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Atomic layer deposition apparatus
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Patent number 9,031,685
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Issue date May 12, 2015
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Applied Materials, Inc.
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Barry L. Chin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Atomic layer deposition apparatus
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Patent number 8,626,330
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Issue date Jan 7, 2014
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Applied Materials, Inc.
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Barry L. Chin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Atomic layer deposition apparatus
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Patent number 8,027,746
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Issue date Sep 27, 2011
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Applied Materials, Inc.
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Barry L. Chin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Atomic layer deposition apparatus
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Patent number 7,860,597
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Issue date Dec 28, 2010
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Applied Materials, Inc.
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Barry L. Chin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Atomic layer deposition apparatus
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Patent number 7,660,644
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Issue date Feb 9, 2010
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Applied Materials, Inc.
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Barry L. Chin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Formation of composite tungsten films
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Patent number 7,605,083
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Issue date Oct 20, 2009
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Applied Materials, Inc.
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Ken K. Lai
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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