Jiri Pecen

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for in-situ monitoring of thickness during che...
- Patent number 6,621,584
- Issue date Sep 16, 2003
- Lam Research Corporation
- Jiri Pecen
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for in-situ end-point detection and optimizati...
- Patent number 6,261,155
- Issue date Jul 17, 2001
- Lam Research Corporation
- Rahul Jairath
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer polishing device with movable window
- Patent number 6,254,459
- Issue date Jul 3, 2001
- Lam Research Corporation
- Rajeev Bajaj
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for in-situ end-point detection and optimizati...
- Patent number 6,146,248
- Issue date Nov 14, 2000
- Lam Research Corporation
- Rahul Jairath
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for in-situ monitoring of thickness using a mu...
- Patent number 6,111,634
- Issue date Aug 29, 2000
- Lam Research Corporation
- Jiri Pecen
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for in-situ monitoring of thickness during che...
- Patent number 6,108,091
- Issue date Aug 22, 2000
- Lam Research Corporation
- Jiri Pecen
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer polishing device with movable window
- Patent number 6,068,539
- Issue date May 30, 2000
- Lam Research Corporation
- Rajeev Bajaj
- B24 - GRINDING POLISHING
Information Patent Grant
Position location in surface scanning using interval timing between...
- Patent number 5,083,035
- Issue date Jan 21, 1992
- Tencor Instruments
- Jiri Pecen
- G02 - OPTICS
Information Patent Grant
Particle detection method including comparison between sequential s...
- Patent number 4,766,324
- Issue date Aug 23, 1988
- Tencor Instruments
- Soheil Saadat
- G01 - MEASURING TESTING
Information Patent Grant
Particle position correlator and correlation method for a surface s...
- Patent number 4,641,967
- Issue date Feb 10, 1987
- Tencor Instruments
- Jiri Pecen
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for calibrating a surface scanner
- Patent number 4,512,659
- Issue date Apr 23, 1985
- Tencor Instruments
- Lee K. Galbraith
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for in-situ monitoring of thickness during che...
- Publication number 20020089676
- Publication date Jul 11, 2002
- Jiri Pecen
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Method and apparatus for in-situ monitoring of thickness during che...

Method and apparatus for in-situ end-point detection and optimizati...

Wafer polishing device with movable window

Method and apparatus for in-situ end-point detection and optimizati...

Method and apparatus for in-situ monitoring of thickness using a mu...

Method and apparatus for in-situ monitoring of thickness during che...

Wafer polishing device with movable window

Position location in surface scanning using interval timing between...

Particle detection method including comparison between sequential s...

Particle position correlator and correlation method for a surface s...

Apparatus for calibrating a surface scanner

Patents Applicationslast 30 patents

Method and apparatus for in-situ monitoring of thickness during che...