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John McCoy
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San Carlos, CA, US
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last 30 patents
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Patent Grant
Semiconductor wafer alignment using backside illumination
Patent number
6,376,329
Issue date
Apr 23, 2002
Nikon Corporation
Michael R. Sogard
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Proximity effect correction method through uniform removal of fract...
Patent number
6,316,164
Issue date
Nov 13, 2001
N. William Parker
B82 - NANO-TECHNOLOGY
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Patent Grant
High throughput electron beam lithography system
Patent number
6,014,200
Issue date
Jan 11, 2000
Nikon Corporation
Michael R. Sogard
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Thin film detection method and apparatus
Patent number
5,936,254
Issue date
Aug 10, 1999
Nikon Research Corporation of America
Arun A. Aiyer
G01 - MEASURING TESTING
Information
Patent Grant
Direct reticle to wafer alignment using fluorescence for integrated...
Patent number
5,838,450
Issue date
Nov 17, 1998
Nikon Precision Inc.
John H. McCoy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wafer inspection method and apparatus using diffracted light
Patent number
5,777,729
Issue date
Jul 7, 1998
Nikon Corporation
Arun A. Aiyer
G01 - MEASURING TESTING
Information
Patent Grant
Atomic force microscope measurement process for dense photoresist p...
Patent number
5,741,614
Issue date
Apr 21, 1998
Nikon Corporation
John H. McCoy
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Alignment system with large area search for wafer edge and global m...
Patent number
5,648,854
Issue date
Jul 15, 1997
Nikon Corporation
John H. McCoy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multiple reticle stitching for scanning exposure system
Patent number
5,437,946
Issue date
Aug 1, 1995
Nikon Precision Inc.
John H. McCoy
G02 - OPTICS