Jeffrey TOBIN

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for selective nitridation process
- Patent number 11,581,408
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Matthew Scott Rogers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductive plasma source with metallic shower head using b-field con...
- Patent number 11,450,509
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Canfeng Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for selective nitridation process
- Patent number 10,950,698
- Issue date Mar 16, 2021
- Applied Materials, Inc.
- Matthew Scott Rogers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for precleaning a substrate surface prior to e...
- Patent number 10,837,122
- Issue date Nov 17, 2020
- Applied Materials, Inc.
- Christopher S. Olsen
- C30 - CRYSTAL GROWTH
Information Patent Grant
Showerhead design
- Patent number 10,626,500
- Issue date Apr 21, 2020
- Applied Materials, Inc.
- Kartik Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for backside passivation
- Patent number 10,535,513
- Issue date Jan 14, 2020
- Applied Materials, Inc.
- Lara Hawrylchak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductive plasma source with metallic shower head using B-field con...
- Patent number 10,529,541
- Issue date Jan 7, 2020
- Applied Materials, Inc.
- Canfeng Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor design to eliminate deposition valleys in the wafer
- Patent number 10,519,547
- Issue date Dec 31, 2019
- Applied Materials, Inc.
- Karthik Ramanathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer mechanisms
- Patent number 10,453,733
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for precleaning a substrate surface prior to e...
- Patent number 10,428,441
- Issue date Oct 1, 2019
- Applied Materials, Inc.
- Christopher S. Olsen
- C30 - CRYSTAL GROWTH
Information Patent Grant
Showerhead design
- Patent number 10,221,483
- Issue date Mar 5, 2019
- Applied Materials, Inc.
- Kartik Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Support cylinder for thermal processing chamber
- Patent number 10,128,144
- Issue date Nov 13, 2018
- Applied Materials, Inc.
- Mehran Behdjat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for selective nitridation process
- Patent number 10,049,881
- Issue date Aug 14, 2018
- Applied Materials, Inc.
- Matthew S. Rogers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for backside passivation
- Patent number 10,020,187
- Issue date Jul 10, 2018
- Applied Materials, Inc.
- Lara Hawrylchak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrier system
- Patent number 9,929,029
- Issue date Mar 27, 2018
- Applied Materials, Inc.
- Jeffrey Tobin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanisms
- Patent number 9,905,454
- Issue date Feb 27, 2018
- Applied Materials, Inc.
- Masato Ishii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for precleaning a substrate surface prior to e...
- Patent number 9,683,308
- Issue date Jun 20, 2017
- Applied Materials, Inc.
- Christopher S. Olsen
- C30 - CRYSTAL GROWTH
Information Patent Grant
Support cylinder for thermal processing chamber
- Patent number 9,659,809
- Issue date May 23, 2017
- Applied Materials, Inc.
- Mehran Behdjat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Minimal contact edge ring for rapid thermal processing
- Patent number 9,558,982
- Issue date Jan 31, 2017
- Applied Materials, Inc.
- Heng Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Minimal contact edge ring for rapid thermal processing
- Patent number 9,403,251
- Issue date Aug 2, 2016
- Applied Materials, Inc.
- Sairaju Tallavarjula
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Support cylinder for thermal processing chamber
- Patent number 9,385,004
- Issue date Jul 5, 2016
- Applied Materials, Inc.
- Mehran Behdjat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing substrates using an ion shield
- Patent number 9,048,190
- Issue date Jun 2, 2015
- Applied Materials, Inc.
- Jeffrey Tobin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sequential deposition/anneal film densification method
- Patent number 7,790,633
- Issue date Sep 7, 2010
- Novellus Systems, Inc.
- Raihan M. Tarafdar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conformal nanolaminate dielectric deposition and etch bag gap fill...
- Patent number 7,482,247
- Issue date Jan 27, 2009
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling properties of conformal silica nanolaminates...
- Patent number 7,297,608
- Issue date Nov 20, 2007
- Novellus Systems, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for the use of alkoxysilanol precursors for vapor depositio...
- Patent number 7,294,583
- Issue date Nov 13, 2007
- Novellus Systems, Inc.
- Ron Rulkens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming high density, conformal, silica nanolaminate fi...
- Patent number 7,271,112
- Issue date Sep 18, 2007
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic rapid vapor deposition process for conformal silica laminates
- Patent number 7,223,707
- Issue date May 29, 2007
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silica thin films produced by rapid surface catalyzed vapor deposit...
- Patent number 7,202,185
- Issue date Apr 10, 2007
- Novellus Systems, Inc.
- Dennis M. Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential deposition/anneal film densification method
- Patent number 7,148,155
- Issue date Dec 12, 2006
- Novellus Systems, Inc.
- Raihan M. Tarafdar
