Janet M. Flanner

Person

Union City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electronically diagnosing a component in a process line using a sub...
- Patent number 6,946,303
- Issue date Sep 20, 2005
- Lam Research Corporation
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for creating a substrate signature
- Patent number 6,890,774
- Issue date May 10, 2005
- Lam Research Corporation
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for etching a low capacitance dielectric layer
- Patent number 6,696,366
- Issue date Feb 24, 2004
- Lam Research Corporation
- Ian J. Morey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Convertible hot edge ring to improve low-K dielectric etch
- Patent number 6,653,734
- Issue date Nov 25, 2003
- Lam Research Corporation
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post etch photoresist strip with hydrogen for organosilicate glass...
- Patent number 6,426,304
- Issue date Jul 30, 2002
- Lam Research Corporation
- Ting Chien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for etching dual damascene structures in organosilicate glass
- Patent number 6,410,437
- Issue date Jun 25, 2002
- Lam Research Corporation
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Convertible hot edge ring to improve low-K dielectric etch
- Patent number 6,383,931
- Issue date May 7, 2002
- Lam Research Corporation
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for reducing process drift in inductive coupled plasma et...
- Patent number 6,241,845
- Issue date Jun 5, 2001
- Lam Research Corporation
- Prashant Gadgil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned contacts for semiconductor device
- Patent number 6,165,910
- Issue date Dec 26, 2000
- Lam Research Corporation
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned contacts for semiconductor device
- Patent number 6,133,153
- Issue date Oct 17, 2000
- Lam Research Corporation
- Linda N. Marquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for etching a low capacitance dielectric layer on a subs...
- Patent number 6,114,250
- Issue date Sep 5, 2000
- Lam Research Corporation
- Susan Ellingboe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for reducing process drift in inductive coupled plasma et...
- Patent number 6,048,798
- Issue date Apr 11, 2000
- Lam Research Corporation
- Prashant Gadgil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for etching self-aligned contacts
- Patent number 5,783,496
- Issue date Jul 21, 1998
- Lam Research Corporation
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabrication process using sacrificial oxidation to re...
- Patent number 5,021,358
- Issue date Jun 4, 1991
- North American Philips Corp. Signetics Division
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for selectively filling contacts or vias or various depths w...
- Patent number 4,987,099
- Issue date Jan 22, 1991
- North American Philips Corp.
- Janet Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned metallization for semiconductor device and process usi...
- Patent number 4,822,749
- Issue date Apr 18, 1989
- North American Philips Corporation, Signetics Division
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electronically diagnosing a component in a process line using a sub...
- Publication number 20040110311
- Publication date Jun 10, 2004
- Janet M. Flanner
- G05 - CONTROLLING REGULATING
Information Patent Application
System and method for creating a substrate signature
- Publication number 20040110312
- Publication date Jun 10, 2004
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Convertible hot edge ring to improve low-K dielectric etch
- Publication number 20030045101
- Publication date Mar 6, 2003
- Janet M Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Convertible hot edge ring to improve low-k dielectric etch
- Publication number 20020022281
- Publication date Feb 21, 2002
- Janet M Flanner
- H01 - BASIC ELECTRIC ELEMENTS

Janet M. Flanner

Person

Patents Grantslast 30 patents

Electronically diagnosing a component in a process line using a sub...

System and method for creating a substrate signature

Technique for etching a low capacitance dielectric layer

Convertible hot edge ring to improve low-K dielectric etch

Post etch photoresist strip with hydrogen for organosilicate glass...

Method for etching dual damascene structures in organosilicate glass

Convertible hot edge ring to improve low-K dielectric etch

Apparatus for reducing process drift in inductive coupled plasma et...

Self-aligned contacts for semiconductor device

Self-aligned contacts for semiconductor device

Techniques for etching a low capacitance dielectric layer on a subs...

Apparatus for reducing process drift in inductive coupled plasma et...

Methods and apparatus for etching self-aligned contacts

Semiconductor fabrication process using sacrificial oxidation to re...

Method for selectively filling contacts or vias or various depths w...

Self-aligned metallization for semiconductor device and process usi...

Patents Applicationslast 30 patents

Electronically diagnosing a component in a process line using a sub...

System and method for creating a substrate signature

Convertible hot edge ring to improve low-K dielectric etch

Convertible hot edge ring to improve low-k dielectric etch