Jeng H. Hwang

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Masking methods and etching sequences for patterning electrodes of...
- Patent number 6,919,168
- Issue date Jul 19, 2005
- Applied Materials, Inc.
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of preventing short circuits in magnetic film stacks
- Patent number 6,893,893
- Issue date May 17, 2005
- Padmapani C. Nallan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching methods for a magnetic memory cell stack
- Patent number 6,821,907
- Issue date Nov 23, 2004
- Jeng H. Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma etching platinum
- Patent number 6,777,342
- Issue date Aug 17, 2004
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of reducing particulates in a plasma etch chamber during a m...
- Patent number 6,770,567
- Issue date Aug 3, 2004
- Yong Deuk Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching an anisotropic profile in platinum
- Patent number 6,749,770
- Issue date Jun 15, 2004
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a cup capacitor
- Patent number 6,730,561
- Issue date May 4, 2004
- Applied Materials, Inc.
- Jeng H. Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma heating of a substrate with subsequent high temperature etching
- Patent number 6,709,609
- Issue date Mar 23, 2004
- Applied Materials Inc.
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate cleaning apparatus and method
- Patent number 6,692,903
- Issue date Feb 17, 2004
- Applied Materials, Inc.
- Haojiang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma heating and etching a substrate
- Patent number 6,692,648
- Issue date Feb 17, 2004
- Applied Materials Inc.
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of etching platinum using a silicon carbide mask
- Patent number 6,579,796
- Issue date Jun 17, 2003
- Applied Materials Inc.
- Chentsau Ying
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching process for metals and metal oxides, including metal...
- Patent number 6,541,380
- Issue date Apr 1, 2003
- Applied Materials Inc.
- Chentsau Ying
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching methods for anisotropic platinum profile
- Patent number 6,482,745
- Issue date Nov 19, 2002
- Applied Materials, Inc.
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of patterning lead zirconium titanate and barium strontium t...
- Patent number 6,436,838
- Issue date Aug 20, 2002
- Applied Materials, Inc.
- Chen Tsan Ying
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for preventing corrosion of a dielectric material
- Patent number 6,368,517
- Issue date Apr 9, 2002
- Applied Materials, Inc.
- Jeng H. Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching methods for anisotropic platinum profile
- Patent number 6,323,132
- Issue date Nov 27, 2001
- Applied Materials, Inc.
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for removing redeposited veils from etched platinum
- Patent number 6,277,762
- Issue date Aug 21, 2001
- Applied Materials, Inc.
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for shielding a dielectric member to allow for...
- Patent number 6,277,251
- Issue date Aug 21, 2001
- Applied Materials, Inc.
- Jeng H. Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF plasma method
- Patent number 6,270,687
- Issue date Aug 7, 2001
- Applied Materials, Inc.
- Yan Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Iridium etchant methods for anisotropic profile
- Patent number 6,265,318
- Issue date Jul 24, 2001
- Applied Materials, Inc.
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for removing redeposited veils from etched platinum
- Patent number 6,087,265
- Issue date Jul 11, 2000
- Applied Materials, Inc.
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF plasma etch reactor with internal inductive coil antenna and ele...
- Patent number 6,071,372
- Issue date Jun 6, 2000
- Applied Materials, Inc.
- Yan Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing redeposited veils from etched platinum
- Patent number 6,037,264
- Issue date Mar 14, 2000
- Applied Materials, Inc.
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for removal of photoresist over metal which also removes or...
- Patent number 5,174,856
- Issue date Dec 29, 1992
- Applied Materials, Inc.
- Jeng H. Hwang
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Method of preventing short circuits in magnetic film stacks
- Publication number 20030180968
- Publication date Sep 25, 2003
- APPLIED MATERIALS, INC.
- Padmapani C. Nallan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching methods for a magnetic memory cell stack
- Publication number 20030170985
- Publication date Sep 11, 2003
- APPLIED MATERIALS, INC.
- Jeng H. Hwang
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method of plasma etching platinum
- Publication number 20030064590
- Publication date Apr 3, 2003
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Masking methods and etching sequences for patterning electrodes of...
- Publication number 20030059720
- Publication date Mar 27, 2003
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of etching platinum using a silicon carbide mask
- Publication number 20030036264
- Publication date Feb 20, 2003
- Chentsau Ying
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING PROCESS FOR METALS AND METAL OXIDES RELATES INERT TO...
- Publication number 20030022494
- Publication date Jan 30, 2003
- Chentsau Ying
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of reducing particulates in a plasma etch chamber during a m...
- Publication number 20030013314
- Publication date Jan 16, 2003
- Chentsau Ying
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming a cup capacitor
- Publication number 20030013252
- Publication date Jan 16, 2003
- Jeng H. Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of reducing particulates in a plasma etch chamber during a m...
- Publication number 20030008517
- Publication date Jan 9, 2003
- APPLIED MATERIALS, INC.
- Yong Deuk Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma heating of a substrate with subsequent high temperature etching
- Publication number 20020139774
- Publication date Oct 3, 2002
- APPLIED MATERIALS, INC.
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of plasma heating and etching a substrate
- Publication number 20020117471
- Publication date Aug 29, 2002
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate cleaning apparatus and method
- Publication number 20020072016
- Publication date Jun 13, 2002
- APPLIED MATERIALS, INC.
- Haojiang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of etching an anisotropic profile in platinum
- Publication number 20020037647
- Publication date Mar 28, 2002
- Jeng H. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for allowing a stable power transmission into a plasma proce...
- Publication number 20010050267
- Publication date Dec 13, 2001
- Jeng H. Hwang
- H01 - BASIC ELECTRIC ELEMENTS

Jeng H. Hwang

Person

Patents Grantslast 30 patents

Masking methods and etching sequences for patterning electrodes of...

Method of preventing short circuits in magnetic film stacks

Etching methods for a magnetic memory cell stack

Method of plasma etching platinum

Method of reducing particulates in a plasma etch chamber during a m...

Method of etching an anisotropic profile in platinum

Method of forming a cup capacitor

Plasma heating of a substrate with subsequent high temperature etching

Substrate cleaning apparatus and method

Method of plasma heating and etching a substrate

Method of etching platinum using a silicon carbide mask

Plasma etching process for metals and metal oxides, including metal...

Etching methods for anisotropic platinum profile

Method of patterning lead zirconium titanate and barium strontium t...

Method for preventing corrosion of a dielectric material

Etching methods for anisotropic platinum profile

Method for removing redeposited veils from etched platinum

Apparatus and method for shielding a dielectric member to allow for...

RF plasma method

Iridium etchant methods for anisotropic profile

Method for removing redeposited veils from etched platinum

RF plasma etch reactor with internal inductive coil antenna and ele...

Method for removing redeposited veils from etched platinum

Method for removal of photoresist over metal which also removes or...

Patents Applicationslast 30 patents

Method of preventing short circuits in magnetic film stacks

Etching methods for a magnetic memory cell stack

Method of plasma etching platinum

Masking methods and etching sequences for patterning electrodes of...

Method of etching platinum using a silicon carbide mask

PLASMA ETCHING PROCESS FOR METALS AND METAL OXIDES RELATES INERT TO...

Method of reducing particulates in a plasma etch chamber during a m...

Method of forming a cup capacitor

Method of reducing particulates in a plasma etch chamber during a m...

Plasma heating of a substrate with subsequent high temperature etching

Method of plasma heating and etching a substrate

Substrate cleaning apparatus and method

Method of etching an anisotropic profile in platinum

Method for allowing a stable power transmission into a plasma proce...