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Jean-Philippe Piel
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Marly-le-Roi, FR
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Patents Grants
last 30 patents
Information
Patent Grant
Equipment and method for monitoring an immersion lithography device
Patent number
7,714,992
Issue date
May 11, 2010
Societe de Production et de Recherches Appliquees (S.O.P.R.A.)
Jean-Philippe Piel
G01 - MEASURING TESTING
Information
Patent Grant
Compact spectroscopic ellipsometer
Patent number
7,230,701
Issue date
Jun 12, 2007
Societe de Production et de Recherches Appliquees
Jean-Louis Stehle
G01 - MEASURING TESTING
Information
Patent Grant
High spatial resolution ellipsometry device
Patent number
5,991,037
Issue date
Nov 23, 1999
Societe de Production et de Recherches Appliquees
Jean-Philippe Piel
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Equipment and Method for Monitoring an Immersion Lithography Device
Publication number
20090116001
Publication date
May 7, 2009
Jean-Philippe Piel
G01 - MEASURING TESTING
Information
Patent Application
Compact spectroscopic ellipsometer
Publication number
20040070760
Publication date
Apr 15, 2004
Jean-Louis Stehle
G01 - MEASURING TESTING