM technique for IC manufacturing in...
Publication number
20040161679
Publication date
Aug 19, 2004
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Chang-Ming Dai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY