Jeffrey Barnes

Person

Bethlehem, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 10,392,560
- Issue date Aug 27, 2019
- Entegris, Inc.
- Jeffrey A. Barnes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of non-oxidizing strong acids for the removal of ion-implanted...
- Patent number 10,347,504
- Issue date Jul 9, 2019
- Entegris, Inc.
- Steven Bilodeau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ni:NiGe:Ge selective etch formulations and method of using same
- Patent number 10,340,150
- Issue date Jul 2, 2019
- Entegris, Inc.
- Steven Bilodeau
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Post-CMP removal using compositions and method of use
- Patent number 10,176,979
- Issue date Jan 8, 2019
- Entegris, Inc.
- Jun Liu
- B08 - CLEANING
Information Patent Grant
Composition and process for selectively etching metal nitrides
- Patent number 9,831,088
- Issue date Nov 28, 2017
- Entegris, Inc.
- Tianniu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Antioxidants for post-CMP cleaning formulations
- Patent number RE46427
- Issue date Jun 6, 2017
- Entegris, Inc.
- David Angst
Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 9,546,321
- Issue date Jan 17, 2017
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antioxidants for post-CMP cleaning formulations
- Patent number 9,528,078
- Issue date Dec 27, 2016
- Advanced Technology Materials, Inc.
- David Angst
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Non-amine post-CMP composition and method of use
- Patent number 9,340,760
- Issue date May 17, 2016
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Copper cleaning and protection formulations
- Patent number 9,074,170
- Issue date Jul 7, 2015
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Aqueous cleaner for the removal of post-etch residues
- Patent number 9,063,431
- Issue date Jun 23, 2015
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Non-amine post-CMP composition and method of use
- Patent number 8,754,021
- Issue date Jun 17, 2014
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Antioxidants for post-CMP cleaning formulations
- Patent number 8,685,909
- Issue date Apr 1, 2014
- Advanced Technology Materials, Inc.
- David Angst
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Compositions for processing of semiconductor substrates
- Patent number 7,923,423
- Issue date Apr 12, 2011
- Advanced Technology Materials, Inc.
- Elizabeth Walker
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Compositions for processing of semiconductor substrates
- Patent number 7,922,823
- Issue date Apr 12, 2011
- Advanced Technology Materials, Inc.
- Elizabeth Walker
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Aqueous cleaner with low metal etch rate comprising alkanolamine an...
- Patent number 7,365,045
- Issue date Apr 29, 2008
- Advanced Tehnology Materials, Inc.
- Elizabeth L. Walker
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Post chemical-mechanical planarization (CMP) cleaning composition
- Patent number 6,723,691
- Issue date Apr 20, 2004
- Advanced Technology Materials, Inc.
- Shahriar Naghshineh
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Post chemical-mechanical planarization (CMP) cleaning composition
- Patent number 6,492,308
- Issue date Dec 10, 2002
- ESC, Inc.
- Shahriar Naghshineh
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Post chemical-mechanical planarization (CMP) cleaning composition
- Patent number 6,194,366
- Issue date Feb 27, 2001
- ESC, Inc.
- Shahriar Naghshineh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...
- Publication number 20180240680
- Publication date Aug 23, 2018
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
- Publication number 20170260449
- Publication date Sep 14, 2017
- Entegris, Inc.
- Jeffrey A. BARNES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEW ANTIOXIDANTS FOR POST-CMP CLEANING FORMULATIONS
- Publication number 20170096624
- Publication date Apr 6, 2017
- Advanced Technology Materials, Inc.
- David Angst
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
POST CHEMICAL MECHANICAL POLISHING FORMULATIONS AND METHOD OF USE
- Publication number 20160340620
- Publication date Nov 24, 2016
- Advanced Technology Materials, Inc.
- Laisheng SUN
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...
- Publication number 20160322232
- Publication date Nov 3, 2016
- Entegris, Inc.
- Steven BILODEAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NI:NIGE:GE SELECTIVE ETCH FORMULATIONS AND METHOD OF USING SAME
- Publication number 20160314990
- Publication date Oct 27, 2016
- Entegris, Inc.
- Steven BILODEAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-AMINE POST-CMP COMPOSITION AND METHOD OF USE
