Joachim Stuehler

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination system and projection objective of a mask inspection a...
- Patent number 10,114,293
- Issue date Oct 30, 2018
- Carl Zeiss SMT GmbH
- Heiko Feldmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure system for microlithography with a measurement...
- Patent number 10,042,271
- Issue date Aug 7, 2018
- Carl Zeiss SMT GmbH
- Ulrich Mueller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure system for microlithography with a measurement...
- Patent number 9,696,639
- Issue date Jul 4, 2017
- Carl Zeiss SMT GmbH
- Ulrich Mueller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure system for microlithography with a measurement...
- Patent number 9,001,304
- Issue date Apr 7, 2015
- Carl Zeiss SMT GmbH
- Ulrich Mueller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Beam control apparatus for an illumination beam and metrology syste...
- Patent number 8,988,752
- Issue date Mar 24, 2015
- Carl Zeiss SMT GmbH
- Marten Krebs
- G02 - OPTICS
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 8,836,929
- Issue date Sep 16, 2014
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 8,120,763
- Issue date Feb 21, 2012
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for range-resolved determination of scattered lig...
- Patent number 7,755,748
- Issue date Jul 13, 2010
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for the range-resolved determination of scattered light, ope...
- Patent number 7,408,631
- Issue date Aug 5, 2008
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 7,408,652
- Issue date Aug 5, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Moire method and measuring system for measuring the distortion of a...
- Patent number 7,019,824
- Issue date Mar 28, 2006
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT...
- Publication number 20190129318
- Publication date May 2, 2019
- Carl Zeiss SMT GMBH
- Ulrich Mueller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT...
- Publication number 20180024445
- Publication date Jan 25, 2018
- Carl Zeiss SMT GMBH
- Ulrich Mueller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT...
- Publication number 20150212431
- Publication date Jul 30, 2015
- Carl Zeiss SMT GMBH
- Ulrich Mueller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20140022524
- Publication date Jan 23, 2014
- Carl Zeiss SMT GMBH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BEAM CONTROL APPARATUS FOR AN ILLUMINATION BEAM AND METROLOGY SYSTE...
- Publication number 20130120820
- Publication date May 16, 2013
- Carl Zeiss SMT GMBH
- Marten Krebs
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM AND PROJECTION OBJECTIVE OF A MASK INSPECTION A...
- Publication number 20130038850
- Publication date Feb 14, 2013
- CARL ZEISS SMT GMBH
- Heiko Feldmann
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20120113429
- Publication date May 10, 2012
- Carl Zeiss SMT GMBH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT...
- Publication number 20110013171
- Publication date Jan 20, 2011
- Carl Zeiss SMT AG
- Ulrich Mueller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20090257049
- Publication date Oct 15, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20090021726
- Publication date Jan 22, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR RANGE-RESOLVED DETERMINATION OF SCATTERED LIG...
- Publication number 20080285018
- Publication date Nov 20, 2008
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY HAVING A RADIATION DE...
- Publication number 20080128643
- Publication date Jun 5, 2008
- Carl Zeiss SMT AG
- Ulrich Mueller
- B82 - NANO-TECHNOLOGY
Information Patent Application
Device for the range-resolved determination of scattered light, ope...
- Publication number 20050264819
- Publication date Dec 1, 2005
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device and method for the optical measurement of an optical system,...
- Publication number 20050243328
- Publication date Nov 3, 2005
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Moire method and measuring system for measuring the distortion of a...
- Publication number 20050122506
- Publication date Jun 9, 2005
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Joachim Stuehler

Person

Patents Grantslast 30 patents

Illumination system and projection objective of a mask inspection a...

Projection exposure system for microlithography with a measurement...

Projection exposure system for microlithography with a measurement...

Projection exposure system for microlithography with a measurement...

Beam control apparatus for an illumination beam and metrology syste...

Device and method for the optical measurement of an optical system...

Device and method for the optical measurement of an optical system...

Device and method for range-resolved determination of scattered lig...

Device for the range-resolved determination of scattered light, ope...

Device and method for the optical measurement of an optical system...

Moire method and measuring system for measuring the distortion of a...

Patents Applicationslast 30 patents

PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT...

PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT...

PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

BEAM CONTROL APPARATUS FOR AN ILLUMINATION BEAM AND METROLOGY SYSTE...

ILLUMINATION SYSTEM AND PROJECTION OBJECTIVE OF A MASK INSPECTION A...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

DEVICE AND METHOD FOR RANGE-RESOLVED DETERMINATION OF SCATTERED LIG...

PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY HAVING A RADIATION DE...

Device for the range-resolved determination of scattered light, ope...

Device and method for the optical measurement of an optical system,...

Moire method and measuring system for measuring the distortion of a...