John Drewery

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 12,087,561
- Issue date Sep 10, 2024
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Synchronization of RF generators
- Patent number 12,046,450
- Issue date Jul 23, 2024
- Lam Research Corporation
- Ying Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Voltage transient detector and current transient detector
- Patent number 12,040,605
- Issue date Jul 16, 2024
- Lam Research Corporation
- John Pease
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Systems and methods for compensating for RF power loss
- Patent number 12,002,653
- Issue date Jun 4, 2024
- Lam Research Corporation
- Mathew Dennis Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for reverse pulsing
- Patent number 11,798,785
- Issue date Oct 24, 2023
- Lam Research Corporation
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 11,710,623
- Issue date Jul 25, 2023
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Air cooled faraday shield and methods for using the same
- Patent number 11,692,732
- Issue date Jul 4, 2023
- Lam Research Corporation
- Saravanapriyan Sriraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooling for a plasma-based reactor
- Patent number 11,676,798
- Issue date Jun 13, 2023
- Lam Research Corporation
- John Stephen Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for advanced ion control for etching processes
- Patent number 11,049,726
- Issue date Jun 29, 2021
- Lam Research Corporation
- Zhongkui Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 11,031,215
- Issue date Jun 8, 2021
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery system
- Patent number 10,957,561
- Issue date Mar 23, 2021
- Lam Research Corporation
- John Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated atomic layer passivation in TCP etch chamber and in-situ...
- Patent number 10,950,454
- Issue date Mar 16, 2021
- Lam Research Corporation
- Xiang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for advanced ion control for etching processes
- Patent number 10,943,789
- Issue date Mar 9, 2021
- Lam Research Corporation
- Zhongkui Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF voltage sensor incorporating multiple voltage dividers for detec...
- Patent number 10,784,083
- Issue date Sep 22, 2020
- Lam Research Corporation
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air cooled faraday shield and methods for using the same
- Patent number 10,690,374
- Issue date Jun 23, 2020
- Lam Research Corporation
- Saravanapriyan Sriraman
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Systems and methods for applying frequency and match tuning in a no...
- Patent number 10,679,825
- Issue date Jun 9, 2020
- Lam Research Corporation
- Ying Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hollow RF feed with coaxial DC power feed
- Patent number 10,153,136
- Issue date Dec 11, 2018
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Large dynamic range RF voltage sensor and method for voltage mode R...
- Patent number 10,121,641
- Issue date Nov 6, 2018
- Lam Research Corporation
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Time multiplexed chemical delivery system
- Patent number 9,934,956
- Issue date Apr 3, 2018
- Lam Research Corporation
- John Drewery
- G05 - CONTROLLING REGULATING
Information Patent Grant
Air cooled faraday shield and methods for using the same
- Patent number 9,885,493
- Issue date Feb 6, 2018
- Lam Research Corporation
- Saravanapriyan Sriraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for advanced ion control for etching processes
- Patent number 9,824,896
- Issue date Nov 21, 2017
- Lam Research Corporation
- Zhongkui Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for reverse pulsing
- Patent number 9,761,459
- Issue date Sep 12, 2017
- Lam Research Corporation
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch process with pre-etch transient conditioning
- Patent number 9,607,848
- Issue date Mar 28, 2017
- Lam Research Corporation
- Wonchul Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for reverse pulsing
- Patent number 9,583,357
- Issue date Feb 28, 2017
- Lam Research Corporation
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal Faraday shield having distributed chevron patterns and cor...
- Patent number 9,490,106
- Issue date Nov 8, 2016
- Lam Research Corporation
- John Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Track and hold feedback control of pulsed RF
- Patent number 9,336,901
- Issue date May 10, 2016
- Lam Research Corporation
- John Drewery
- G11 - INFORMATION STORAGE
Information Patent Grant
Faraday shield having plasma density decoupling structure between T...
- Patent number 9,293,353
- Issue date Mar 22, 2016
- Lam Research Corporation
- Maolin Long
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Etch process with pre-etch transient conditioning
- Patent number 9,257,296
- Issue date Feb 9, 2016
- Lam Research Corporation
- Wonchul Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch process with pre-etch transient conditioning
- Patent number 9,142,417
- Issue date Sep 22, 2015
- Lam Research Corporation
- Wonchul Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate clamping system and method for operating the same
- Patent number 9,076,831
- Issue date Jul 7, 2015
- Lam Research Corporation
- John Drewery
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYNCHRONIZATION OF RF GENERATORS
