Ji Soo Kim

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Showerhead having a detachable high resistivity gas distribution plate
- Patent number 10,790,120
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Jason Della Rosa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead having a detachable high resistivity gas distribution plate
- Patent number 10,607,816
- Issue date Mar 31, 2020
- Applied Materials, Inc.
- Jason Della Rosa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High aspect ratio etch
- Patent number 9,997,364
- Issue date Jun 12, 2018
- Lam Research Corporation
- William Thie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead having a detachable high resistivity gas distribution plate
- Patent number 9,911,579
- Issue date Mar 6, 2018
- Applied Materials, Inc.
- Jason Della Rosa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for the deposition of a conformal film on a substrate and...
- Patent number 9,384,979
- Issue date Jul 5, 2016
- Lam Research Corporation
- Dae-Han Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for etching materials used in MRAM applications
- Patent number 9,059,398
- Issue date Jun 16, 2015
- Applied Materials, Inc.
- Jisoo Kim
- G11 - INFORMATION STORAGE
Information Patent Grant
Mask trimming
- Patent number 8,864,931
- Issue date Oct 21, 2014
- Lam Research Corporation
- Supriya Goyal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing chambers incorporating a moveable flow equalizer
- Patent number 8,617,347
- Issue date Dec 31, 2013
- Applied Materials, Inc.
- Jisoo Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Critical dimension reduction and roughness control
- Patent number 8,614,149
- Issue date Dec 24, 2013
- Lam Research Corporation
- Sangheon Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pitch reduction using oxide spacer
- Patent number 8,592,318
- Issue date Nov 26, 2013
- Lam Research Corporation
- Jisoo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for the deposition of a conformal film on a substrate and...
- Patent number 8,357,434
- Issue date Jan 22, 2013
- Lam Research Corporation
- Dae-han Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma process with photoresist mask pretreatment
- Patent number 8,277,670
- Issue date Oct 2, 2012
- Lam Research Corporation
- Dongho Heo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Critical dimension reduction and roughness control
- Patent number 8,268,118
- Issue date Sep 18, 2012
- Lam Research Corporation
- Sangheon Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
De-fluoridation process
- Patent number 8,172,948
- Issue date May 8, 2012
- Lam Research Corporation
- Dongho Heo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Infinitely selective photoresist mask etch
- Patent number 7,910,489
- Issue date Mar 22, 2011
- Lam Research Corporation
- Ji Soo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Glue layer for hydrofluorocarbon etch
- Patent number 7,902,073
- Issue date Mar 8, 2011
- Lam Research Corporation
- Ji Soo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask trimming
- Patent number 7,838,426
- Issue date Nov 23, 2010
- Lam Research Corporation
- Supriya Goyal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic enhancement for mechanical confinement of plasma
- Patent number 7,838,086
- Issue date Nov 23, 2010
- Lam Research Corporation
- Douglas L. Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask trimming with ARL etch
- Patent number 7,785,484
- Issue date Aug 31, 2010
- Lam Research Corporation
- Dongho Heo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sidewall forming processes
- Patent number 7,772,122
- Issue date Aug 10, 2010
- Lam Research Corporation
- Peter Cirigliano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Critical dimension reduction and roughness control
- Patent number 7,695,632
- Issue date Apr 13, 2010
- Lam Research Corporation
- Sangheon Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical profile fixing
- Patent number 7,682,516
- Issue date Mar 23, 2010
- Lam Research Corporation
- S. M. Reza Sadjadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrically enhancing the confinement of plasma
- Patent number 7,632,375
- Issue date Dec 15, 2009
- Lam Research Corporation
- Andras Kuthi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of sputtering a protective coating on a semiconductor subst...
- Patent number 7,601,246
- Issue date Oct 13, 2009
- Lam Research Corporation
- Jisoo Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-aligned pitch reduction
- Patent number 7,560,388
- Issue date Jul 14, 2009
- Lam Research Corporation
- Jisoo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch with striation control
- Patent number 7,491,647
- Issue date Feb 17, 2009
- Lam Research Corporation
- S. M. Reza Sadjadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removable spacer
- Patent number 7,476,610
- Issue date Jan 13, 2009
- Lam Research Corporation
- Ji Soo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic enhancement for mechanical confinement of plasma
- Patent number 7,455,748
- Issue date Nov 25, 2008
- Lam Research Corporation
- Douglas L. Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch with photoresist mask
- Patent number 7,442,649
- Issue date Oct 28, 2008
- Lam Research Corporation
- Jisoo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned pitch reduction
- Patent number 7,390,749
- Issue date Jun 24, 2008
- Lam Research Corporation
- Ji Soo Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FLAT BOTTOM SHADOW RING
- Publication number 20230223292
- Publication date Jul 13, 2023
- LAM RESEARCH CORPORATION
