Johannes Ruoff

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Imaging optical arrangement to image an object illuminated by X-rays
- Patent number 12,040,103
- Issue date Jul 16, 2024
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method to acquire a 3D image of a sample structure
- Patent number 11,935,228
- Issue date Mar 19, 2024
- Carl Zeiss SMT GmbH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and device for characterizing the surface shape of an optica...
- Patent number 11,927,500
- Issue date Mar 12, 2024
- Carl Zeiss SMT GmbH
- Steffen Siegler
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for characterizing a microlithographic mask
- Patent number 11,914,303
- Issue date Feb 27, 2024
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection system for X-ray inspection of an object
- Patent number 11,817,231
- Issue date Nov 14, 2023
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Imaging optical unit for EUV microlithography
- Patent number 11,422,470
- Issue date Aug 23, 2022
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system for transferring original structure portions of a li...
- Patent number 11,137,688
- Issue date Oct 5, 2021
- Carl Zeiss SMT GmbH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optical unit for imaging an object field into an image field
- Patent number 11,119,413
- Issue date Sep 14, 2021
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for three-dimensionally measuring a 3D aerial image of a lit...
- Patent number 10,634,886
- Issue date Apr 28, 2020
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G02 - OPTICS
Information Patent Grant
Imaging optical unit for a metrology system for examining a lithogr...
- Patent number 10,606,048
- Issue date Mar 31, 2020
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Grant
Projection lens, projection exposure apparatus and projection expos...
- Patent number 10,591,825
- Issue date Mar 17, 2020
- Carl Zeiss SMT GmbH
- Stephan Andre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for examining an element of a photolithographi...
- Patent number 10,386,297
- Issue date Aug 20, 2019
- Carl Zeiss SMT GmbH
- Jörg Frederik Blumrich
- G01 - MEASURING TESTING
Information Patent Grant
Device for optical examination of a specimen, method for examining...
- Patent number 10,345,570
- Issue date Jul 9, 2019
- Carl Zeiss Microscopy GmbH
- Wolfgang Singer
- G02 - OPTICS
Information Patent Grant
Mirror and related EUV systems and methods
- Patent number 10,274,649
- Issue date Apr 30, 2019
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Grant
Imaging optical unit for EUV projection lithography
- Patent number 10,191,386
- Issue date Jan 29, 2019
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Grant
Method for three-dimensionally measuring a 3D aerial image of a lit...
- Patent number 10,068,325
- Issue date Sep 4, 2018
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection lens, projection exposure apparatus and projection expos...
- Patent number 10,048,592
- Issue date Aug 14, 2018
- Carl Zeiss SMT GmbH
- Stephan Andre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV light source for generating a usable output beam for a projecti...
- Patent number 9,955,563
- Issue date Apr 24, 2018
- Carl Zeiss SMT GmbH
- Ingo Saenger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure method and projection exposure apparatus
- Patent number 9,933,710
- Issue date Apr 3, 2018
- Carl Zeiss SMT GmbH
- Stephan Andre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optical unit for EUV projection lithography
- Patent number 9,835,953
- Issue date Dec 5, 2017
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for compensating at least one defect of an opt...
- Patent number 9,798,249
- Issue date Oct 24, 2017
- Carl Zeiss SMT GmbH
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system of a microlithographic projection exposure apparatus...
- Patent number 9,785,052
- Issue date Oct 10, 2017
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror
- Patent number 9,678,439
- Issue date Jun 13, 2017
- Carl Zeiss SMT GmbH
- Ingo Saenger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement of a mirror
- Patent number 9,658,533
- Issue date May 23, 2017
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Collector
- Patent number 9,645,503
- Issue date May 9, 2017
- Carl Zeiss SMT GmbH
- Ingo Saenger
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imaging catoptric EUV projection optical unit
- Patent number 9,639,005
- Issue date May 2, 2017
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optical unit for EUV projection lithography
- Patent number 9,625,827
- Issue date Apr 18, 2017
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for an EUV lithography device and facet mirror...
- Patent number 9,551,941
- Issue date Jan 24, 2017
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask for EUV lithography, EUV lithography system and method for opt...
- Patent number 9,535,332
- Issue date Jan 3, 2017
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Illumination optical unit for projection lithography
- Patent number 9,507,269
- Issue date Nov 29, 2016
- Carl Zeiss SMT GmbH
