Jay S. Burnham

Person

Essex Junction, VT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Device structures with multiple nitrided layers
- Patent number 9,953,831
- Issue date Apr 24, 2018
- GLOBALFOUNDRIES Inc.
- Steven Shank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Backside metal ground plane with improved metal adhesion and design...
- Patent number 8,912,091
- Issue date Dec 16, 2014
- International Business Machines Corporation
- Jay S. Burnham
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for sub-pellicle defect reduction on photomasks
- Patent number 8,758,962
- Issue date Jun 24, 2014
- International Business Machines Corporation
- Jay S. Burnham
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for fabricating a nitrided silicon-oxide gate dielectric
- Patent number 8,709,887
- Issue date Apr 29, 2014
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Copper contamination detection method and system for monitoring cop...
- Patent number 8,236,580
- Issue date Aug 7, 2012
- International Business Machines Corporation
- Jay Sanford Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for sub-pellicle defect reduction on photomasks
- Patent number 8,173,331
- Issue date May 8, 2012
- International Business Machines Corporation
- Jay S. Burnham
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Copper contamination detection method and system for monitoring cop...
- Patent number 7,957,917
- Issue date Jun 7, 2011
- International Business Machines Corporation
- Jay Sanford Burnham
- G01 - MEASURING TESTING
Information Patent Grant
Copper contamination detection method and system for monitoring cop...
- Patent number 7,888,142
- Issue date Feb 15, 2011
- International Business Machines Corporation
- Jay Sanford Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective nitridation of gate oxides
- Patent number 7,759,260
- Issue date Jul 20, 2010
- International Business Machines Corporation
- Jay S Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating a nitrided silicon oxide gate dielectric layer
- Patent number 7,737,050
- Issue date Jun 15, 2010
- International Business Machines Corporation
- Edward Dennis Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor metal contamination reduction for ultra-thin gate die...
- Patent number 7,342,290
- Issue date Mar 11, 2008
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a nitrided silicon-oxide gate dielectric
- Patent number 7,291,568
- Issue date Nov 6, 2007
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective nitridation of gate oxides
- Patent number 7,138,691
- Issue date Nov 21, 2006
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal nitrogen distribution method to improve uniformity of highl...
- Patent number 6,909,157
- Issue date Jun 21, 2005
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bilayer ultra-thin gate dielectric and process for semiconductor me...
- Patent number 6,838,396
- Issue date Jan 4, 2005
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a nitrided silicon-oxide gate dielectric
- Patent number 6,780,720
- Issue date Aug 24, 2004
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deuterium reservoirs and ingress paths
- Patent number 6,770,501
- Issue date Aug 3, 2004
- International Business Machines Corporation
- Jay Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal nitrogen distribution method to improve uniformity of highl...
- Patent number 6,706,644
- Issue date Mar 16, 2004
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deuterium reservoirs and ingress paths
- Patent number 6,521,977
- Issue date Feb 18, 2003
- International Business Machines Corporation
- Jay Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wear-through detector for multilayered parts and methods of using same
- Patent number 5,947,053
- Issue date Sep 7, 1999
- International Business Machines Corporation
- Jay Burnham
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
BACKSIDE METAL GROUND PLANE WITH IMPROVED METAL ADHESION AND DESIGN...
- Publication number 20140191408
- Publication date Jul 10, 2014
- International Business Machines Corporation
- Jay S. BURNHAM
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR SUB-PELLICLE DEFECT REDUCTION ON PHOTOMASKS
- Publication number 20120196212
- Publication date Aug 2, 2012
- International Business Machines Corporation
- JAY S. BURNHAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COPPER CONTAMINATION DETECTION METHOD AND SYSTEM FOR MONITORING COP...
- Publication number 20110086442
- Publication date Apr 14, 2011
- International Business Machines Corporation
- Jay Sanford Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE NITRIDATION OF GATE OXIDES
- Publication number 20100187614
- Publication date Jul 29, 2010
- International Business Machines Corporation
- Jay S. BURNHAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SUB-PELLICLE DEFECT REDUCTION ON PHOTOMASKS
- Publication number 20100178598
- Publication date Jul 15, 2010
- International Business Machines Corporation
- JAY S. BURNHAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COPPER CONTAMINATION DETECTION METHOD AND SYSTEM FOR MONITORING COP...
- Publication number 20090087928
- Publication date Apr 2, 2009
- Jay Sanford Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COPPER CONTAMINATION DETECTION METHOD AND SYSTEM FOR MONITORING COP...
- Publication number 20090088984
- Publication date Apr 2, 2009
- Jay Sanford Burnham
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF FABRICATING A NITRIDED SILICON OXIDE GATE DIELECTRIC LAYER
- Publication number 20080102650
- Publication date May 1, 2008
- Edward Dennis Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING A NITRIDED SILICON-OXIDE GATE DIELECTRIC
- Publication number 20080014692
- Publication date Jan 17, 2008
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE NITRIDATION OF GATE OXIDES
- Publication number 20060281265
- Publication date Dec 14, 2006
- International Business Machines Corporation
- Jay S. BURNHAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE NITRIDATION OF GATE OXIDES
- Publication number 20050164444
- Publication date Jul 28, 2005
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor metal contamination reduction for ultra-thin gate die...
- Publication number 20050112888
- Publication date May 26, 2005
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING A NITRIDED SILICON-OXIDE GATE DIELECTRIC
- Publication number 20050048705
- Publication date Mar 3, 2005
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal nitrogen distribution method to improve uniformity of highl...
- Publication number 20050040480
- Publication date Feb 24, 2005
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BILAYER ULTRA-THIN GATE DIELECTRIC AND PROCESS FOR SEMICONDUCTOR ME...
- Publication number 20040192065
- Publication date Sep 30, 2004
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL NITROGEN DISTRIBUTION METHOD TO IMPROVE UNIFORMITY OF HIGHL...
- Publication number 20040018688
- Publication date Jan 29, 2004
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating a nitrided silicon-oxide gate dielectric
- Publication number 20040002226
- Publication date Jan 1, 2004
- International Business Machines Corporation
- Jay S. Burnham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deuterium reservoirs and ingress paths
- Publication number 20030102529
- Publication date Jun 5, 2003
- Jay Burnham
- H01 - BASIC ELECTRIC ELEMENTS

