John Kevin Shugrue

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor processing apparatus and methods for monitoring and c...
- Patent number 12,234,552
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled substrate carrier and polishing components
- Patent number 12,217,979
- Issue date Feb 4, 2025
- Axus Technology, LLC
- Daniel Ray Trojan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Containment and exhaust system for substrate polishing components
- Patent number 12,145,236
- Issue date Nov 19, 2024
- Axus Technology, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Grant
Systems and methods for controlling vapor phase processing
- Patent number 11,891,693
- Issue date Feb 6, 2024
- ASM IP Holding B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multiple temperature range susceptor, assembly, reactor and system...
- Patent number 11,795,545
- Issue date Oct 24, 2023
- ASM IP Holding B.V.
- John Kevin Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus comprising one or more pyrometer...
- Patent number 11,629,406
- Issue date Apr 18, 2023
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for isolating a reaction chamber from a loadi...
- Patent number 11,626,313
- Issue date Apr 11, 2023
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for detecting or monitoring for a chemical precursor in a...
- Patent number 10,975,470
- Issue date Apr 13, 2021
- ASM IP Holding B.V.
- John Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multiple temperature range susceptor, assembly, reactor and system...
- Patent number 10,941,490
- Issue date Mar 9, 2021
- ASM IP Holding B.V.
- John Kevin Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for semiconductor wafer processing
- Patent number 10,900,122
- Issue date Jan 26, 2021
- ASM IP Holding B.V.
- John Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for isolating a reaction chamber from a loadi...
- Patent number 10,872,804
- Issue date Dec 22, 2020
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for isolating a reaction chamber from a loadi...
- Patent number 10,872,803
- Issue date Dec 22, 2020
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for controlling vapor phase processing
- Patent number 10,774,422
- Issue date Sep 15, 2020
- ASM IP Holding B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diaphragm valves, valve components, and methods for forming valve c...
- Patent number 10,767,789
- Issue date Sep 8, 2020
- ASM IP Holding B.V.
- John Shugrue
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Variable conductance gas distribution apparatus and method
- Patent number 10,561,975
- Issue date Feb 18, 2020
- ASM IP Holdings B.V.
- John Kevin Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Variable conductance gas distribution apparatus and method
- Patent number 9,657,845
- Issue date May 23, 2017
- ASM IP Holding B.V.
- John Kevin Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lockout tagout for semiconductor vacuum valve
- Patent number 9,404,587
- Issue date Aug 2, 2016
- ASM IP Holding B.V.
- John Shugrue
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Apparatus and method for calculating a wafer position in a processi...
- Patent number 9,117,866
- Issue date Aug 25, 2015
- ASM IP Holding B.V.
- David Marquardt
- G01 - MEASURING TESTING
Information Patent Grant
Methods using eddy current for calibrating a CMP tool
- Patent number 7,189,140
- Issue date Mar 13, 2007
- Novellus Systems, Inc.
- John Shugrue
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
CONTAINMENT AND EXHAUST SYSTEM FOR SUBSTRATE POLISHING COMPONENTS
- Publication number 20250065473
- Publication date Feb 27, 2025
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MONITORING AND C...
- Publication number 20230243033
- Publication date Aug 3, 2023
- ASM IP HOLDING B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTAINMENT AND EXHAUST SYSTEM FOR SUBSTRATE POLISHING COMPONENTS
- Publication number 20220305618
- Publication date Sep 29, 2022
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
MULTIPLE TEMPERATURE RANGE SUSCEPTOR, ASSEMBLY, REACTOR AND SYSTEM...
- Publication number 20210156030
- Publication date May 27, 2021
- ASM IP HOLDING B.V.
- John Kevin Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR ISOLATING A REACTION CHAMBER FROM A LOADI...
- Publication number 20210143048
- Publication date May 13, 2021
- ASM IP HOLDING B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR ISOLATING A REACTION CHAMBER FROM A LOADI...
- Publication number 20210104427
- Publication date Apr 8, 2021
- ASM IP HOLDING B.V.
- Carl Louis White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLED SUBSTRATE CARRIER AND POLISHING COMPONENTS
- Publication number 20210005479
- Publication date Jan 7, 2021
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEMS AND METHODS FOR CONTROLLING VAPOR PHASE PROCESSING
- Publication number 20200370179
- Publication date Nov 26, 2020
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIAPHRAGM VALVES, VALVE COMPONENTS, AND METHODS FOR FORMING VALVE C...
- Publication number 20200355296
- Publication date Nov 12, 2020
- ASM IP HOLDING B.V.
- John Kevin Shugrue
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DIAPHRAGM VALVES, VALVE COMPONENTS, AND METHODS FOR FORMING VALVE C...
- Publication number 20200018421
- Publication date Jan 16, 2020
- ASM IP HOLDING B.V.
- John Shugrue
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS AND METHODS FOR CONTROLLING VAPOR PHASE PROCESSING
- Publication number 20190368038
- Publication date Dec 5, 2019
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR SEMICONDUCTOR WAFER PROCESSING
- Publication number 20190316255
- Publication date Oct 17, 2019
- ASM IP HOLDING B.V.
- John Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MONITORING AND C...
- Publication number 20190276934
- Publication date Sep 12, 2019
- ASM IP HOLDING B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR DETECTING OR MONITORING FOR A CHEMICAL PRECURSOR IN A...
- Publication number 20190264324
- Publication date Aug 29, 2019
- ASM IP HOLDING B.V.
- John Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR ISOLATING A REACTION CHAMBER FROM A LOADI...
- Publication number 20190139807
- Publication date May 9, 2019
- ASM IP HOLDING B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR ISOLATING A REACTION CHAMBER FROM A LOADI...
- Publication number 20190139808
- Publication date May 9, 2019
- ASM IP HOLDING B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ASSEMBLY FOR DISTRIBUTING A GAS WITHIN A REACTION CHAMBE...
- Publication number 20190040529
- Publication date Feb 7, 2019
- ASM IP HOLDING B.V.
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EMISSIVITY, SURFACE FINISH AND POROSITY CONTROL OF SEMICONDUCTOR RE...
- Publication number 20170256401
- Publication date Sep 7, 2017
- ASM IP HOLDING B.V.
- Carl Louis White
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
VARIABLE CONDUCTANCE GAS DISTRIBUTION APPARATUS AND METHOD
- Publication number 20170216762
- Publication date Aug 3, 2017
- ASM IP HOLDING B.V.
- John Kevin Shugrue
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EMISSIVITY, SURFACE FINISH AND POROSITY CONTROL OF SEMICONDUCTOR RE...
- Publication number 20170011909
- Publication date Jan 12, 2017
- ASM IP HOLDING B.V.
- Carl Louis White
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
VARIABLE CONDUCTANCE GAS DISTRIBUTION APPARATUS AND METHOD
- Publication number 20160097120
- Publication date Apr 7, 2016
- ASM IP HOLDING B.V.
- John Kevin Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE TEMPERATURE RANGE SUSCEPTOR, ASSEMBLY, REACTOR AND SYSTEM...
- Publication number 20160097123
- Publication date Apr 7, 2016
- ASM IP HOLDING B.V.
- John Kevin Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOCKOUT TAGOUT FOR SEMICONDUCTOR VACUUM VALVE
- Publication number 20150308586
- Publication date Oct 29, 2015
- ASM IP HOLDING B.V.
- John Shugrue
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
APPARATUS AND METHOD FOR CALCULATING A WAFER POSITION IN A PROCESSI...
- Publication number 20140036274
- Publication date Feb 6, 2014
- ASM IP HOLDING B.V.
- David Marquardt
- G01 - MEASURING TESTING

