Jens Timo Neumann

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Parameterizing x-ray scattering measurement using slice-and-image t...
- Patent number 12,288,706
- Issue date Apr 29, 2025
- Carl Zeiss SMT GmbH
- Hans Michael Stiepan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Processing image data sets
- Patent number 12,175,650
- Issue date Dec 24, 2024
- Carl Zeiss SMT GmbH
- Jens Timo Neumann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and evaluation devices for analyzing three-dimensional data...
- Patent number 12,148,139
- Issue date Nov 19, 2024
- Carl Zeiss SMT GmbH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automated root cause analysis for defect detection during fabricati...
- Patent number 12,045,969
- Issue date Jul 23, 2024
- Carl Zeiss SMT GmbH
- Jens Timo Neumann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method to acquire a 3D image of a sample structure
- Patent number 11,935,228
- Issue date Mar 19, 2024
- Carl Zeiss SMT GmbH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring a sample and microscope implementing the method
- Patent number 11,915,908
- Issue date Feb 27, 2024
- Carl Zeiss SMT GmbH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of recording an image using a particle microscope
- Patent number 11,728,130
- Issue date Aug 15, 2023
- Carl Zeiss SMT GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and devices for determining metrology sites
- Patent number 11,436,506
- Issue date Sep 6, 2022
- Carl Zeiss SMT GmbH
- Abhilash Srikantha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-scanning electron microscopy for wafer alignment
- Patent number 10,901,391
- Issue date Jan 26, 2021
- Carl Zeiss SMT GmbH
- Jagdish Chandra Saraswatula
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Imaging optical unit for a metrology system for examining a lithogr...
- Patent number 10,606,048
- Issue date Mar 31, 2020
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Grant
Optical system of a microlithographic projection exposure apparatus...
- Patent number 9,785,052
- Issue date Oct 10, 2017
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring an optical symmetry property on a projection exposure app...
- Patent number 9,703,205
- Issue date Jul 11, 2017
- Carl Zeiss SMT GmbH
- Jens Timo Neumann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DUAL BEAM SYSTEMS AND METHODS FOR DECOUPLING THE WORKING DISTANCE O...
- Publication number 20250069958
- Publication date Feb 27, 2025
- Carl Zeiss SMT GMBH
- Alex Buxbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...
- Publication number 20250022680
- Publication date Jan 16, 2025
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMPUTER IMPLEMENTED METHOD FOR THE DETECTION OF ANOMALIES IN AN IM...
- Publication number 20250021828
- Publication date Jan 16, 2025
- Carl Zeiss SMT GMBH
- Anna Alperovich
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMPUTER IMPLEMENTED METHOD FOR THE DETECTION AND CLASSIFICATION OF...
- Publication number 20240411296
- Publication date Dec 12, 2024
- Carl Zeiss SMT GMBH
- Thomas Korb
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD TO INVESTIGATE A SEMICONDUCTOR SAMPLE LAYER BY LAYER AND INV...
- Publication number 20240404786
- Publication date Dec 5, 2024
- Carl Zeiss SMT GMBH
- Ivo IHRKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF 3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREAS...
- Publication number 20240328970
- Publication date Oct 3, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G01 - MEASURING TESTING
Information Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED ACCURACY
- Publication number 20240331179
- Publication date Oct 3, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...
- Publication number 20240311698
- Publication date Sep 19, 2024
- Carl Zeiss SMT GMBH
- Alexander Freytag
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...
- Publication number 20240281952
- Publication date Aug 22, 2024
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DEFECT DETECTION IN A SEMICONDUCTOR SAMPLE IN SAMPLE IMA...
- Publication number 20240242334
- Publication date Jul 18, 2024
- Carl Zeiss MultiSEM GmbH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEGMENTATION OR CROSS SECTIONS OF HIGH ASPECT RATIO STRUCTURES
- Publication number 20240087134
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PARAMETERIZING X-RAY SCATTERING MEASUREMENT USING SLICE-AND-IMAGE T...
- Publication number 20230343619
- Publication date Oct 26, 2023
- Carl Zeiss SMT GMBH
- Hans-Michael Stiepan
- G01 - MEASURING TESTING
Information Patent Application
TRANSFERRING ALIGNMENT INFORMATION IN 3D TOMOGRAPHY FROM A FIRST SE...
- Publication number 20230267627
- Publication date Aug 24, 2023
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT DETECTION FOR SEMICONDUCTOR STRUCTURES ON A WAFER
- Publication number 20230260105
- Publication date Aug 17, 2023
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...
- Publication number 20230196189
- Publication date Jun 22, 2023
- Carl Zeiss SMT GMBH
- Alexander Freytag
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND EVALUATION DEVICES FOR ANALYZING THREE-DIMENSIONAL DATA...
- Publication number 20230169636
- Publication date Jun 1, 2023
- Carl Zeiss SMT GMBH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD TO ACQUIRE A 3D IMAGE OF A SAMPLE STRUCTURE
- Publication number 20230127194
- Publication date Apr 27, 2023
- Carl Zeiss SMT GmbH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD
- Publication number 20230120847
- Publication date Apr 20, 2023
- Carl Zeiss SMT GMBH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER
- Publication number 20220392793
- Publication date Dec 8, 2022
- Carl Zeiss SMT GMBH
- Alex Buxbaum
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CROSS SECTION IMAGING WITH IMPROVED 3D VOLUME IMAGE RECONSTRUCTION...
- Publication number 20220138973
- Publication date May 5, 2022
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INTERACTIVE AND ITERATIVE TRAINING OF A CLASSIFICATION ALGORITHM FO...
- Publication number 20220044949
- Publication date Feb 10, 2022
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESSING IMAGE DATA SETS
- Publication number 20210358101
- Publication date Nov 18, 2021
- Carl Zeiss SMT GMBH
- Jens Timo Neumann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF RECORDING AN IMAGE USING A PARTICLE MICROSCOPE
- Publication number 20210296089
- Publication date Sep 23, 2021
- Carl Zeiss SMT GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROOT CAUSE ANALYSIS FOR FABRICATION PROCESSES OF SEMICONDUCTOR STRU...
- Publication number 20210097673
- Publication date Apr 1, 2021
- Carl Zeiss SMT GMBH
- Jens Timo Neumann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICES FOR DETERMINING METROLOGY SITES
- Publication number 20200285976
- Publication date Sep 10, 2020
- Carl Zeiss SMT GMBH
- Abhilash Srikantha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ERROR REDUCTION IN IMAGES WHICH WERE GENERATED WITH CHARGED PARTICL...
- Publication number 20200258212
- Publication date Aug 13, 2020
- Carl Zeiss SMT GMBH
- Jens Timo Neumann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGING OPTICAL UNIT FOR A METROLOGY SYSTEM FOR EXAMINING A LITHOGR...
- Publication number 20170131528
- Publication date May 11, 2017
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Application
MEASURING AN OPTICAL SYMMETRY PROPERTY ON A PROJECTION EXPOSURE APP...
- Publication number 20160004168
- Publication date Jan 7, 2016
- Carl Zeiss SMT GMBH
- Jens Timo NEUMANN
- G01 - MEASURING TESTING
Information Patent Application
Optical System of a Microlithographic Projection Exposure Apparatus...
- Publication number 20130188160
- Publication date Jul 25, 2013
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Jens Timo Neumann

