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Jeff Gasparitsch
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Fremont, CA, US
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last 30 patents
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Patent Grant
Apparatus for isolated bevel edge clean and method for using the same
Patent number
8,127,395
Issue date
Mar 6, 2012
Lam Research Corporation
Hyungsuk Alexander Yoon
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Patent Grant
Apparatus for cleaning edge of substrate and method for using the same
Patent number
7,758,404
Issue date
Jul 20, 2010
Lam Research Corporation
Jason A. Ryder
B24 - GRINDING POLISHING
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Patent Grant
Apparatus for controlling leading edge and trailing edge polishing
Patent number
6,729,945
Issue date
May 4, 2004
Lam Research Corporation
Cangshan Xu
B24 - GRINDING POLISHING
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Patent Grant
Conditioning mechanism in a chemical mechanical polishing apparatus...
Patent number
6,645,046
Issue date
Nov 11, 2003
Lam Research Corporation
Michael Vogtmann
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Methods for Isolated Bevel Edge Clean
Publication number
20120118320
Publication date
May 17, 2012
LAM RESEARCH CORPORATION
Hyungsuk Alexander Yoon
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Apparatus for isolated bevel edge clean and method for using the same
Publication number
20090113656
Publication date
May 7, 2009
LAM RESEARCH CORPORATION
Hyungsuk Alexander Yoon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for controlling leading edge and trailing edge polishing
Publication number
20020146972
Publication date
Oct 10, 2002
Cangshan Xu
B24 - GRINDING POLISHING