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Jiong Chen
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Beverly, MA, US
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last 30 patents
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Patent Grant
Method to operate GEF4 gas in hot cathode discharge ion sources
Patent number
6,215,125
Issue date
Apr 10, 2001
International Business Machines Corporation
Jiong Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Toroidal filament for plasma generation
Patent number
6,204,508
Issue date
Mar 20, 2001
Axcelis Technologies, Inc.
Jiong Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dosimetry cup charge collection in plasma immersion ion implantation
Patent number
6,050,218
Issue date
Apr 18, 2000
Eaton Corporation
Jiong Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
System and method for neutralizing an ion beam using water vapor
Patent number
5,814,819
Issue date
Sep 29, 1998
Eaton Corporation
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for ion beam neutralization
Patent number
5,703,375
Issue date
Dec 30, 1997
Eaton Corporation
Jiong Chen
H01 - BASIC ELECTRIC ELEMENTS