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John M. Algots
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San Diego, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Droplet generator steering system
Patent number
10,426,020
Issue date
Sep 24, 2019
ASML Netherlands B.V.
Peter M. Baumgart
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Apparatus for and method of supplying target material
Patent number
9,544,983
Issue date
Jan 10, 2017
ASML Netherlands B.V.
Chirag Rajyaguru
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Rapidly tunable laser source assembly with long stroke grating mover
Patent number
9,147,995
Issue date
Sep 29, 2015
Daylight Solutions, Inc.
Michael Pushkarsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System method and apparatus for selecting and controlling light sou...
Patent number
RE45249
Issue date
Nov 18, 2014
Cymer, LLC
Efrain Figueroa
372 - Coherent light generators
Information
Patent Grant
System method and apparatus for selecting and controlling light sou...
Patent number
8,144,739
Issue date
Mar 27, 2012
Cymer, Inc.
Efrain Figueroa
G01 - MEASURING TESTING
Information
Patent Grant
Laser spectral engineering for lithographic process
Patent number
7,382,815
Issue date
Jun 3, 2008
Cymer, Inc.
Ronald L. Spangler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
DUV light source optical element improvements
Patent number
7,346,093
Issue date
Mar 18, 2008
Cymer, Inc.
Richard L. Sandstrom
G01 - MEASURING TESTING
Information
Patent Grant
Laser spectral engineering for lithographic process
Patent number
7,298,770
Issue date
Nov 20, 2007
Cymer, Inc.
Ronald L. Spangler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Collector for EUV light source
Patent number
7,217,940
Issue date
May 15, 2007
Cymer, Inc.
William N. Partlo
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Laser spectral engineering for lithographic process
Patent number
7,139,301
Issue date
Nov 21, 2006
Cymer, Inc.
Armen Kroyan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High repetition rate laser produced plasma EUV light source
Patent number
7,087,914
Issue date
Aug 8, 2006
Cymer, Inc.
Robert P. Akins
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Bandwidth control technique for a laser
Patent number
7,079,556
Issue date
Jul 18, 2006
Cymer, Inc.
Igor V. Fomenkov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High power deep ultraviolet laser with long life optics
Patent number
6,904,073
Issue date
Jun 7, 2005
Cymer, Inc.
Thomas A. Yager
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Four KHz gas discharge laser system
Patent number
6,882,674
Issue date
Apr 19, 2005
Cymer, Inc.
Christian J. Wittak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser spectral engineering for lithographic process
Patent number
6,853,653
Issue date
Feb 8, 2005
Cymer, Inc.
Ronald L. Spangler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Four KHz gas discharge laser
Patent number
6,757,316
Issue date
Jun 29, 2004
Cymer, Inc.
Peter C. Newman
G01 - MEASURING TESTING
Information
Patent Grant
Bandwidth control technique for a laser
Patent number
6,721,340
Issue date
Apr 13, 2004
Cymer, Inc.
Igor V. Fomenkov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser spectral engineering for lithographic process
Patent number
6,671,294
Issue date
Dec 30, 2003
Cymer, Inc.
Armen Kroyan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser wavelength control unit with piezoelectric driver
Patent number
6,650,666
Issue date
Nov 18, 2003
Cymer, Inc.
Ronald L. Spangler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser wavelength control unit with piezoelectric driver
Patent number
6,532,247
Issue date
Mar 11, 2003
Cymer, Inc.
Ronald L. Spangler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fast wavelength correction technique for a laser
Patent number
6,529,531
Issue date
Mar 4, 2003
Cymer, Inc.
George J. Everage
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line narrowing unit with flexural grating mount
Patent number
6,496,528
Issue date
Dec 17, 2002
Cymer, Inc.
Clay C. Titus
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Narrow band laser with fine wavelength control
Patent number
6,192,064
Issue date
Feb 20, 2001
Cymer, Inc.
John M. Algots
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS FOR AND METHOD OF SUPPLYING TARGET MATERIAL
Publication number
20160128170
Publication date
May 5, 2016
ASML NETHERLANDS B.V.
Chirag RAJYAGURU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
System Method and Apparatus for Selecting and Controlling Light Sou...
Publication number
20100149647
Publication date
Jun 17, 2010
Efrain Figueroa
G02 - OPTICS
Information
Patent Application
High repetition rate laser produced plasma EUV light source
Publication number
20080197297
Publication date
Aug 21, 2008
Robert P. Akins
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Collector for EUV light source
Publication number
20060131515
Publication date
Jun 22, 2006
William N. Partlo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
High repetition rate laser produced plasma EUV light source
Publication number
20050205810
Publication date
Sep 22, 2005
Robert P. Akins
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser spectral engineering for lithographic process
Publication number
20050068997
Publication date
Mar 31, 2005
Cymer, Inc.
Ronald L. Spangler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Laser spectral engineering for lithographic process
Publication number
20050041701
Publication date
Feb 24, 2005
Ronald L. Spangler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DUV light source optical element improvements
Publication number
20040240506
Publication date
Dec 2, 2004
Richard L. Sandstrom
G01 - MEASURING TESTING
Information
Patent Application
Laser spectral engineering for lithographic process
Publication number
20040146082
Publication date
Jul 29, 2004
Armen Kroyan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Bandwidth control technique for a laser
Publication number
20040057474
Publication date
Mar 25, 2004
Cymer, Inc.
Igor V. Fomenkov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
High power deep ultraviolet laser with long life optics
Publication number
20030219056
Publication date
Nov 27, 2003
Thomas A. Yager
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Four KHz gas discharge laser system
Publication number
20030118072
Publication date
Jun 26, 2003
Christian J. Wittak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Laser spectral engineering for lithographic process
Publication number
20020167975
Publication date
Nov 14, 2002
Ronald L. Spangler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser wavelength control unit with piezoelectric driver
Publication number
20020154669
Publication date
Oct 24, 2002
Ronald L. Spangler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser spectral engineering for lithographic process
Publication number
20020048288
Publication date
Apr 25, 2002
Armen Kroyan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Line narrowing unit with flexural grating mount
Publication number
20020034208
Publication date
Mar 21, 2002
Clay C. Titus
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Four KHz gas discharge laser
Publication number
20020021728
Publication date
Feb 21, 2002
Peter C. Newman
G01 - MEASURING TESTING
Information
Patent Application
Laser wavelength control unit with piezoelectric driver
Publication number
20020006149
Publication date
Jan 17, 2002
Ronald L. Spangler
H01 - BASIC ELECTRIC ELEMENTS