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Hsin-Chu, TW
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Patents Grants
last 30 patents
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Patent Grant
Pre-deposition treatment and atomic layer deposition (ALD) process...
Patent number
10,297,453
Issue date
May 21, 2019
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Yen Tsai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pre-deposition treatment and atomic layer deposition (ALD) process...
Patent number
9,947,540
Issue date
Apr 17, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Yen Tsai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Pre-Deposition Treatment and Atomic Layer Deposition (ALD) Process...
Publication number
20180218912
Publication date
Aug 2, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Yen Tsai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRE-DEPOSITION TREATMENT AND ATOMIC LAYER DEPOSITION (ALD) PROCESS...
Publication number
20170032972
Publication date
Feb 2, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Yen Tsai
H01 - BASIC ELECTRIC ELEMENTS