- Publication number 20240331976
- Publication date Oct 3, 2024
- LAM RESEARCH CORPORATION
- Ying Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Voltage Transient Detector and Current Transient Detector
- Publication number 20240332943
- Publication date Oct 3, 2024
- LAM RESEARCH CORPORATION
- John Pease
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SYSTEMS AND METHODS FOR COMPENSATING FOR RF POWER LOSS
- Publication number 20240290579
- Publication date Aug 29, 2024
- LAM RESEARCH CORPORATION
- Mathew Dennis Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR REVERSE PULSING
- Publication number 20240030000
- Publication date Jan 25, 2024
- LAM RESEARCH CORPORATION
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20230317437
- Publication date Oct 5, 2023
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING FOR A PLASMA-BASED REACTOR
- Publication number 20230274912
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLLING TEMPERATURE PROFILES OF PLASMA CHAMBER COMPONENTS USING...
- Publication number 20230274919
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- John DREWERY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYNCHRONIZATION OF RF GENERATORS
- Publication number 20230274913
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Ying Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DOOR ASSEMBLIES WITH RADIATING ELEMENTS FOR SUBS...
- Publication number 20230253217
- Publication date Aug 10, 2023
- LAM RESEARCH CORPORATION
- John DREWERY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID LIQUID/AIR COOLING SYSTEM FOR TCP WINDOWS
- Publication number 20230245854
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Andrea ALBERTI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Voltage Transient Detector and Current Transient Detector
- Publication number 20230246433
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- John Pease
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SYNCHRONIZATION OF RF PULSING SCHEMES AND OF SENSOR DATA COLLECTION
- Publication number 20230230805
- Publication date Jul 20, 2023
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EVAPORATIVE COOLING OF ELECTROSTATIC CHUCKS
- Publication number 20230178344
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- John DREWERY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED CLOSED LOOP GAS BASED HEAT EXCHANGE
- Publication number 20230170227
- Publication date Jun 1, 2023
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Controlling Radiofrequency Pulse-Initiation...
- Publication number 20230154728
- Publication date May 18, 2023
- LAM RESEARCH CORPORATION
- Ying Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER WITH DUAL-LIFT MECHANISM FOR EDGE...
- Publication number 20220415702
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR COMPENSATING FOR RF POWER LOSS
- Publication number 20220238307
- Publication date Jul 28, 2022
- LAM RESEARCH CORPORATION
- Mathew Dennis Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR MULTI-LEVEL PULSING IN RF PLASMA TOOLS
- Publication number 20220216038
- Publication date Jul 7, 2022
- LAM RESEARCH CORPORATION
- Ying Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH SPATIALLY TUNABLE RF COUPLING TO A WAFER
- Publication number 20220199378
- Publication date Jun 23, 2022
- LAM RESEARCH CORPORATION
- John DREWERY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING FOR A PLASMA-BASED REACTOR
- Publication number 20220139671
- Publication date May 5, 2022
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED PROCESS MODULE RING POSITIONING AND REPLACEMENT
- Publication number 20220122878
- Publication date Apr 21, 2022
- LAM RESEARCH CORPORATION
- Joanna Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED ATOMIC LAYER PASSIVATION IN TCP ETCH CHAMBER AND IN-SITU...
- Publication number 20210287909
- Publication date Sep 16, 2021
- LAM RESEARCH CORPORATION
- Xiang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20210257195
- Publication date Aug 19, 2021
- LAM RESEARCH CORPORATION
- John Stephen DREWERY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Systems for Advanced Ion Control for Etching Processes
- Publication number 20210193474
- Publication date Jun 24, 2021
- LAM RESEARCH CORPORATION
- Zhongkui Tan
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Air Cooled Faraday Shield and Methods for Using the Same
- Publication number 20200318852
- Publication date Oct 8, 2020
- LAM RESEARCH CORPORATION
- Saravanapriyan Sriraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20200105509
- Publication date Apr 2, 2020
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Applying Frequency and Match Tuning in a No...
- Publication number 20190148114
- Publication date May 16, 2019
- LAM RESEARCH CORPORATION
- Ying Wu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RF VOLTAGE SENSOR INCORPORATING MULTIPLE VOLTAGE DIVIDERS FOR DETEC...
- Publication number 20190051497
- Publication date Feb 14, 2019
- LAM RESEARCH CORPORATION
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED ATOMIC LAYER PASSIVATION IN TCP ETCH CHAMBER AND IN-SITU...
- Publication number 20190043728
- Publication date Feb 7, 2019
- LAM RESEARCH CORPORATION
- Xiang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Air Cooled Faraday Shield and Methods for Using the Same
- Publication number 20180156489
- Publication date Jun 7, 2018
- LAM RESEARCH CORPORATION
- Saravanapriyan Sriraman
- H01 - BASIC ELECTRIC ELEMENTS