Person

Patents Grantslast 30 patents

Parameterizing x-ray scattering measurement using slice-and-image t...

Processing image data sets

Methods and evaluation devices for analyzing three-dimensional data...

Automated root cause analysis for defect detection during fabricati...

Method to acquire a 3D image of a sample structure

Method for measuring a sample and microscope implementing the method

Method of recording an image using a particle microscope

Method and devices for determining metrology sites

Multi-scanning electron microscopy for wafer alignment

Imaging optical unit for a metrology system for examining a lithogr...

Optical system of a microlithographic projection exposure apparatus...

Measuring an optical symmetry property on a projection exposure app...

Patents Applicationslast 30 patents

DUAL BEAM SYSTEMS AND METHODS FOR DECOUPLING THE WORKING DISTANCE O...

3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...

COMPUTER IMPLEMENTED METHOD FOR THE DETECTION OF ANOMALIES IN AN IM...

COMPUTER IMPLEMENTED METHOD FOR THE DETECTION AND CLASSIFICATION OF...

METHOD TO INVESTIGATE A SEMICONDUCTOR SAMPLE LAYER BY LAYER AND INV...

METHOD OF 3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREAS...

3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED ACCURACY

MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...

3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...

METHOD FOR DEFECT DETECTION IN A SEMICONDUCTOR SAMPLE IN SAMPLE IMA...

SEGMENTATION OR CROSS SECTIONS OF HIGH ASPECT RATIO STRUCTURES

PARAMETERIZING X-RAY SCATTERING MEASUREMENT USING SLICE-AND-IMAGE T...

TRANSFERRING ALIGNMENT INFORMATION IN 3D TOMOGRAPHY FROM A FIRST SE...

DEFECT DETECTION FOR SEMICONDUCTOR STRUCTURES ON A WAFER

MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...

METHODS AND EVALUATION DEVICES FOR ANALYZING THREE-DIMENSIONAL DATA...

METHOD TO ACQUIRE A 3D IMAGE OF A SAMPLE STRUCTURE

METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD

METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER

CROSS SECTION IMAGING WITH IMPROVED 3D VOLUME IMAGE RECONSTRUCTION...

INTERACTIVE AND ITERATIVE TRAINING OF A CLASSIFICATION ALGORITHM FO...

PROCESSING IMAGE DATA SETS

METHOD OF RECORDING AN IMAGE USING A PARTICLE MICROSCOPE

ROOT CAUSE ANALYSIS FOR FABRICATION PROCESSES OF SEMICONDUCTOR STRU...

METHOD AND DEVICES FOR DETERMINING METROLOGY SITES

ERROR REDUCTION IN IMAGES WHICH WERE GENERATED WITH CHARGED PARTICL...

IMAGING OPTICAL UNIT FOR A METROLOGY SYSTEM FOR EXAMINING A LITHOGR...

MEASURING AN OPTICAL SYMMETRY PROPERTY ON A PROJECTION EXPOSURE APP...

Optical System of a Microlithographic Projection Exposure Apparatus...