- Publication number 20160237385
- Publication date Aug 18, 2016
- Advanced Technology Materials, Inc.
- Jeffrey A. BARNES
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
COPPER CLEANING AND PROTECTION FORMULATIONS
- Publication number 20160075971
- Publication date Mar 17, 2016
- Advanced Technology Materials, Inc.
- Jun LIU
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
COPPER CLEANING AND PROTECTION FORMULATIONS
- Publication number 20160032221
- Publication date Feb 4, 2016
- Jeffrey A. Barnes
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
POST-CMP REMOVAL USING COMPOSITIONS AND METHOD OF USE
- Publication number 20160020087
- Publication date Jan 21, 2016
- Entegris, Inc.
- Jun LIU
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
AQUEOUS CLEANER FOR THE REMOVAL OF POST-ETCH RESIDUES
- Publication number 20150307818
- Publication date Oct 29, 2015
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
FORMULATIONS FOR WET ETCHING NIPT DURING SILICIDE FABRICATION
- Publication number 20150162213
- Publication date Jun 11, 2015
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
- Publication number 20150027978
- Publication date Jan 29, 2015
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-AMINE POST-CMP COMPOSITION AND METHOD OF USE
- Publication number 20140352739
- Publication date Dec 4, 2014
- Jeffrey A. BARNES
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
FORMULATIONS FOR THE REMOVAL OF PARTICLES GENERATED BY CERIUM-CONTA...
- Publication number 20140318584
- Publication date Oct 30, 2014
- Advanced Technology Materials, Inc.
- Emanuel I. Cooper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTIOXIDANTS FOR POST-CMP CLEANING FORMULATIONS
- Publication number 20140206588
- Publication date Jul 24, 2014
- Advanced Technology Materials, Inc.
- David Angst
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
COMPOSITION AND PROCESS FOR SELECTIVELY ETCHING METAL NITRIDES
- Publication number 20140038420
- Publication date Feb 6, 2014
- Advanced Technology Materials, Inc.
- Tianniu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AQUEOUS CLEANER FOR THE REMOVAL OF POST-ETCH RESIDUES
- Publication number 20130296214
- Publication date Nov 7, 2013
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
COPPER CLEANING AND PROTECTION FORMULATIONS
- Publication number 20120283163
- Publication date Nov 8, 2012
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- B08 - CLEANING
Information Patent Application
NON-AMINE POST-CMP COMPOSITION AND METHOD OF USE
- Publication number 20120028870
- Publication date Feb 2, 2012
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- B08 - CLEANING
Information Patent Application
LOW PH POST-CMP RESIDUE REMOVAL COMPOSITION AND METHOD OF USE
- Publication number 20100286014
- Publication date Nov 11, 2010
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS FOR PROCESSING OF SEMICONDUCTOR SUBSTRATES
- Publication number 20100056409
- Publication date Mar 4, 2010
- Elizabeth Walker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTIOXIDANTS FOR POST-CMP CLEANING FORMULATIONS
- Publication number 20090239777
- Publication date Sep 24, 2009
- Advanced Technology Materials, Inc.
- David Angst
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
AQUEOUS CLEANER WITH LOW METAL ETCH RATE
- Publication number 20080200361
- Publication date Aug 21, 2008
- Elizabeth L. Walker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Copper passivating post-chemical mechanical polishing cleaning comp...
- Publication number 20080076688
- Publication date Mar 27, 2008
- Jeffrey A. Barnes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Aqueous cleaner with low metal etch rate
- Publication number 20060229221
- Publication date Oct 12, 2006
- Advanced Technology Materials Inc.
- Elizabeth L. Walker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Compositions for processing of semiconductor substrates
- Publication number 20060166847
- Publication date Jul 27, 2006
- Advanced Technology Materials, Inc.
- Elizabeth Walker
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Aqueous cleaner with low metal etch rate
- Publication number 20060148666
- Publication date Jul 6, 2006
- Advanced Technology Materials Inc.
- Darryl W. Peters
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Method for monitoring surface treatment of copper containing devices
- Publication number 20050145311
- Publication date Jul 7, 2005
- Elizabeth L. Walker
- B08 - CLEANING
Information Patent Application
Post chemical-mechanical planarization (CMP) cleaning composition
- Publication number 20010004633
- Publication date Jun 21, 2001
- ESC, Inc.
- Shahriar Naghshineh
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Jeffrey Barnes

