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John E. Rauch
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Poway, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma focus light source with active and buffer gas control
Patent number
6,586,757
Issue date
Jul 1, 2003
Cymer, Inc.
Stephan T. Melnychuk
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Plasma focus light source with tandem ellipsoidal mirror units
Patent number
6,566,668
Issue date
May 20, 2003
Cymer, Inc.
John E. Rauch
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Plasma focus light source with tandem ellipsoidal mirror units
Publication number
20020014599
Publication date
Feb 7, 2002
John E. Rauch
B82 - NANO-TECHNOLOGY
Information
Patent Application
Plasma focus light source with active and buffer gas control
Publication number
20020014598
Publication date
Feb 7, 2002
Stephan T. Melnychuk
B82 - NANO-TECHNOLOGY