- Lai Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LOCATION GAS INJECTION TO IMPROVE UNIFORMITY IN RAPID ALTERNA...
- Publication number 20220108875
- Publication date Apr 7, 2022
- LAM RESEARCH CORPORATION
- William THIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD HAVING A DETACHABLE HIGH RESISTIVITY GAS DISTRIBUTION PLATE
- Publication number 20200194229
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- JASON DELLA ROSA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD HAVING A DETACHABLE HIGH RESISTIVITY GAS DISTRIBUTION PLATE
- Publication number 20180190473
- Publication date Jul 5, 2018
- JASON DELLA ROSA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ASPECT RATIO ETCH
- Publication number 20180108531
- Publication date Apr 19, 2018
- LAM RESEARCH CORPORATION
- William THIE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD HAVING A DETACHABLE HIGH RESISTIVITY GAS DISTRIBUTION PLATE
- Publication number 20160005571
- Publication date Jan 7, 2016
- Applied Materials, Inc.
- JASON DELLA ROSA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERNING OF MAGNETIC TUNNEL JUNCTION (MTJ) FILM STACKS
- Publication number 20140248718
- Publication date Sep 4, 2014
- Jisoo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR ETCHING MATERIALS USED IN MRAM APPLICATIONS
- Publication number 20140038311
- Publication date Feb 6, 2014
- Jisoo Kim
- G11 - INFORMATION STORAGE
Information Patent Application
APPARATUS FOR THE DEPOSITION OF A CONFORMAL FILM ON A SUBSTRATE AND...
- Publication number 20130074769
- Publication date Mar 28, 2013
- LAM RESEARCH CORPORATION
- Dae-Han CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRITICAL DIMENSION REDUCTION AND ROUGHNESS CONTROL
- Publication number 20120309201
- Publication date Dec 6, 2012
- LAM RESEARCH CORPORATION
- Sangheon LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PITCH REDUCTION USING OXIDE SPACER
- Publication number 20120052683
- Publication date Mar 1, 2012
- LAM RESEARCH CORPORATION
- Jisoo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK TRIMMING
- Publication number 20110030895
- Publication date Feb 10, 2011
- LAM RESEARCH CORPORATION
- Supriya Goyal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING CHAMBERS INCORPORATING A MOVEABLE FLOW EQUALIZER
- Publication number 20110031214
- Publication date Feb 10, 2011
- Jisoo Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CRITICAL DIMENSION REDUCTION AND ROUGHNESS CONTROL
- Publication number 20100148317
- Publication date Jun 17, 2010
- LAM RESEARCH CORPORATION
- Sangheon LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIDEWALL FORMING PROCESSES
- Publication number 20100068885
- Publication date Mar 18, 2010
- LAM RESEARCH CORPORATION
- Peter CIRIGLIANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESS WITH PHOTORESIST MASK PRETREATMENT
- Publication number 20090286400
- Publication date Nov 19, 2009
- LAM RESEARCH CORPORATION
- Dongho Heo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRICALLY ENHANCING THE CONFINEMENT OF PLASMA
- Publication number 20090165954
- Publication date Jul 2, 2009
- LAM RESEARCH CORPORATION
- Andras Kuthi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCH WITH STRIATION CONTROL
- Publication number 20090121324
- Publication date May 14, 2009
- LAM RESEARCH CORPORATION
- S. M. Reza Sadjadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK TRIMMING
- Publication number 20090050271
- Publication date Feb 26, 2009
- LAM RESEARCH CORPORATION
- Supriya Goyal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK TRIMMING WITH ARL ETCH
- Publication number 20090050603
- Publication date Feb 26, 2009
- LAM RESEARCH CORPORATION
- Dongho Heo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC ENHANCEMENT FOR MECHANICAL CONFINEMENT OF PLASMA
- Publication number 20090041951
- Publication date Feb 12, 2009
- LAM RESEARCH CORPORATION
- Douglas L. Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of sputtering a protective coating on a semiconductor subs...
- Publication number 20090020417
- Publication date Jan 22, 2009
- Jisoo Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GLUE LAYER FOR HYDROFLUOROCARBON ETCH
- Publication number 20080146032
- Publication date Jun 19, 2008
- Lam Research Corporation
- Ji Soo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Removable spacer
- Publication number 20080111166
- Publication date May 15, 2008
- Lam Research Corporation
- Ji Soo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DE-FLUORIDATION PROCESS
- Publication number 20080083502
- Publication date Apr 10, 2008
- LAM RESEARCH CORPORATION
- Dongho Heo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Infinitely selective photoresist mask etch
- Publication number 20070193973
- Publication date Aug 23, 2007
- Lam Research Corporation
- Ji Soo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-ALIGNED PITCH REDUCTION
- Publication number 20070122977
- Publication date May 31, 2007
- Lam Research Corporation
- Ji Soo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Self-aligned pitch reduction
- Publication number 20070123053
- Publication date May 31, 2007
- Lam Research Corporation
- Jisoo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vertical profile fixing
- Publication number 20070075038
- Publication date Apr 5, 2007
- Lam Research Corporation
- S.M. Reza Sadjadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etch rate uniformity using the independent movement of electrode pi...
- Publication number 20060278339
- Publication date Dec 14, 2006
- Lam Research Corporation, a Delaware Corporation
- Jisoo Kim
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Showerhead having a detachable high resistivity gas distribution plate

