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Ossining, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method to increase tensile stress of silicon nitride films using a...
Patent number
8,753,989
Issue date
Jun 17, 2014
Applied Materials, Inc.
Mihaela Balseanu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method to increase tensile stress of silicon nitride films using a...
Patent number
8,129,290
Issue date
Mar 6, 2012
Applied Materials, Inc.
Mihaela Balseanu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integration process for fabricating stressed transistor structure
Patent number
7,566,655
Issue date
Jul 28, 2009
Applied Materials, Inc.
Mihaela Balseanu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Advanced low dielectric constant organosilicon plasma chemical vapo...
Patent number
7,494,938
Issue date
Feb 24, 2009
International Business Machines Corporation
Son V. Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Advanced low dielectric constant organosilicon plasma chemical vapo...
Patent number
7,202,564
Issue date
Apr 10, 2007
International Business Machines Corporation
Son Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reliable low-k interconnect structure with hybrid dielectric
Patent number
7,135,398
Issue date
Nov 14, 2006
International Business Machines Corporation
John A. Fitzsimmons
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of depositing dielectric films
Patent number
7,117,064
Issue date
Oct 3, 2006
Applied Materials, Inc.
Srinivas D Nemani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Low-k interlevel dielectric layer (ILD)
Patent number
7,009,280
Issue date
Mar 7, 2006
International Business Machines Corporation
Matthew Angyal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing dielectric films
Patent number
7,001,850
Issue date
Feb 21, 2006
Applied Materials Inc.
Srinivas D Nemani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Advanced BEOL interconnect structures with low-k PE CVD cap layer a...
Patent number
6,939,797
Issue date
Sep 6, 2005
International Business Machines Corporation
Edward Barth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reliable low-k interconnect structure with hybrid dielectric
Patent number
6,917,108
Issue date
Jul 12, 2005
International Business Machines Corporation
John A. Fitzsimmons
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluorine-containing layers for damascene structures
Patent number
6,777,171
Issue date
Aug 17, 2004
Applied Materials, Inc.
Ping Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing dielectric films
Patent number
6,764,958
Issue date
Jul 20, 2004
Applied Materials Inc.
Srinivas D Nemani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Advanced BEOL interconnect structures with low-k PE CVD cap layer a...
Patent number
6,737,747
Issue date
May 18, 2004
International Business Machines Corporation
Edward Barth
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD TO INCREASE TENSILE STRESS OF SILICON NITRIDE FILMS USING A...
Publication number
20120196452
Publication date
Aug 2, 2012
Applied Materials, Inc.
Mihaela Balseanu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GRADIENT DEPOSITION OF LOW-K CVD MATERIALS
Publication number
20090026587
Publication date
Jan 29, 2009
International Business Machines Corporation
Matthew Angyal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ADVANCED LOW DIELECTRIC CONSTANT ORGANOSILICON PLASMA CHEMICAL VAPO...
Publication number
20070128882
Publication date
Jun 7, 2007
International Business Machines Corporation
Son V. Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Integration process for fabricating stressed transistor structure
Publication number
20060270217
Publication date
Nov 30, 2006
Applied Materials, Inc.
Mihaela Balseanu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method to increase tensile stress of silicon nitride films using a...
Publication number
20060269693
Publication date
Nov 30, 2006
Applied Materials, Inc.
Mihaela Balseanu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ADVANCED LOW DIELECTRIC CONSTANT ORGANOSILICON PLASMA CHEMICAL VAPO...
Publication number
20060183345
Publication date
Aug 17, 2006
International Business Machines Corporation
Son Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of depositing dielectric films
Publication number
20060141805
Publication date
Jun 29, 2006
APPLIED MATERIALS, INC.
Srinivas D. Nemani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW-K INTERLEVEL DIELECTRIC LAYER (ILD) AND METHOD
Publication number
20050242414
Publication date
Nov 3, 2005
International Business Machines Corporation
Matthew Angyal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Process for removing impurities from low dielectric constant films...
Publication number
20050087490
Publication date
Apr 28, 2005
International Business Machines Corporation
Mark S. Chace
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Reliable low-k interconnect structure with hybrid dielectric
Publication number
20050023693
Publication date
Feb 3, 2005
John A. Fitzsimmons
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of depositing dielectric films
Publication number
20050020048
Publication date
Jan 27, 2005
Srinivas D. Nemani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Advanced BEOL interconnect structures with low-k PE CVD cap layer a...
Publication number
20040173908
Publication date
Sep 9, 2004
Edward Barth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Reliable low-k interconnect structure with hybrid dielectric
Publication number
20040094839
Publication date
May 20, 2004
International Business Machines Corporation
John A. Fitzsimmons
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Advanced BEOL interconnect structures with low-k PE CVD cap layer a...
Publication number
20030132510
Publication date
Jul 17, 2003
International Business Machines Corporation
Edward Barth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integration scheme for advanced BEOL metallization including low-k...
Publication number
20030134495
Publication date
Jul 17, 2003
International Business Machines Corporation
Stephen Gates
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fluorine-containing layers for damascene structures
Publication number
20020155386
Publication date
Oct 24, 2002
APPLIED MATERIALS, INC.
Ping Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...