Jeffrey T. Fanton

Person

Los Altos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for measuring a sample by x-ray reflectance scatt...
- Patent number 11,874,237
- Issue date Jan 16, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 10,859,519
- Issue date Dec 8, 2020
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology device for measuring samples having thin or thick...
- Patent number 10,746,530
- Issue date Aug 18, 2020
- Onto Innovation Inc.
- Jeffrey T. Fanton
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 10,481,112
- Issue date Nov 19, 2019
- Nova Measuring Instruments Inc.
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 10,119,925
- Issue date Nov 6, 2018
- Nova Measuring Instruments Inc.
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 9,588,066
- Issue date Mar 7, 2017
- ReVera, Incorporated
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for fabricating platelets of a monochromator fo...
- Patent number 9,297,771
- Issue date Mar 29, 2016
- ReVera, Incorporated
- Jeffrey T. Fanton
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for characterizing a film by X-ray photoelectron...
- Patent number 9,240,254
- Issue date Jan 19, 2016
- Revera, Incorporated
- Bruno W. Schueler
- G01 - MEASURING TESTING
Information Patent Grant
Complementary waveplate rotating compensator ellipsometer
- Patent number 7,889,339
- Issue date Feb 15, 2011
- KLA-Tencor Corporation
- Klaus Flock
- G01 - MEASURING TESTING
Information Patent Grant
Normal incidence ellipsometer with complementary waveplate rotating...
- Patent number 7,889,340
- Issue date Feb 15, 2011
- KLA-Tencor Corporation
- Klaus Flock
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system with multiple wavelengths
- Patent number 7,619,741
- Issue date Nov 17, 2009
- KLA-Tencor Corp.
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system with multiple wavelengths
- Patent number 7,423,757
- Issue date Sep 9, 2008
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Measurement system with separate optimized beam paths
- Patent number 7,227,637
- Issue date Jun 5, 2007
- Therma-Wave, Inc.
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system with multiple wavelengths
- Patent number 7,116,424
- Issue date Oct 3, 2006
- Therma-Wave, Inc.
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system with multiple wavelengths
- Patent number 7,106,446
- Issue date Sep 12, 2006
- Therma-Wave, Inc.
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system with fiber laser technology
- Patent number 7,079,249
- Issue date Jul 18, 2006
- Therma-Wave, Inc.
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Measurement system with separate optimized beam paths
- Patent number 7,061,614
- Issue date Jun 13, 2006
- Therma-Wave, Inc.
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Self-calibrating beam profile ellipsometer
- Patent number 7,054,006
- Issue date May 30, 2006
- Therma-Wave, Inc.
- Haiming Wang
- G01 - MEASURING TESTING
Information Patent Grant
Thin film optical measurement system and method with calibrating el...
- Patent number 6,934,025
- Issue date Aug 23, 2005
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Sample positioning system to improve edge measurements
- Patent number 6,885,019
- Issue date Apr 26, 2005
- Therma-Wave, Inc.
- Jeffrey T. Fanton
- G01 - MEASURING TESTING
Information Patent Grant
Thin film optical measurement system and method with calibrating el...
- Patent number 6,753,962
- Issue date Jun 22, 2004
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
X-ray reflectance measurement system with adjustable resolution
- Patent number 6,744,850
- Issue date Jun 1, 2004
- Therma-Wave, Inc.
- Jeffrey T. Fanton
- G01 - MEASURING TESTING
Information Patent Grant
Stage rotation system to improve edge measurements
- Patent number 6,707,056
- Issue date Mar 16, 2004
- Therma-Wave, Inc.
- Jeffrey T. Fanton
- G01 - MEASURING TESTING
Information Patent Grant
Thin film optical measurement system and method with calibrating el...
- Patent number 6,515,746
- Issue date Feb 4, 2003
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Thin film optical measurement system and method with calibrating el...
- Patent number 6,411,385
- Issue date Jun 25, 2002
- Therma-Wave, Inc.
- David E. Aspnes
- G01 - MEASURING TESTING
Information Patent Grant
Thin film optical measurement system and method with calibrating el...
- Patent number 6,304,326
- Issue date Oct 16, 2001
- Therma-Wave, Inc.
- David E. Aspnes
- G01 - MEASURING TESTING
Information Patent Grant
Thin film optical measurement system and method with calibrating el...
- Patent number 5,900,939
- Issue date May 4, 1999
- Therma-Wave, Inc.
- David E. Aspnes
- G01 - MEASURING TESTING
Information Patent Grant
Thin film optical measurement system and method with calibrating el...
- Patent number 5,798,837
- Issue date Aug 25, 1998
- Therma-Wave, Inc.
- David E. Aspnes
- G01 - MEASURING TESTING
Information Patent Grant
Integrated spectroscopic ellipsometer
- Patent number 5,596,411
- Issue date Jan 21, 1997
- Therma-Wave, Inc.
- Jeffrey T. Fanton
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for evaluating the thickness of thin films
- Patent number 5,181,080
- Issue date Jan 19, 1993
- Therma-Wave, Inc.
- Jeffrey T. Fanton
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR MEASURING A SAMPLE BY X-RAY REFLECTANCE SCATT...
- Publication number 20210164924
- Publication date Jun 3, 2021
- NOVA MEASURING INSTRUMENTS LTD.
- Heath POIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL METROLOGY DEVICE FOR MEASURING SAMPLES HAVING THIN OR THICK...
- Publication number 20200182606
- Publication date Jun 11, 2020
- ONTO INNOVATION INC.
- Jeffrey T. Fanton
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20200088656
- Publication date Mar 19, 2020
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20190086342
- Publication date Mar 21, 2019
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20170176354
- Publication date Jun 22, 2017
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20150204802
- Publication date Jul 23, 2015
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
Methods and Systems for Fabricating Platelets of a Monochromator fo...
- Publication number 20150052723
- Publication date Feb 26, 2015
- Jeffrey T. Fanton
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR CHARACTERIZING A FILM BY X-RAY PHOTOELECTRON...
- Publication number 20130077742
- Publication date Mar 28, 2013
- Bruno W. Schueler
- G01 - MEASURING TESTING
Information Patent Application
MODULATED REFLECTANCE MEASUREMENT SYSTEM WITH MULTIPLE WAVELENGTHS
- Publication number 20080309943
- Publication date Dec 18, 2008
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Methods for eliminating artifacts in two-dimensional optical metrology
- Publication number 20070076976
- Publication date Apr 5, 2007
- Craig Uhrich
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Modulated reflectance measurement system with multiple wavelengths
- Publication number 20060262314
- Publication date Nov 23, 2006
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Measurement system with separate optimized beam paths
- Publication number 20060180761
- Publication date Aug 17, 2006
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
Modulated reflectance measurement system with multiple wavelengths
- Publication number 20060092425
- Publication date May 4, 2006
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Self-calibrating beam profile ellipsometer
- Publication number 20040233436
- Publication date Nov 25, 2004
- Haiming Wang
- G01 - MEASURING TESTING
Information Patent Application
Thin film optical measurement system and method with calibrating el...
- Publication number 20040207845
- Publication date Oct 21, 2004
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Application
Sample positioning system to improve edge measurements
- Publication number 20040201839
- Publication date Oct 14, 2004
- Jeffrey T. Fanton
- G01 - MEASURING TESTING
Information Patent Application
Modulated reflectance measurement system with multiple wavelengths
- Publication number 20030234932
- Publication date Dec 25, 2003
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Modulated reflectance measurement system with fiber laser technology
- Publication number 20030234933
- Publication date Dec 25, 2003
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Thin film optical measurement system and method with calibrating el...
- Publication number 20030123060
- Publication date Jul 3, 2003
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Application
Measurement system with separate optimized beam paths
- Publication number 20030071996
- Publication date Apr 17, 2003
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
Stage rotation system to improve edge measurements
- Publication number 20020191740
- Publication date Dec 19, 2002
- Jeffrey T. Fanton
- G01 - MEASURING TESTING
Information Patent Application
Thin film optical measurement system and method with calibrating el...
- Publication number 20020176081
- Publication date Nov 28, 2002
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Application
X-ray reflectance measurement system with adjustable resolution
- Publication number 20020097837
- Publication date Jul 25, 2002
- Jeffrey T. Fanton
- G01 - MEASURING TESTING
Information Patent Application
Thin film optical measurement system and method with calibrating el...
- Publication number 20010046049
- Publication date Nov 29, 2001
- David E. Aspnes
- G01 - MEASURING TESTING