Jay S. Burnham

Person

Patents Grantslast 30 patents

Device structures with multiple nitrided layers

Backside metal ground plane with improved metal adhesion and design...

Method and apparatus for sub-pellicle defect reduction on photomasks

Method for fabricating a nitrided silicon-oxide gate dielectric

Copper contamination detection method and system for monitoring cop...

Method and apparatus for sub-pellicle defect reduction on photomasks

Copper contamination detection method and system for monitoring cop...

Copper contamination detection method and system for monitoring cop...

Selective nitridation of gate oxides

Method of fabricating a nitrided silicon oxide gate dielectric layer

Semiconductor metal contamination reduction for ultra-thin gate die...

Method for fabricating a nitrided silicon-oxide gate dielectric

Selective nitridation of gate oxides

Thermal nitrogen distribution method to improve uniformity of highl...

Bilayer ultra-thin gate dielectric and process for semiconductor me...

Method for fabricating a nitrided silicon-oxide gate dielectric

Deuterium reservoirs and ingress paths

Thermal nitrogen distribution method to improve uniformity of highl...

Deuterium reservoirs and ingress paths

Wear-through detector for multilayered parts and methods of using same

Patents Applicationslast 30 patents

BACKSIDE METAL GROUND PLANE WITH IMPROVED METAL ADHESION AND DESIGN...

METHOD AND APPARATUS FOR SUB-PELLICLE DEFECT REDUCTION ON PHOTOMASKS

COPPER CONTAMINATION DETECTION METHOD AND SYSTEM FOR MONITORING COP...

SELECTIVE NITRIDATION OF GATE OXIDES

METHOD AND APPARATUS FOR SUB-PELLICLE DEFECT REDUCTION ON PHOTOMASKS

COPPER CONTAMINATION DETECTION METHOD AND SYSTEM FOR MONITORING COP...

COPPER CONTAMINATION DETECTION METHOD AND SYSTEM FOR MONITORING COP...

METHOD OF FABRICATING A NITRIDED SILICON OXIDE GATE DIELECTRIC LAYER

METHOD FOR FABRICATING A NITRIDED SILICON-OXIDE GATE DIELECTRIC

SELECTIVE NITRIDATION OF GATE OXIDES

SELECTIVE NITRIDATION OF GATE OXIDES

Semiconductor metal contamination reduction for ultra-thin gate die...

METHOD FOR FABRICATING A NITRIDED SILICON-OXIDE GATE DIELECTRIC

Thermal nitrogen distribution method to improve uniformity of highl...

BILAYER ULTRA-THIN GATE DIELECTRIC AND PROCESS FOR SEMICONDUCTOR ME...

THERMAL NITROGEN DISTRIBUTION METHOD TO IMPROVE UNIFORMITY OF HIGHL...

Method for fabricating a nitrided silicon-oxide gate dielectric

Deuterium reservoirs and ingress paths