Person

Patents Grantslast 30 patents

Compositions and methods for selectively etching titanium nitride

Use of non-oxidizing strong acids for the removal of ion-implanted...

Ni:NiGe:Ge selective etch formulations and method of using same

Post-CMP removal using compositions and method of use

Composition and process for selectively etching metal nitrides

Antioxidants for post-CMP cleaning formulations

Compositions and methods for selectively etching titanium nitride

Antioxidants for post-CMP cleaning formulations

Non-amine post-CMP composition and method of use

Copper cleaning and protection formulations

Aqueous cleaner for the removal of post-etch residues

Non-amine post-CMP composition and method of use

Antioxidants for post-CMP cleaning formulations

Compositions for processing of semiconductor substrates

Compositions for processing of semiconductor substrates

Aqueous cleaner with low metal etch rate comprising alkanolamine an...

Post chemical-mechanical planarization (CMP) cleaning composition

Post chemical-mechanical planarization (CMP) cleaning composition

Post chemical-mechanical planarization (CMP) cleaning composition

Patents Applicationslast 30 patents

USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE

NEW ANTIOXIDANTS FOR POST-CMP CLEANING FORMULATIONS

POST CHEMICAL MECHANICAL POLISHING FORMULATIONS AND METHOD OF USE

USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...

NI:NIGE:GE SELECTIVE ETCH FORMULATIONS AND METHOD OF USING SAME

NON-AMINE POST-CMP COMPOSITION AND METHOD OF USE

COPPER CLEANING AND PROTECTION FORMULATIONS

COPPER CLEANING AND PROTECTION FORMULATIONS

POST-CMP REMOVAL USING COMPOSITIONS AND METHOD OF USE

AQUEOUS CLEANER FOR THE REMOVAL OF POST-ETCH RESIDUES

FORMULATIONS FOR WET ETCHING NIPT DURING SILICIDE FABRICATION

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE

NON-AMINE POST-CMP COMPOSITION AND METHOD OF USE

FORMULATIONS FOR THE REMOVAL OF PARTICLES GENERATED BY CERIUM-CONTA...

ANTIOXIDANTS FOR POST-CMP CLEANING FORMULATIONS

COMPOSITION AND PROCESS FOR SELECTIVELY ETCHING METAL NITRIDES

AQUEOUS CLEANER FOR THE REMOVAL OF POST-ETCH RESIDUES

COPPER CLEANING AND PROTECTION FORMULATIONS

NON-AMINE POST-CMP COMPOSITION AND METHOD OF USE

LOW PH POST-CMP RESIDUE REMOVAL COMPOSITION AND METHOD OF USE

COMPOSITIONS FOR PROCESSING OF SEMICONDUCTOR SUBSTRATES

ANTIOXIDANTS FOR POST-CMP CLEANING FORMULATIONS

AQUEOUS CLEANER WITH LOW METAL ETCH RATE

Copper passivating post-chemical mechanical polishing cleaning comp...

Aqueous cleaner with low metal etch rate

Compositions for processing of semiconductor substrates

Aqueous cleaner with low metal etch rate

Method for monitoring surface treatment of copper containing devices

Post chemical-mechanical planarization (CMP) cleaning composition