Jeffrey T. Fanton

Person

Patents Grantslast 30 patents

System and method for measuring a sample by x-ray reflectance scatt...

Methods and systems for measuring periodic structures using multi-a...

Optical metrology device for measuring samples having thin or thick...

Methods and systems for measuring periodic structures using multi-a...

Methods and systems for measuring periodic structures using multi-a...

Methods and systems for measuring periodic structures using multi-a...

Methods and systems for fabricating platelets of a monochromator fo...

System and method for characterizing a film by X-ray photoelectron...

Complementary waveplate rotating compensator ellipsometer

Normal incidence ellipsometer with complementary waveplate rotating...

Modulated reflectance measurement system with multiple wavelengths

Modulated reflectance measurement system with multiple wavelengths

Measurement system with separate optimized beam paths

Modulated reflectance measurement system with multiple wavelengths

Modulated reflectance measurement system with multiple wavelengths

Modulated reflectance measurement system with fiber laser technology

Measurement system with separate optimized beam paths

Self-calibrating beam profile ellipsometer

Thin film optical measurement system and method with calibrating el...

Sample positioning system to improve edge measurements

Thin film optical measurement system and method with calibrating el...

X-ray reflectance measurement system with adjustable resolution

Stage rotation system to improve edge measurements

Thin film optical measurement system and method with calibrating el...

Thin film optical measurement system and method with calibrating el...

Thin film optical measurement system and method with calibrating el...

Thin film optical measurement system and method with calibrating el...

Thin film optical measurement system and method with calibrating el...

Integrated spectroscopic ellipsometer

Method and apparatus for evaluating the thickness of thin films

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR MEASURING A SAMPLE BY X-RAY REFLECTANCE SCATT...

OPTICAL METROLOGY DEVICE FOR MEASURING SAMPLES HAVING THIN OR THICK...

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

Methods and Systems for Fabricating Platelets of a Monochromator fo...

SYSTEM AND METHOD FOR CHARACTERIZING A FILM BY X-RAY PHOTOELECTRON...

MODULATED REFLECTANCE MEASUREMENT SYSTEM WITH MULTIPLE WAVELENGTHS

Methods for eliminating artifacts in two-dimensional optical metrology

Modulated reflectance measurement system with multiple wavelengths

Measurement system with separate optimized beam paths

Modulated reflectance measurement system with multiple wavelengths

Self-calibrating beam profile ellipsometer

Thin film optical measurement system and method with calibrating el...

Sample positioning system to improve edge measurements

Modulated reflectance measurement system with multiple wavelengths

Modulated reflectance measurement system with fiber laser technology

Thin film optical measurement system and method with calibrating el...

Measurement system with separate optimized beam paths

Stage rotation system to improve edge measurements

Thin film optical measurement system and method with calibrating el...

X-ray reflectance measurement system with adjustable resolution

Thin film optical measurement system and method with calibrating el...