TREA

John F. Wengert

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  • Jacksonville, OR, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer support system
    • Patent number 7,655,093
    • Issue date Feb 2, 2010
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 7,186,298
    • Issue date Mar 6, 2007
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,692,576
    • Issue date Feb 17, 2004
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,491,757
    • Issue date Dec 10, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process chamber with downstream getter plate
    • Patent number 6,464,792
    • Issue date Oct 15, 2002
    • ASM America, Inc.
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,454,866
    • Issue date Sep 24, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,343,183
    • Issue date Jan 29, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Long life high temperature process chamber
    • Patent number 6,325,858
    • Issue date Dec 4, 2001
    • ASM America, Inc.
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,203,622
    • Issue date Mar 20, 2001
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,113,702
    • Issue date Sep 5, 2000
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process chamber with inner support
    • Patent number 6,093,252
    • Issue date Jul 25, 2000
    • ASM America, Inc.
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Low-mass susceptor
    • Patent number 6,086,680
    • Issue date Jul 11, 2000
    • ASM America, Inc.
    • Derrick W. Foster
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,053,982
    • Issue date Apr 25, 2000
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    WAFER SUPPORT SYSTEM
    • Publication number 20070131173
    • Publication date Jun 14, 2007
    • ASM AMERICA, INC
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Wafer support system
    • Publication number 20040198153
    • Publication date Oct 7, 2004
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Wafer support system
    • Publication number 20030075274
    • Publication date Apr 24, 2003
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Process chamber with rectangular temperature compensation ring
    • Publication number 20020179586
    • Publication date Dec 5, 2002
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Wafer support system
    • Publication number 20010054390
    • Publication date Dec 27, 2001
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...