John Kevin Shugrue

Person

Patents Grantslast 30 patents

Semiconductor processing apparatus and methods for monitoring and c...

Temperature controlled substrate carrier and polishing components

Containment and exhaust system for substrate polishing components

Systems and methods for controlling vapor phase processing

Multiple temperature range susceptor, assembly, reactor and system...

Semiconductor processing apparatus comprising one or more pyrometer...

Apparatus and methods for isolating a reaction chamber from a loadi...

Apparatus for detecting or monitoring for a chemical precursor in a...

Multiple temperature range susceptor, assembly, reactor and system...

Apparatus for semiconductor wafer processing

Apparatus and methods for isolating a reaction chamber from a loadi...

Apparatus and methods for isolating a reaction chamber from a loadi...

Systems and methods for controlling vapor phase processing

Diaphragm valves, valve components, and methods for forming valve c...

Variable conductance gas distribution apparatus and method

Variable conductance gas distribution apparatus and method

Lockout tagout for semiconductor vacuum valve

Apparatus and method for calculating a wafer position in a processi...

Methods using eddy current for calibrating a CMP tool

Patents Applicationslast 30 patents

CONTAINMENT AND EXHAUST SYSTEM FOR SUBSTRATE POLISHING COMPONENTS

SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MONITORING AND C...

CONTAINMENT AND EXHAUST SYSTEM FOR SUBSTRATE POLISHING COMPONENTS

MULTIPLE TEMPERATURE RANGE SUSCEPTOR, ASSEMBLY, REACTOR AND SYSTEM...

APPARATUS AND METHODS FOR ISOLATING A REACTION CHAMBER FROM A LOADI...

APPARATUS AND METHODS FOR ISOLATING A REACTION CHAMBER FROM A LOADI...

TEMPERATURE CONTROLLED SUBSTRATE CARRIER AND POLISHING COMPONENTS

SYSTEMS AND METHODS FOR CONTROLLING VAPOR PHASE PROCESSING

DIAPHRAGM VALVES, VALVE COMPONENTS, AND METHODS FOR FORMING VALVE C...

DIAPHRAGM VALVES, VALVE COMPONENTS, AND METHODS FOR FORMING VALVE C...

SYSTEMS AND METHODS FOR CONTROLLING VAPOR PHASE PROCESSING

APPARATUS FOR SEMICONDUCTOR WAFER PROCESSING

SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MONITORING AND C...

APPARATUS FOR DETECTING OR MONITORING FOR A CHEMICAL PRECURSOR IN A...

APPARATUS AND METHODS FOR ISOLATING A REACTION CHAMBER FROM A LOADI...

APPARATUS AND METHODS FOR ISOLATING A REACTION CHAMBER FROM A LOADI...

SHOWERHEAD ASSEMBLY FOR DISTRIBUTING A GAS WITHIN A REACTION CHAMBE...

EMISSIVITY, SURFACE FINISH AND POROSITY CONTROL OF SEMICONDUCTOR RE...

VARIABLE CONDUCTANCE GAS DISTRIBUTION APPARATUS AND METHOD

EMISSIVITY, SURFACE FINISH AND POROSITY CONTROL OF SEMICONDUCTOR RE...

VARIABLE CONDUCTANCE GAS DISTRIBUTION APPARATUS AND METHOD

MULTIPLE TEMPERATURE RANGE SUSCEPTOR, ASSEMBLY, REACTOR AND SYSTEM...

LOCKOUT TAGOUT FOR SEMICONDUCTOR VACUUM VALVE

APPARATUS AND METHOD FOR CALCULATING A WAFER POSITION IN A PROCESSI...