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR GAS AND VAPOR DEPOSITION PRECURSOR DELIVER...
- Publication number 20250003065
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Thanh X Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...
- Publication number 20240301584
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Christopher S. OLSEN
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND APPARATUS FOR SELECTIVE NITRIDATION PROCESS
- Publication number 20210202702
- Publication date Jul 1, 2021
- Applied Materials, Inc.
- Matthew Scott ROGERS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...
- Publication number 20210010160
- Publication date Jan 14, 2021
- Applied Materials, Inc.
- Christopher S. OLSEN
- C30 - CRYSTAL GROWTH
Information Patent Application
INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CON...
- Publication number 20200144027
- Publication date May 7, 2020
- Applied Materials, Inc.
- Canfeng LAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...
- Publication number 20190382917
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- Christopher S. OLSEN
- C30 - CRYSTAL GROWTH
Information Patent Application
SHOWERHEAD DESIGN
- Publication number 20190194810
- Publication date Jun 27, 2019
- Applied Materials, Inc.
- Kartik SHAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SELECTIVE NITRIDATION PROCESS
- Publication number 20190088485
- Publication date Mar 21, 2019
- Applied Materials, Inc.
- Matthew Scott ROGERS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus And Methods For Backside Passivation
- Publication number 20180294153
- Publication date Oct 11, 2018
- Applied Materials, Inc.
- Lara Hawrylchak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISMS
- Publication number 20180182660
- Publication date Jun 28, 2018
- Applied Materials, Inc.
- Masato ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...
- Publication number 20180016705
- Publication date Jan 18, 2018
- Applied Materials, Inc.
- Christopher S. OLSEN
- C30 - CRYSTAL GROWTH
Information Patent Application
SUPPORT CYLINDER FOR THERMAL PROCESSING CYLINDER
- Publication number 20170263493
- Publication date Sep 14, 2017
- Applied Materials, Inc.
- Mehran BEHDJAT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CON...
- Publication number 20170194128
- Publication date Jul 6, 2017
- Applied Materials, Inc.
- Canfeng LAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER SYSTEM
- Publication number 20170110352
- Publication date Apr 20, 2017
- Applied Materials, Inc.
- Jeffrey TOBIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT CYLINDER FOR THERMAL PROCESSING CHAMBER
- Publication number 20160300752
- Publication date Oct 13, 2016
- Applied Materials, Inc.
- Mehran BEHDJAT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Injector For Spatially Separated Atomic Layer Deposition Chamber
- Publication number 20160215392
- Publication date Jul 28, 2016
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR DESIGN TO ELIMINATE DEPOSITION VALLEYS IN THE WAFER
- Publication number 20160215393
- Publication date Jul 28, 2016
- Applied Materials, Inc.
- Karthik RAMANATHAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER MECHANISMS
- Publication number 20160204019
- Publication date Jul 14, 2016
- Applied Materials, Inc.
- Masato ISHII
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING SUBSTRATES USING AN ION SHIELD
- Publication number 20150332941
- Publication date Nov 19, 2015
- Applied Materials, Inc.
- JEFFREY TOBIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD DESIGN
- Publication number 20150329966
- Publication date Nov 19, 2015
- Applied Materials, Inc.
- Kartik SHAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT CYLINDER FOR THERMAL PROCESSING CHAMBER
- Publication number 20150050819
- Publication date Feb 19, 2015
- Applied Materials, Inc.
- Mehran BEHDJAT
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...
- Publication number 20150040822
- Publication date Feb 12, 2015
- Applied Materials, Inc.
- Christopher S. OLSEN
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus And Methods For Backside Passivation
- Publication number 20140147990
- Publication date May 29, 2014
- Lara Hawrylchak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MINIMAL CONTACT EDGE RING FOR RAPID THERMAL PROCESSING
- Publication number 20140105582
- Publication date Apr 17, 2014
- Applied Materials, Inc.
- SAIRAJU TALLAVARJULA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING SUBSTRATES USING AN ION SHIELD
- Publication number 20140099795
- Publication date Apr 10, 2014
- Applied Materials, Inc.
- JEFFREY TOBIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SELECTIVE NITRIDATION PROCESS
- Publication number 20130040444
- Publication date Feb 14, 2013
- Applied Materials, Inc.
- MATTHEW S. ROGERS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRA...
- Publication number 20130014894
- Publication date Jan 17, 2013
- Applied Materials, Inc.
- CANFENG LAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRA...
- Publication number 20130017315
- Publication date Jan 17, 2013
- Applied Materials, Inc.
- CANFENG LAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CON...
- Publication number 20110278260
- Publication date Nov 17, 2011
- Applied Materials, Inc.
- Canfeng Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DETERMINING THE QUANTITY OF PRECURSOR IN AN AMPOULE
- Publication number 20100305884
- Publication date Dec 2, 2010
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Jeffrey TOBIN