John Drewery

Person

Patents Grantslast 30 patents

Vacuum pump protection against deposition byproduct buildup

Synchronization of RF generators

Voltage transient detector and current transient detector

Systems and methods for compensating for RF power loss

Systems for reverse pulsing

Vacuum pump protection against deposition byproduct buildup

Air cooled faraday shield and methods for using the same

Cooling for a plasma-based reactor

Methods and systems for advanced ion control for etching processes

Vacuum pump protection against deposition byproduct buildup

Gas delivery system

Integrated atomic layer passivation in TCP etch chamber and in-situ...

Methods and systems for advanced ion control for etching processes

RF voltage sensor incorporating multiple voltage dividers for detec...

Air cooled faraday shield and methods for using the same

Systems and methods for applying frequency and match tuning in a no...

Hollow RF feed with coaxial DC power feed

Large dynamic range RF voltage sensor and method for voltage mode R...

Time multiplexed chemical delivery system

Air cooled faraday shield and methods for using the same

Methods and systems for advanced ion control for etching processes

Systems and methods for reverse pulsing

Etch process with pre-etch transient conditioning

Systems and methods for reverse pulsing

Internal Faraday shield having distributed chevron patterns and cor...

Track and hold feedback control of pulsed RF

Faraday shield having plasma density decoupling structure between T...

Etch process with pre-etch transient conditioning

Etch process with pre-etch transient conditioning

Substrate clamping system and method for operating the same

Patents Applicationslast 30 patents

SYNCHRONIZATION OF RF GENERATORS

Voltage Transient Detector and Current Transient Detector

SYSTEMS AND METHODS FOR COMPENSATING FOR RF POWER LOSS

SYSTEMS AND METHODS FOR REVERSE PULSING

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

COOLING FOR A PLASMA-BASED REACTOR

CONTROLLING TEMPERATURE PROFILES OF PLASMA CHAMBER COMPONENTS USING...

SYNCHRONIZATION OF RF GENERATORS

SUBSTRATE TRANSFER DOOR ASSEMBLIES WITH RADIATING ELEMENTS FOR SUBS...

HYBRID LIQUID/AIR COOLING SYSTEM FOR TCP WINDOWS

Voltage Transient Detector and Current Transient Detector

SYNCHRONIZATION OF RF PULSING SCHEMES AND OF SENSOR DATA COLLECTION

EVAPORATIVE COOLING OF ELECTROSTATIC CHUCKS

ENHANCED CLOSED LOOP GAS BASED HEAT EXCHANGE

Methods and Systems for Controlling Radiofrequency Pulse-Initiation...

SEMICONDUCTOR PROCESSING CHAMBER WITH DUAL-LIFT MECHANISM FOR EDGE...

SYSTEMS AND METHODS FOR COMPENSATING FOR RF POWER LOSS

SYSTEMS AND METHODS FOR MULTI-LEVEL PULSING IN RF PLASMA TOOLS

ELECTROSTATIC CHUCK WITH SPATIALLY TUNABLE RF COUPLING TO A WAFER

COOLING FOR A PLASMA-BASED REACTOR

AUTOMATED PROCESS MODULE RING POSITIONING AND REPLACEMENT

INTEGRATED ATOMIC LAYER PASSIVATION IN TCP ETCH CHAMBER AND IN-SITU...

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

Methods and Systems for Advanced Ion Control for Etching Processes

Air Cooled Faraday Shield and Methods for Using the Same

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

Systems and Methods for Applying Frequency and Match Tuning in a No...

RF VOLTAGE SENSOR INCORPORATING MULTIPLE VOLTAGE DIVIDERS FOR DETEC...

INTEGRATED ATOMIC LAYER PASSIVATION IN TCP ETCH CHAMBER AND IN-SITU...

Air Cooled Faraday Shield and Methods for Using the Same