Showerhead having a detachable high resistivity gas distribution plate

High aspect ratio etch

Showerhead having a detachable high resistivity gas distribution plate

Apparatus for the deposition of a conformal film on a substrate and...

Methods for etching materials used in MRAM applications

Mask trimming

Vacuum processing chambers incorporating a moveable flow equalizer

Critical dimension reduction and roughness control

Pitch reduction using oxide spacer

Apparatus for the deposition of a conformal film on a substrate and...

Plasma process with photoresist mask pretreatment

Critical dimension reduction and roughness control

De-fluoridation process

Infinitely selective photoresist mask etch

Glue layer for hydrofluorocarbon etch

Mask trimming

Magnetic enhancement for mechanical confinement of plasma

Mask trimming with ARL etch

Sidewall forming processes

Critical dimension reduction and roughness control

Vertical profile fixing

Electrically enhancing the confinement of plasma

Methods of sputtering a protective coating on a semiconductor subst...

Self-aligned pitch reduction

Etch with striation control

Removable spacer

Magnetic enhancement for mechanical confinement of plasma

Etch with photoresist mask

Self-aligned pitch reduction

Patents Applicationslast 30 patents

FLAT BOTTOM SHADOW RING

MULTI-LOCATION GAS INJECTION TO IMPROVE UNIFORMITY IN RAPID ALTERNA...

SHOWERHEAD HAVING A DETACHABLE HIGH RESISTIVITY GAS DISTRIBUTION PLATE

SHOWERHEAD HAVING A DETACHABLE HIGH RESISTIVITY GAS DISTRIBUTION PLATE

HIGH ASPECT RATIO ETCH

SHOWERHEAD HAVING A DETACHABLE HIGH RESISTIVITY GAS DISTRIBUTION PLATE

PATTERNING OF MAGNETIC TUNNEL JUNCTION (MTJ) FILM STACKS

METHODS FOR ETCHING MATERIALS USED IN MRAM APPLICATIONS

APPARATUS FOR THE DEPOSITION OF A CONFORMAL FILM ON A SUBSTRATE AND...

CRITICAL DIMENSION REDUCTION AND ROUGHNESS CONTROL

PITCH REDUCTION USING OXIDE SPACER

MASK TRIMMING

VACUUM PROCESSING CHAMBERS INCORPORATING A MOVEABLE FLOW EQUALIZER

CRITICAL DIMENSION REDUCTION AND ROUGHNESS CONTROL

SIDEWALL FORMING PROCESSES

PLASMA PROCESS WITH PHOTORESIST MASK PRETREATMENT

ELECTRICALLY ENHANCING THE CONFINEMENT OF PLASMA

ETCH WITH STRIATION CONTROL

MASK TRIMMING

MASK TRIMMING WITH ARL ETCH

MAGNETIC ENHANCEMENT FOR MECHANICAL CONFINEMENT OF PLASMA

Methods of sputtering a protective coating on a semiconductor subs...

GLUE LAYER FOR HYDROFLUOROCARBON ETCH

Removable spacer

DE-FLUORIDATION PROCESS

Infinitely selective photoresist mask etch

SELF-ALIGNED PITCH REDUCTION

Self-aligned pitch reduction

Vertical profile fixing

Etch rate uniformity using the independent movement of electrode pi...