- Christoph Hennerkes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20240152057
- Publication date May 9, 2024
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL SYSTEM, IN PARTICULAR FOR CHARACTERIZING A MICROLITHOGRAPHY...
- Publication number 20230221571
- Publication date Jul 13, 2023
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G02 - OPTICS
Information Patent Application
METHOD TO ACQUIRE A 3D IMAGE OF A SAMPLE STRUCTURE
- Publication number 20230127194
- Publication date Apr 27, 2023
- Carl Zeiss SMT GmbH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETECTION SYSTEM FOR X-RAY INSPECTION OF AN OBJECT
- Publication number 20230046280
- Publication date Feb 16, 2023
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G01 - MEASURING TESTING
Information Patent Application
IMAGING OPTICAL ARRANGEMENT TO IMAGE AN OBJECT ILLUMINATED BY X-RAYS
- Publication number 20230050439
- Publication date Feb 16, 2023
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING THE SURFACE SHAPE OF AN OPTICA...
- Publication number 20220236139
- Publication date Jul 28, 2022
- Carl Zeiss SMT GMBH
- Steffen SIEGLER
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20210397099
- Publication date Dec 23, 2021
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM FOR TRANSFERRING ORIGINAL STRUCTURE PORTIONS OF A LI...
- Publication number 20210055661
- Publication date Feb 25, 2021
- Carl Zeiss SMT GMBH
- Michael PATRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING OPTICAL UNIT FOR EUV MICROLITHOGRAPHY
- Publication number 20200348602
- Publication date Nov 5, 2020
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIELD
- Publication number 20200218045
- Publication date Jul 9, 2020
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Application
Projection Lens, Projection Exposure Apparatus and Projection Expos...
- Publication number 20180364583
- Publication date Dec 20, 2018
- Carl Zeiss SMT GMBH
- Stephan Andre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...
- Publication number 20180357758
- Publication date Dec 13, 2018
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGING OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY
- Publication number 20180164690
- Publication date Jun 14, 2018
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR EXAMINING AN ELEMENT OF A PHOTOLITHOGRAPHI...
- Publication number 20180164207
- Publication date Jun 14, 2018
- Carl Zeiss SMT GMBH
- Jörg Frederik Blumrich
- G01 - MEASURING TESTING
Information Patent Application
IMAGING OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY
- Publication number 20170307982
- Publication date Oct 26, 2017
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS
- Publication number 20170285493
- Publication date Oct 5, 2017
- Carl Zeiss SMT GMBH
- Stephan Andre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION LENS, PROJECTION EXPOSURE APPARATUS AND PROJECTION EXPOS...
- Publication number 20170168399
- Publication date Jun 15, 2017
- Carl Zeiss SMT GMBH
- Stephan Andre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...
- Publication number 20170132782
- Publication date May 11, 2017
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL UNIT FOR A METROLOGY SYSTEM FOR EXAMINING A LITHOGR...
- Publication number 20170131528
- Publication date May 11, 2017
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Application
Device for optical examination of a specimen, method for examining...
- Publication number 20170123198
- Publication date May 4, 2017
- CARL ZEISS MICROSCOPY GMBH
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY
- Publication number 20160147158
- Publication date May 26, 2016
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR AN EUV LITHOGRAPHY DEVICE AND FACET MIRROR...
- Publication number 20160004164
- Publication date Jan 7, 2016
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR OPERATING A PROJECTION EXPOSURE APPARATUS WITH CORRECTIO...
- Publication number 20150234289
- Publication date Aug 20, 2015
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV LIGHT SOURCE FOR GENERATING A USABLE OUTPUT BEAM FOR A PROJECTI...
- Publication number 20150173163
- Publication date Jun 18, 2015
- Carl Zeiss SMT GMBH
- Ingo Saenger
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
MIRROR
- Publication number 20150160561
- Publication date Jun 11, 2015
- Carl Zeiss SMT GMBH
- Ingo Saenger
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR COMPENSATING AT LEAST ONE DEFECT OF AN OPT...
- Publication number 20140347646
- Publication date Nov 27, 2014
- Vladimir Dmitriev
- G02 - OPTICS
Information Patent Application
ARRANGEMENT OF A MIRROR
- Publication number 20140240686
- Publication date Aug 28, 2014
- Johannes Ruoff
- B82 - NANO-TECHNOLOGY
Information Patent Application
COLLECTOR
- Publication number 20140192339
- Publication date Jul 10, 2014
- Ingo Saenger
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMAGING CATOPTRIC EUV PROJECTION OPTICAL UNIT
- Publication number 20140176928
- Publication date Jun 26, 2014
- Johannes Ruoff
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS...
- Publication number 20140132942
- Publication date May 15, 2014
- Ingo Saenger
- G02 - OPTICS

