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Jin-Yiing Song
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Hsinchu, TW
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Patents Grants
last 30 patents
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Patent Grant
Method to reduce dishing and erosion in a CMP process
Patent number
6,919,276
Issue date
Jul 19, 2005
Taiwan Semiconductor Manufacturing Co., Ltd
Shen-Nan Lee
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Metal line formation using advaced CMP slurry
Publication number
20080265416
Publication date
Oct 30, 2008
Shen-Nan Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method to reduce dishing and erosion in a CMP process
Publication number
20040214442
Publication date
Oct 28, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Shen-Nan Lee
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD FOR FORMING A HYDROPHILIC SURFACE ON LOW-K DIELECTRIC INSULA...
Publication number
20040018748
Publication date
Jan 29, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsin-Hsien Lu
H01 - BASIC ELECTRIC ELEMENTS