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Jeff Gordon
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West Linn, OR, US
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Patents Grants
last 30 patents
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Patent Grant
Method for reducing porogen accumulation from a UV-cure chamber
Patent number
10,020,197
Issue date
Jul 10, 2018
Novellus Systems, Inc.
Lisa Gytri
B08 - CLEANING
Information
Patent Grant
Method and apparatuses for reducing porogen accumulation from a UV-...
Patent number
9,073,100
Issue date
Jul 7, 2015
Novellus Systems, Inc.
Lisa Gytri
B08 - CLEANING
Information
Patent Grant
Method and apparatuses for reducing porogen accumulation from a UV-...
Patent number
8,398,816
Issue date
Mar 19, 2013
Novellus Systems, Inc.
Lisa Gytri
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...
Publication number
20150255285
Publication date
Sep 10, 2015
Novellus Systems, Inc.
Lisa Gytri
B08 - CLEANING
Information
Patent Application
METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...
Publication number
20130284087
Publication date
Oct 31, 2013
Lisa Gytri
B08 - CLEANING