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John Hearne
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Los Altos, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Flexible polishing fluid delivery system
Patent number
7,086,933
Issue date
Aug 8, 2006
Applied Materials, Inc.
Lidia Vereen
B24 - GRINDING POLISHING
Information
Patent Grant
Hydraulically actuated wafer clamp
Patent number
6,513,848
Issue date
Feb 4, 2003
Applied Materials, Inc.
Norman Shendon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of drying a substrate by lowering a fluid surface level
Patent number
6,027,574
Issue date
Feb 22, 2000
Applied Materials, Inc.
Boris Fishkin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for drying substrates
Patent number
5,884,640
Issue date
Mar 23, 1999
Applied Materials, Inc.
Boris Fishkin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system
Patent number
5,745,946
Issue date
May 5, 1998
Ontrak Systems, Inc.
David L. Thrasher
B08 - CLEANING
Information
Patent Grant
Contamination control in substrate processing system
Patent number
5,727,332
Issue date
Mar 17, 1998
Ontrak Systems, Inc.
David L. Thrasher
B08 - CLEANING
Information
Patent Grant
Spindle assembly with improved wafer holder
Patent number
5,566,466
Issue date
Oct 22, 1996
Ontrak Systems, Inc.
John S. Hearne
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR CONTROLLING POLISHING FLUID DISTRIBUTION
Publication number
20060246821
Publication date
Nov 2, 2006
Lidia Vereen
B24 - GRINDING POLISHING
Information
Patent Application
Flexible polishing fluid delivery system
Publication number
20030199229
Publication date
Oct 23, 2003
APPLIED MATERIALS, INC.
Lidia Vereen
B24 - GRINDING POLISHING