Person

Patents Grantslast 30 patents

Method and apparatus for selective nitridation process

Inductive plasma source with metallic shower head using b-field con...

Method and apparatus for selective nitridation process

Method and apparatus for precleaning a substrate surface prior to e...

Showerhead design

Apparatus and methods for backside passivation

Inductive plasma source with metallic shower head using B-field con...

Susceptor design to eliminate deposition valleys in the wafer

Substrate transfer mechanisms

Method and apparatus for precleaning a substrate surface prior to e...

Showerhead design

Support cylinder for thermal processing chamber

Method and apparatus for selective nitridation process

Apparatus and methods for backside passivation

Substrate carrier system

Substrate transfer mechanisms

Method and apparatus for precleaning a substrate surface prior to e...

Support cylinder for thermal processing chamber

Minimal contact edge ring for rapid thermal processing

Minimal contact edge ring for rapid thermal processing

Support cylinder for thermal processing chamber

Methods and apparatus for processing substrates using an ion shield

Sequential deposition/anneal film densification method

Conformal nanolaminate dielectric deposition and etch bag gap fill...

Method for controlling properties of conformal silica nanolaminates...

Methods for the use of alkoxysilanol precursors for vapor depositio...

Methods for forming high density, conformal, silica nanolaminate fi...

Dynamic rapid vapor deposition process for conformal silica laminates

Silica thin films produced by rapid surface catalyzed vapor deposit...

Sequential deposition/anneal film densification method

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR GAS AND VAPOR DEPOSITION PRECURSOR DELIVER...

METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...

METHOD AND APPARATUS FOR SELECTIVE NITRIDATION PROCESS

METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...

INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CON...

METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...

SHOWERHEAD DESIGN

METHOD AND APPARATUS FOR SELECTIVE NITRIDATION PROCESS

Apparatus And Methods For Backside Passivation

SUBSTRATE TRANSFER MECHANISMS

METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...

SUPPORT CYLINDER FOR THERMAL PROCESSING CYLINDER

INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CON...

SUBSTRATE CARRIER SYSTEM

SUPPORT CYLINDER FOR THERMAL PROCESSING CHAMBER

Injector For Spatially Separated Atomic Layer Deposition Chamber

SUSCEPTOR DESIGN TO ELIMINATE DEPOSITION VALLEYS IN THE WAFER

SUBSTRATE TRANSFER MECHANISMS

METHODS AND APPARATUS FOR PROCESSING SUBSTRATES USING AN ION SHIELD

SHOWERHEAD DESIGN

SUPPORT CYLINDER FOR THERMAL PROCESSING CHAMBER

METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...

Apparatus And Methods For Backside Passivation

MINIMAL CONTACT EDGE RING FOR RAPID THERMAL PROCESSING

METHODS AND APPARATUS FOR PROCESSING SUBSTRATES USING AN ION SHIELD

METHOD AND APPARATUS FOR SELECTIVE NITRIDATION PROCESS

METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRA...

METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRA...

INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CON...

METHODS FOR DETERMINING THE QUANTITY OF PRECURSOR IN AN AMPOULE