Johannes Ruoff

Person

Patents Grantslast 30 patents

Imaging optical arrangement to image an object illuminated by X-rays

Method to acquire a 3D image of a sample structure

Method and device for characterizing the surface shape of an optica...

Apparatus and method for characterizing a microlithographic mask

Detection system for X-ray inspection of an object

Imaging optical unit for EUV microlithography

Optical system for transferring original structure portions of a li...

Imaging optical unit for imaging an object field into an image field

Method for three-dimensionally measuring a 3D aerial image of a lit...

Imaging optical unit for a metrology system for examining a lithogr...

Projection lens, projection exposure apparatus and projection expos...

Method and apparatus for examining an element of a photolithographi...

Device for optical examination of a specimen, method for examining...

Mirror and related EUV systems and methods

Imaging optical unit for EUV projection lithography

Method for three-dimensionally measuring a 3D aerial image of a lit...

Projection lens, projection exposure apparatus and projection expos...

EUV light source for generating a usable output beam for a projecti...

Projection exposure method and projection exposure apparatus

Imaging optical unit for EUV projection lithography

Method and apparatus for compensating at least one defect of an opt...

Optical system of a microlithographic projection exposure apparatus...

Mirror

Arrangement of a mirror

Collector

Imaging catoptric EUV projection optical unit

Imaging optical unit for EUV projection lithography

Illumination system for an EUV lithography device and facet mirror...

Mask for EUV lithography, EUV lithography system and method for opt...

Illumination optical unit for projection lithography

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

OPTICAL SYSTEM, IN PARTICULAR FOR CHARACTERIZING A MICROLITHOGRAPHY...

METHOD TO ACQUIRE A 3D IMAGE OF A SAMPLE STRUCTURE

DETECTION SYSTEM FOR X-RAY INSPECTION OF AN OBJECT

IMAGING OPTICAL ARRANGEMENT TO IMAGE AN OBJECT ILLUMINATED BY X-RAYS

METHOD AND DEVICE FOR CHARACTERIZING THE SURFACE SHAPE OF AN OPTICA...

APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

OPTICAL SYSTEM FOR TRANSFERRING ORIGINAL STRUCTURE PORTIONS OF A LI...

IMAGING OPTICAL UNIT FOR EUV MICROLITHOGRAPHY

IMAGING OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIELD

Projection Lens, Projection Exposure Apparatus and Projection Expos...

METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...

IMAGING OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY

METHOD AND APPARATUS FOR EXAMINING AN ELEMENT OF A PHOTOLITHOGRAPHI...

IMAGING OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY

PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS

PROJECTION LENS, PROJECTION EXPOSURE APPARATUS AND PROJECTION EXPOS...

METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...

IMAGING OPTICAL UNIT FOR A METROLOGY SYSTEM FOR EXAMINING A LITHOGR...

Device for optical examination of a specimen, method for examining...

IMAGING OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY

ILLUMINATION SYSTEM FOR AN EUV LITHOGRAPHY DEVICE AND FACET MIRROR...

METHOD FOR OPERATING A PROJECTION EXPOSURE APPARATUS WITH CORRECTIO...

EUV LIGHT SOURCE FOR GENERATING A USABLE OUTPUT BEAM FOR A PROJECTI...

MIRROR

METHOD AND APPARATUS FOR COMPENSATING AT LEAST ONE DEFECT OF AN OPT...

ARRANGEMENT OF A MIRROR

COLLECTOR

IMAGING CATOPTRIC EUV PROJECTION OPTICAL UNIT

OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS...