Jeffrey C. Benzing

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma particle extraction process for PECVD
- Patent number 8,192,806
- Issue date Jun 5, 2012
- Novellus Systems, Inc.
- Sesha Varadarajan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods for making dual-damascene dielectric structures
- Patent number 7,501,339
- Issue date Mar 10, 2009
- Lam Research Corporation
- Jay E. Uglow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for making dual-damascene dielectric structures
- Patent number 7,060,605
- Issue date Jun 13, 2006
- Lam Research Corporation
- Jay E. Uglow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual-damascene dielectric structures
- Patent number 6,909,190
- Issue date Jun 21, 2005
- Lam Research Corporation
- Jay E. Uglow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low dielectric constant porous materials having improved mechanical...
- Patent number 6,528,153
- Issue date Mar 4, 2003
- Novellus Systems, Inc.
- Jeffrey C. Benzing
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Dual-damascene dielectric structures and methods for making the same
- Patent number 6,251,770
- Issue date Jun 26, 2001
- LAM Research Corp.
- Jay E. Uglow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma process apparatus for integrated circuit fabrication having...
- Patent number 6,225,744
- Issue date May 1, 2001
- Novellus Systems, Inc.
- Jeffrey A. Tobin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for aligning substrate to chuck in processing chamber
- Patent number 6,126,382
- Issue date Oct 3, 2000
- Novellus Systems, Inc.
- Martin N. Scales
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas-based substrate deposition protection
- Patent number 5,925,411
- Issue date Jul 20, 1999
- Siliconix incorporated
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process of evaporating a liquid in a cyclone evaporator
- Patent number 5,901,271
- Issue date May 4, 1999
- Novellus Systems, Inc.
- Jeffrey C. Benzing
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for preventing deposition on frontside peripheral region...
- Patent number 5,882,417
- Issue date Mar 16, 1999
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exclusion guard and gas-based substrate protection for chemical vap...
- Patent number 5,843,233
- Issue date Dec 1, 1998
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exclusion guard and gas-based substrate protection for chemical vap...
- Patent number 5,769,951
- Issue date Jun 23, 1998
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclone evaporator
- Patent number 5,653,813
- Issue date Aug 5, 1997
- Novellus Systems, Inc.
- Jeffrey C. Benzing
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for supporting a substrate and introducing gas flow doxim...
- Patent number 5,620,525
- Issue date Apr 15, 1997
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of generating plasma having high ion density for substrate p...
- Patent number 5,605,599
- Issue date Feb 25, 1997
- Novellus Systems, Inc.
- Jeffrey C. Benzing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer surface protection in a gas deposition process
- Patent number 5,578,532
- Issue date Nov 26, 1996
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Induction plasma source
- Patent number 5,405,480
- Issue date Apr 11, 1995
- Novellus Systems, Inc.
- Jeffrey C. Benzing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas-based backside protection during substrate processing
- Patent number 5,374,594
- Issue date Dec 20, 1994
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Induction plasma source
- Patent number 5,346,578
- Issue date Sep 13, 1994
- Novellus Systems, Inc.
- Jeffrey C. Benzing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas-based substrate protection during processing
- Patent number 5,238,499
- Issue date Aug 24, 1993
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-based backside protection during substrate processing
- Patent number 5,230,741
- Issue date Jul 27, 1993
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ CVD chamber cleaner
- Patent number 4,657,616
- Issue date Apr 14, 1987
- Benzing Technologies, Inc.
- David W. Benzing
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
Methods for making dual-damascene dielectric structures
- Publication number 20060166485
- Publication date Jul 27, 2006
- LAM RESEARCH CORPORATION, AND NOVELLUS SYSTEMS, INC.
- Jay E. Uglow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL - DAMASCENE DIELECTRIC STRUCTURES
- Publication number 20010010970
- Publication date Aug 2, 2001
- Jay E. Uglow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for making dual-damascene dielectric structures
- Publication number 20010009803
- Publication date Jul 26, 2001
- Jay E. Uglow
- H01 - BASIC ELECTRIC ELEMENTS

Jeffrey C. Benzing

Person

Patents Grantslast 30 patents

Plasma particle extraction process for PECVD

Methods for making dual-damascene dielectric structures

Methods for making dual-damascene dielectric structures

Dual-damascene dielectric structures

Low dielectric constant porous materials having improved mechanical...

Dual-damascene dielectric structures and methods for making the same

Plasma process apparatus for integrated circuit fabrication having...

Apparatus for aligning substrate to chuck in processing chamber

Gas-based substrate deposition protection

Process of evaporating a liquid in a cyclone evaporator

Apparatus for preventing deposition on frontside peripheral region...

Exclusion guard and gas-based substrate protection for chemical vap...

Exclusion guard and gas-based substrate protection for chemical vap...

Cyclone evaporator

Apparatus for supporting a substrate and introducing gas flow doxim...

Method of generating plasma having high ion density for substrate p...

Wafer surface protection in a gas deposition process

Induction plasma source

Gas-based backside protection during substrate processing

Induction plasma source

Gas-based substrate protection during processing

Gas-based backside protection during substrate processing

In-situ CVD chamber cleaner

Patents Applicationslast 30 patents

Methods for making dual-damascene dielectric structures

DUAL - DAMASCENE DIELECTRIC STRUCTURES

Methods for making dual-damascene dielectric structures