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VNAND tensile thick TEOS oxide
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Patent number 10,483,282
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Issue date Nov 19, 2019
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Applied Materials, Inc.
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Michael Wenyoung Tsiang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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VNAND tensile thick TEOS oxide
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Patent number 10,199,388
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Issue date Feb 5, 2019
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APPLIED MATEERIALS, INC.
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Michael Wenyoung Tsiang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Enhanced remote plasma cleaning
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Patent number 6,868,856
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Issue date Mar 22, 2005
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Applied Materials, Inc.
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Thomas Nowak
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...